CHIPS R&D Custom Diffractometry and Fourier Ptychography Endstation

Solicitation / RFP / RFQ

This is a solicitation for commercial products or services, prepared in accordance with FAR Part 12. It constitutes the only solicitation, and written quotes are requested. The solicitation number is 1333ND26QNB680229, and it is a Request for Quotation (RFQ) for unrestricted competition.

• CLIN 0001: Custom Diffractometry and Fourier Ptychography Endstation (IAW Attachment #1)
• CLIN 0002: Optional Installation and Training (IAW Attachment #1)
• CLIN 0003: Shipping
• CLIN 0004: Other transportation related charges (Not-to-Exceed amount)

The detailed requirements are provided in Attachment #1: STATEMENT OF WORK/REQUIREMENTS DOCUMENT AND DRAWINGS.

• Contract Type: Firm-fixed-price purchase order.

• Delivery and acceptance dates, and FOB point are detailed in the Statement of Work.

• Submission Deadline: Not later than 11:00 am Eastern Time, June 29, 2026.

• Submission Method: Electronic quotations via email to tracy.retterer@nist.gov and Donald.collie@nist.gov. Reference the RFQ number in the subject line.

• Quotation Preparation: Must be clearly written, indexed (or have a Table of Contents), and logically assembled. Quotations must be divided into three volumes:

  • Volume I: Technical Quotation (addressing technical approach, capability, and demonstrating how proposed items meet or exceed SOW requirements with citations).
  • Volume II: Price Quotation (firm-fixed-price for each CLIN, including shipping, tariffs, and other charges. Must remain valid for 90 days).
  • Volume III: Terms and Conditions (complete required information and state any exceptions).

• Pre-Quote Inquiries: Submit questions in writing to both the Contract Specialist and Contracting Officer no later than 5 calendar days after the solicitation issuance date.

• Evaluation Criteria: Award will be made to the responsible offeror who meets all required technical specifications and proposes the lowest price (lowest priced, technically acceptable offeror).

• Competition: Unrestricted competition.

• SAM Registration: Offerors must possess an ACTIVE registration in SAM.gov at the time of quotation submission, award, performance, and final payment. Failure to maintain active registration will result in disqualification.

• NAICS Code: 334519 with a small business size standard of 600 employees.

• Applicable provisions and clauses are in Attachment #2.

• The government may award without discussions based solely on initial quotes.

• Offerors must clearly identify any other or unknown charges for products manufactured outside the U.S. as part of CLIN 0004.

Form / Attachment / Pricing Sheet

This document, "Attachment 2 - Applicable Provisions and Clauses," lists solicitation provisions and contract clauses that are incorporated by reference. It provides links to access the full text of these provisions and clauses electronically. Bidders are cautioned that some provisions may require completion and submission with their offer.

• Solicitation Provisions Incorporated by Reference (FAR 52.252-1): Notifies offerors that provisions are incorporated by reference and may require completion.
• Clauses Incorporated by Reference (FAR 52.252-2): Notifies that clauses are incorporated by reference and may require completion.
• List of Incorporated Provisions and Clauses: A comprehensive list of FAR and agency-specific provisions and clauses, many with "DEVIATION JAN 2026" or other recent dates, indicating potential updates or specific requirements.
• Full Text Sections: Includes the full text for FAR 52.212-4 (Terms and Conditions—Commercial Products and Commercial Services), FAR 52.225-6 (Trade Agreements Certificate), FAR 52.225-18 (Place of Manufacture), FAR 52.240-90 (Security Prohibitions and Exclusions Representations and Certifications), and agency-specific clauses (1352.233-70, 1352.233-71, 1352.246-70, NIST LOCAL-53, NIST LOCAL-54, NIST LOCAL-56).

This document is critical for bidders as it outlines the legal and regulatory framework governing the solicitation and any resulting contract. Bidders must review the listed provisions and clauses, particularly those requiring action or representation (e.g., certifications, representations, specific terms and conditions), to ensure compliance with all requirements. The inclusion of deviations and specific NIST local clauses highlights areas requiring careful attention for accurate proposal preparation and contract adherence.

Statement of Work (SOW) / Performance Work Statement (PWS)

To acquire a customized diffractometry and Fourier ptychography endstation for the Nanoscale Device Characterization Division (NDCD) to expand measurement capabilities using extreme-ultraviolet (EUV) light for non-destructive three-dimensional measurement of nanoscale features in computer chips, supporting the American semiconductor industry and the CHIPS R&D Metrology Program.

• Provide a new, custom vacuum chamber body (40"x40" interior, 24" height) capable of high vacuum (10-6 Torr base pressure), constructed from stainless steel or aluminum.

• Include a sample stage with 4 degrees of freedom (X-Y-Z-R) for holding a 300 mm Si wafer, with specified resolutions and travel ranges, compatible with high vacuum.

• Provide an optical/camera stage with motorized vertical arc arm and camera holding arm, allowing movement and tilt for a vacuum-compatible EUV camera.

• Supply a full in-vacuum EUV camera with specified resolution (2k x 2k or better), bit depth (16-bit or more), QE, frame rates, and cooling capabilities.

• All components must be new, and experimental/prototype items are not acceptable.

• Contractor shall provide detailed CAD drawings for NIST approval prior to manufacturing.

• Vacuum chamber must achieve a base pressure of 10-6 Torr.

• Leak testing down to 1 x 10-6 Torr∙L/s.

• Reach pressure < 7.5 x 10-7 Torr at room temperature prior to shipment.

• Sample stage resolution: sub-μm (X-Y), ~15 nm (Z), sub min (R).

• Camera specifications include QE, read noise, and resolution.

• Period of Performance: 13 months from the date of award (excluding warranty).

• Delivery: Not later than 120 days after receipt of order (ARO).

• Place of Delivery: National Institute of Standards and Technology, Gaithersburg, MD.

• Option for installation and training (Line Item 0002).

• Installation includes uncrating, setup, hook-up, demonstration, and trash removal.

• Training for up to two users on system functions, maintenance, and troubleshooting.

• Warranty: Minimum of 1 year from acceptance.

• Payment: 100% after installation, acceptance, and successful completion of testing and demonstration requirements.

• Delivery Terms: FOB Destination.

• Inspection and Acceptance: NIST will inspect and test within 10 business days of receipt. Government reserves the right to perform performance tests.