45 5" Quartz Mask plate, 105" Quartz Mask plate coating

Solicitation / RFP / RFQ

This document is a Request for Quotation (RFQ) for a "Brand Name" requirement. The solicitation outlines the process for submitting quotes and the criteria for award.

• The bid schedule requires the inclusion of CAGE/UEI CODE, FOB DESTINATION, LEAD TIME FOR DELIVERY, and POC NAME & EMAIL.

• Specific attachments are referenced for further details.

• Vendors must reference the RFQ Notice ID Number in the subject line of their email when submitting a quote.

• The contract type is Firm Fixed Priced, with the total price to be determined (TBD).

• Delivery is FOB Destination.

• Quotes are due by 4/23/2026 at 12:00 p.m. CT to Monica Wilson at monica.d.wilson@nasa.gov.

• Quotes must remain valid for 30 days.

• Submitted quotes must list two points of contact (name, phone number, email address).

• Contractual and technical questions must be submitted in writing (email) to Monica Wilson by 4/22/2026 at 12:00 p.m. CT. Telephone questions will not be accepted.

• The NAICS Code for this procurement is 334516.

• Award will be made to the responsible Offeror whose offer conforming to the solicitation is the lowest price technically acceptable (LPTA).

• Offers not deemed technically acceptable will be removed from further consideration.

• This procurement is set aside for small business.

• Offerors shall be registered at www.sam.gov to be considered for award.

• The solicitation incorporates various FAR and NFS clauses by reference, including those related to System for Award Management, Government Property, Duty-Free Entry, Place of Manufacture, Export Licenses, and Ombudsman.

• Personal Identity Verification of Contractor Personnel is required.

Recommendation and Determination to Solicit from One Source / Brand Name

This document recommends that NASA Shared Services Center negotiate with a single vendor, Photronics Inc., for the procurement of 5" customized quartz mask plates. This is a determination to solicit from one source or brand name due to impracticality of competition.

• The NASA Goddard Space Flight Center (GSFC) requires customized quartz mask plates for producing detector prototypes.

• These prototypes require high alignment between masks within a set, necessitating specialized equipment calibration.

• Previous prototype designs incorporated masks from this vendor, and using the same vendor ensures co-alignment for existing prototypes.

• Switching vendors would require GSFC to restart ongoing prototyping efforts.

• This would result in a schedule impact of approximately 6 months of GSFC labor and associated costs, exceeding the cost and duration of the planned contract.

• Estimated cost: [REDACTED]

• Period of performance/lead-time for delivery: 6/1/2027, with a three-day lead time after data approval.

Not applicable, as this is a sole-source justification, not a solicitation.

Not applicable, as this is a sole-source justification.

• The document includes questions and answers addressing the rationale for sole-source procurement and the impact of using alternative vendors.
• Dated: 3/25/2026

Statement of Work (SOW)

To procure customized 5" quartz mask plates for NASA GSFC's Detector Systems Branch, essential for producing large format arrays of sensitive x-ray detector elements for the ATHENA X-IFU project and other instruments. The goal is to achieve high performance and ensure timely availability of these mask plates.

This document outlines the procurement of 5" quartz mask plates, including specifications for the plates, potential Teflon coating, data handling, and delivery timelines. It also details expectations for the period of performance and quantities.

• Product: Core 2564 (Laser) or Alternative Write Tool Generated 1X Master quartz mask plates.

• Quantity: 45 quartz plates and 10 Teflon coatings.

• Specifications:

  • Grade: 5" QTZ
  • Min Feature Size: 1 um
  • Material: 5090EQAR 2C
  • Address Size: ≥ 0.1 um
  • Critical Dimension Size: ≥ 1 um
  • Critical Dimension Tolerance: ± 0.1 um
  • Registration Guaranteed: Y
  • Registration: 0.25 um
  • Defect Criteria: 0 DPA ≥ 1 um

• Coating: Vendor must be able to coat plates with Teflon.

• Data Handling: Vendor will provide a platform for NASA GSFC data intake and output, process data for visualization, and provide a platform for inspection. Vendor will provide tracking information upon request.

• Delivery:

  • Data provided to NASA GSFC within 2 days for inspection.
  • Mask delivered to GSFC within 3 days after data approval.

• Order Flexibility: Vendor shall accept orders for fewer than the total quantity and provide separate billing.

• Period of Performance: One year from the date of award.

• Place of Performance: Vendor location.

NASA GSFC provides payment upon receipt of items.

Vendor proposal must meet all specifications for mask plate production.

Questions & Answers / Clarifications

This document provides clarification regarding the requirements for the "45 5" Quartz Mask plate, 105" Quartz Mask plate coating" opportunity (SATPC0040734/PR4200929278).

• Question: Whether a defect rate of "1 per square inch @ 1.5 um" would be acceptable.
• Answer: No, this rate is not acceptable. The stated requirement is 1.0 micron. The response clarifies that the acceptable metric is DPA (defect per area on the mask), and the proposed rate of 1.5 um is too far from the requirement to be considered acceptable.

This clarification emphasizes the strictness of the 1.0 micron requirement for defects on the quartz mask plates and coating. Bidders should ensure their proposed processes and quality control measures align with this specific micron requirement.

Statement of Work (SOW)

Procure customized 5" quartz mask plates for NASA GSFC to produce large format arrays of sensitive x-ray detector elements for the ATHENA X-IFU project. The masks are critical for achieving high performance in array devices.

• Procurement of 5" quartz mask plates.

• Potential coating of mask plates with Teflon.

• Vendor to provide data intake from NASA GSFC and output to a protected server.

• Vendor to provide rapid turnaround time for data processing for inspection and delivery.

• Product: Core 2564 (Laser) or Alternative Write Tool Generated 1X Master.

• Grade: 5" QTZ.

• Min Feature Size: 1 um.

• Material: 5090EQAR 2C.

• Address Size: ≥ 0.1 um.

• Critical Dimension Size: ≥ 1 um.

• Critical Dimension Tolerance: ± 0.1 um.

• Registration Guaranteed: Y.

• Registration: 0.25 um.

• Defect Criteria: 0 DPA ≥ 1 um.

• Quantity: 45 quartz plates, 10 Teflon coatings.

• Vendor must be able to coat plates with Teflon.

• Vendor to provide a platform for receipt of customized data and processing it for visualization and inspection by NASA GSFC.

• Vendor to provide tracking information upon request.

• Suitable packaging and shipping to be provided by the vendor.

• Period of Performance: One year from date of award.

• Place of Performance: Vendor location.

• Payment Terms: NASA GSFC provides payment upon receipt of items.

• Delivery Schedule:

  • Vendor provides remote access to view mask data within 2 working days of receipt of order.
  • Vendor prints mask plates, inspects, and delivers to NASA within three working days of receipt of approval of mask data.

NASA GSFC Greenbelt, MD 20771

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