CHIPS R&D Optical frequency comb, Control electronics

Solicitation / RFP / RFQ

This is a combined synopsis/solicitation (RFQ) for commercial products or services, conducted as full and open competition. The acquisition is for a Mid-Infrared femtosecond laser source system, femtosecond laser control electronics, and an ultrastable laser system, as detailed in Attachment 1 (Statement of Work).

• CLIN 0001: Mid-Infrared femtosecond laser source System (IAW Attachment 1)
• CLIN 0002: Femtosecond laser control electronics (IAW Attachment 1)
• CLIN 0003: Ultrastable laser system (IAW Attachment 1)
• CLIN 0004: Shipping
• CLIN 0005: Other related transportation expenses (Not-to-Exceed)

Detailed requirements are specified in Attachment 1 (Statement of Work).

• Contract type: Firm-fixed-price quotation requested.

• Delivery and acceptance dates are in the Statement of Work.

• FOB point is in the Statement of Work.

• Submission Deadline: March 9, 2025, by 11:00 AM Eastern Time.

• Submission Method: Electronic quotations via email to tracy.retterer@nist.gov and Donald.collie@nist.gov. Reference RFQ number in the subject line.

• Quotation Preparation: Must be indexed (or have a Table of Contents), logically assembled, and divided into four distinct volumes:

  • Volume I: Technical Quotation (addressing technical approach, capability, and adherence to SOW requirements with evidence)
  • Volume II: Demonstrated Experience (past 5 years, prime or subcontractor)
  • Volume III: Price Quotation (firm-fixed-price per CLIN, valid for 90 days)
  • Volume IV: Terms and Conditions (complete required information and state acceptance or exceptions)

• Inquiries Deadline: Questions must be submitted in writing to both email addresses no later than 5 calendar days after solicitation issuance.

• Evaluation Criteria: Best value award, considering price and non-price factors. Non-price factors (Technical Capability and Prior Demonstrated Experience) are more important than price. Price will be evaluated for reasonableness on quotes rated above low confidence in non-price factors.

  • Factor 1 (Technical Capability): Assesses how well the proposed solution meets SOW requirements. Higher confidence for systems operating in both XCL and XCT modes, and for higher spatial resolution/faster scan speeds in XCT mode.
  • Factor 2 (Prior Demonstrated Experience): Evaluates past performance delivering similar instruments.
  • Factor 3 (Price): Evaluated for reasonableness.

• NAICS Code: 334516 - Analytical Laboratory Instrument Manufacturing.

• Small Business Size Standard: 1,000 employees.

• Offerors must have an ACTIVE registration in SAM.gov at the time of quotation submission, award, performance, and final payment.

• This solicitation uses FAR Part 12 and includes deviations for FAR 52.212-1 and FAR 52.212-2.

• Attachments referenced: Attachment 1 (SOW), Attachment 2 (Provisions and Clauses).

• Government reserves the right to award without discussions based on initial quotes.

Statement of Work (SOW)

To procure a Mid-Infrared Femtosecond Laser Source, Femtosecond Laser Control Electronics, and an Optical Frequency Reference to enable novel optical diagnostics for studying chemical transformations in key plasma etching processes within semiconductor manufacturing. This equipment is critical for the CHIPS Metrology Program's Grand Challenge 5, focusing on Modeling/Simulating Semiconductor Manufacturing Processes.

• Mid-Infrared Femtosecond Laser Source (Line Item 0001): Requires a new, tunable laser system (3.0 μm to 4.8 μm) with specific pulse width (<400 fs), repetition rate (100 MHz ± 5 MHz), bandwidth, and average power specifications. Output must be free space and linearly polarized. Physical dimensions and power requirements (120 V) are specified.

• Femtosecond Laser Control Electronics (Line Item 0002): New, rack-mountable control unit compatible with a 19-inch instrument rack, featuring a 2m ± 1m umbilical cord and USB interface for Windows PCs. Must be compatible with the laser source.

• Ultrastable Laser System (Line Item 0003): New, continuous-wave laser system (1061 nm - 1067 nm) locked to an optical frequency cavity with specified finesse (>40,000) and drift rate (<10 kHz/s). Includes locking electronics, multiple signal outputs, and a beat note detection unit for use with a frequency comb laser.

• Delivery: All items due no later than 28 weeks after receipt of order.

• Place of Delivery: NIST (Gaithersburg), specific address provided.

• Place of Performance: Contractor's site.

• New Equipment: All items must be new; used, remanufactured, or "gray market" components are unacceptable.

• Packaging & Documentation: Items must be shipped in original manufacturer packaging with all original documentation and software.

• Cybersecurity: Solution must comply with federal laws, regulations, and NIST SP 800-171, including requirements for system security plans, access controls, vulnerability scanning, incident response, and encryption (TLS 1.2+, FIPS 140-2/140-3 validated).

• Warranty: Minimum one year after receipt of equipment, in accordance with FAR 52.212-4.

• Inspection & Acceptance: NIST will inspect and accept/reject within 30 working days of receipt. Performance tests (Direct frequency comb spectroscopy) may be conducted at NIST's discretion. Visual inspection for damage is mandatory.

• Delivery Terms: F.O.B Destination.

Forms / Attachments / Pricing Sheets

This document lists and incorporates by reference various Federal Acquisition Regulation (FAR) provisions and clauses that are applicable to the solicitation and any resulting contract. It also provides the full text for some key clauses.

• Solicitation Provisions Incorporated by Reference (52.252-1): Lists provisions that are incorporated by reference and directs offerors to request full text or access them online. It notes that some provisions require completion by the offeror.
• Clauses Incorporated by Reference (52.252-2): Lists clauses incorporated by reference and directs offerors to request full text or access them online.
• List of Incorporated Provisions and Clauses: A comprehensive list of specific FAR clauses and provisions (e.g., 52.203-17, 52.204-7, 52.212-1, 52.222-19, 52.225-5, 52.232-33, 52.233-4, 1352.201-70, 1352.233-70, 1352.246-70).
• Full Text Clauses: Provides the complete text for FAR 52.212-4 (Terms and Conditions—Commercial Products and Commercial Services), FAR 52.217-9 (Option to Extend the Term of the Contract), FAR 52.225-6 (Trade Agreements Certificate), FAR 52.225-18 (Place of Manufacture), and FAR 52.240-90 (Security Prohibitions and Exclusions Representations and Certifications).
• NIST Local Clauses: Includes specific NIST clauses related to contract performance during changes in operating status (NIST LOCAL-53), electronic billing instructions (NIST LOCAL-54), and invoicing processing platform (NIST LOCAL-56).

Bidders must carefully review all incorporated provisions and clauses, as they define the terms and conditions of the contract. Specific attention should be paid to clauses requiring offeror action, representations, certifications, and compliance. The full text clauses provide critical details on contract performance, payment, disputes, termination, and other essential requirements. Understanding these provisions is crucial for preparing a compliant offer and for fulfilling contractual obligations if awarded.