Statement of Work (SOW) / Performance Work Statement (PWS)
To procure an Atomic Force Microscope (AFM) system for use within a Scanning Electron Microscope (SEM) and at atmospheric pressure. This equipment is critical for the National Institute of Standards and Technology's (NIST) CHIPS Metrology 1.01 project, focusing on evaluating 2D and wide bandgap materials to enhance device reliability and support U.S. semiconductor manufacturing innovation.
The contractor shall supply, install, and provide introductory training for a compact AFM system. The system must be capable of operating both inside and outside an SEM, enabling live correlative imaging and measurements of mechanical, electrical, electro-mechanical, and magnetic properties at single- to sub-nanometer resolution. Key functionalities include:
AFM Scan Head: Capable of operating in SEM vacuum and atmospheric pressure, compatible with specified SEM models (Zeiss Gemini 300 VP and Thermo Fisher Scios 2 Dual Beam FIB-SEM), with a specified scan range and sample accommodation.
Control Unit: To operate the AFM, interface with the user and SEM, supporting specific power, sampling frequency, and analog input/output requirements.
Software: Including modules for Kelvin Probe Force Microscopy (KPFM), Piezoresponse Force Microscopy (PFM), and Scanning Spreading Resistance Microscopy, with a user interface for control and basic post-processing.
Accessories: An enclosure for ambient pressure operation (including controlled gas atmospheres), a digital camera, sample rotation module, and various test reference samples and probe sets for different measurement modes.
Period of Performance: Five (5) months from the date of receipt of order (ARO).
Place of Performance: NIST, 325 Broadway, Boulder, CO 80305, Building 81.
New Equipment: All components must be new; used, remanufactured, or experimental items are not acceptable.
Training: 1.5 days of initial training on installation, probe/sample prep, software, basic measurements, and AFM-SEM correlation, plus 0.5 days on conductive AFM (cAFM) operation.
Warranty: Minimum of 1 year, commencing upon acceptance, including return-to-vendor service for defective components and software upgrades.
Delivery: FOB Destination.
Cybersecurity: Solution must meet federal requirements for security and privacy, including system security plans, patching, access controls, vulnerability scanning, auditing, incident response, and encryption standards (FIPS 140-2/140-3 validated).
Contractor Personnel: Must comply with NIST safety and security regulations, including obtaining identification badges and registering vehicles.