CHIPS R&D Bond Strength Tester

Statement of Work (SOW) / Performance Work Statement (PWS)

The objective of this SOW is to acquire a commercial bond tester machine to support NIST's Physical Measurements Laboratory (PML) in developing bond strength measurements and standards for dielectric, metal-to-metal, and hybrid bonding within the semiconductor industry. The goal is to create more repeatable and efficient standards to meet industry requirements.

NIST requires a benchtop bond tester system capable of performing multiple types of force testing, including wire pull, pull, die shear, and stud pull tests. The system must accommodate custom fixturing for various test structures and wafer sizes. Key capabilities include:

• Testing Types: Wire Pull (100 g-F), Pull (10 kg-F), Die Shear (10 kg-F and 100 kg-F), Stud Pull (100 kg-F).

• Accuracy: Better than 1% for all specified force tests.

• Motion Control: Motorized X-Y-Z stage with joystick or computer control, minimum 100mm x 100mm X-Y range, 40mm Z range, and 1-micrometer resolution.

• Tooling: Includes pull hooks for 1 mil wire and up to 10 kg-F, shear tools of specific widths, and stud pull tooling for up to 100 kg-F.

• Fixturing: Configurable for chip sizes 5mm-50mm and wafer fixturing up to 150mm. Must allow for end-user fabrication of custom fixtures.

• Viewing: Operator stereoscope and video camera.

• Testing & Monitoring: Fast module exchange (<5 min) without re-calibration, automatic stage/test positioning, recording of force vs. distance profiles, adjustable force limits for non-destructive testing, and video recording.

• Data Management: Ability to store/recall test methods and all data sets.

• Compliance: Must comply with applicable MIL-STD-883 Test Methods.

• Accuracy better than 1% for specified force tests.

• Module exchange less than 5 minutes.

• Compliance with MIL-STD-883 Test Methods.

• Delivery: No later than 15 weeks after receipt of order.

• Installation & Training: Within 4 weeks after delivery.

• Place of Performance: NIST Boulder, 325 Broadway, Boulder, CO 80305.

• Equipment: All items must be new; no used, remanufactured, experimental, prototype, custom, or "gray market" components.

• Utilities: Operates on 120V/60Hz/20A circuit, requires clean dry air (75 psi), and vacuum supply (20 in Hg).

• Physical Constraints: Size envelope of 32"x32"x32" or smaller, weight of 200 lb or less.

• Cybersecurity: Must meet federal requirements for security and privacy protection (FISMA, OMB Circular A-130, FIPS Publication 200, SP 800-171), including encryption of SPII in transit (TLS 1.2+) and at rest (FIPS 140-2/140-3 validated).

• Warranty: Minimum 1 year after receipt of equipment.

• Delivery Terms: FOB Destination or DDP.

• Training: For up to three users at NIST, covering system functions, maintenance, data administration, and troubleshooting.

• Personnel: Contractor personnel must comply with NIST safety and security requirements, including identification badges and vehicle registration.

Form / Attachment / Pricing Sheet

This document, "Attachment 2 - Applicable Provisions and Clauses," lists solicitation provisions and contract clauses that are incorporated by reference. It provides links to access the full text of these provisions and clauses electronically and specifies which ones must be completed by the offeror and submitted with their quotation or offer. It also includes the full text of FAR 52.212-4, Terms and Conditions—Commercial Products and Commercial Services, and other relevant provisions and clauses.

• Solicitation Provisions Incorporated by Reference (FAR 52.252-1): Informs offerors that provisions are incorporated by reference and provides links for full text access. Offerors may need to complete certain blocks and submit them.
• Clauses Incorporated by Reference (FAR 52.252-2): Similar to provisions, this indicates clauses are incorporated by reference, with links provided for full text.
• List of Incorporated Provisions and Clauses: A comprehensive list of specific FAR and NIST clauses and provisions, many with "DEVIATION JAN 2026" indicating recent updates.
• Full Text of FAR 52.212-4: Details terms and conditions for commercial products and services, covering definitions, inspection, acceptance, changes, disputes, payment, termination, warranty, and more.
• Other Provisions: Includes FAR 52.225-2 (Buy American Certificate), FAR 52.225-18 (Place of Manufacture), FAR 52.240-90 (Security Prohibitions and Exclusions Representations and Certifications), and NIST local clauses related to agency protests, GAO/COFC protests, place of acceptance, contractor performance during NIST operating status changes, and electronic billing instructions.

This document is critical for bidders as it outlines the legal and contractual framework governing the opportunity. Bidders must review the listed provisions and clauses to understand their obligations, requirements for submission (e.g., representations, certifications, completed forms), and the terms that will apply if awarded a contract. Particular attention should be paid to deviations, security requirements, and submission procedures for invoices and protests.

Solicitation / RFP / RFQ

This is a combined synopsis/solicitation for commercial products or services, prepared in accordance with FAR Part 12. The government is seeking quotations for a Bond Tester, including shipping, installation, and training.

• CLIN 0001: Bond Tester (IAW Attachment #1)

• CLIN 0002: Shipping, Installation, and Training

• CLIN 0003: Other transportation related charges (Not-to-Exceed amount)

• Detailed requirements are specified in the attached Statement of Work document.

• Contract Type: Firm-fixed-price purchase order.

• Award will be made to the lowest priced, technically acceptable offeror.

• Submission Deadline: February 16, 2026, by 11:00 AM Eastern Time.

• Submission Method: Electronic quotations via email to tracy.retterer@nist.gov and Donald.collie@nist.gov. Reference the RFQ number in the subject line.

• Pre-Quote Inquiries: Submit written questions to the Contract Specialist and Contracting Officer no later than 5 calendar days after solicitation issuance.

• Quotation Preparation: Must be clearly written, indexed (or have a Table of Contents), and logically assembled. Quotations must be divided into three distinct volumes:

  • Volume I – Technical Quotation (demonstrating capability, approach, and compliance with SOW)
  • Volume II – Price Quotation (firm-fixed-price for each CLIN, including shipping; valid for 90 days)
  • Volume III – Terms and Conditions (complete required information and state any exceptions).

• Evaluation Criteria: Award will be based on the lowest price among technically acceptable offers. Technical capability will be evaluated based on submitted documentation demonstrating that the proposed equipment meets or exceeds all minimum requirements.

• This acquisition is solicited as a 100% small business set-aside.

• NAICS Code: 334519 with a small business size standard of 500 employees.

• Solicitation Number: 1333ND26QNB030040.

• Incorporated provisions and clauses are those in effect through the RFO.

• Attachments referenced: Statement of Work/Requirements Document and Drawings, Applicable Provisions and Clauses.