Combined SSN/NOI: Notice of Intent to Noncompetitively Acquire Tilt Stage for SEM

Quick Summary

The National Institute of Standards and Technology (NIST), under the Department of Commerce, has issued a Combined Sources Sought Notice and Notice of Intent to Sole Source for the non-competitive acquisition of a tilt stage for its Zeiss Supra SEM. NIST intends to award a contract to Kleindiek, Inc. for this critical upgrade. Responses from interested parties are due by May 29, 2026, at 5:00 PM ET.

Purpose & Background

NIST's Microsystems and Nanotechnology Division (MND) requires a tilt stage upgrade for its Zeiss Supra SEM to support the CHIPS Metrology project GC6.01 – Universal Microscopy Standards. This acquisition is essential for developing calibration methods for electron beam landing angles, assessing nanofabrication processes, and characterizing microscopy standards. The current SEM stage lacks the necessary dynamic control over sample orientation (all three Euler angles) during imaging, which is crucial for achieving project objectives and ensuring dimensional accuracy in semiconductor manufacturing metrology.

Requirements

NIST requires a tilt stage that functions as a substage attachment, routinely installable and uninstallable. Key technical specifications include:

• Rotation: About an axis perpendicular to the existing tilt axis, with an encoder (absolute accuracy < 0.5 degrees, resolution < 0.2 degrees) and rotational travel of at least +/- 90 degrees.
• Translation: A z-axis translation perpendicular to the sample plane with a resolution better than 2 nm.
• Sample Plane Rotation: A rotational degree of freedom in the sample plane with a resolution better than 0.05 degrees.
• Control: Dynamically controllable during SEM operation, including control electronics and software compatible with Windows OS.

Sole Source Justification

NIST's market research (March-May 2026) indicates that Kleindiek, Inc. is the only manufacturer capable of providing a tilt stage upgrade for the Zeiss Supra SEM that offers dynamic control over sample orientation in all three Euler angles and operates during active imaging. Other vendors only provide manually adjustable stages, which do not meet NIST's mission-critical requirements for real-time sample leveling and characterization. Kleindiek, Inc. does not have authorized resellers.

Response Instructions

This is not a request for quotation. Interested parties capable of meeting or exceeding the stated requirements should submit a response via email to the Primary Point of Contact by May 29, 2026, at 5:00 PM ET. Responses should include:

• Company name, address, contact information, and UEI.
• A capability statement detailing how your company meets or exceeds NIST's minimum requirements.
• Evidence of authorized reseller status, if applicable.
• Identification of any unduly restrictive requirements and suggestions for encouraging small business participation.
• NAICS code status (small/other than small) and alternative NAICS code suggestions.
• Existing Federal Supply Schedule contracts or other relevant contracts.
• Experience providing similar products/services.
• Any other valuable information for the Government's market research.

Key Dates & Contacts

• Questions Due: May 19, 2026, 5:00 PM ET
• Responses Due: May 29, 2026, 5:00 PM ET
• Primary Contact: Cielo Ibarra (cielo.ibarra@nist.gov)
• Place of Performance: Gaithersburg, MD

Important Notes

This notice is for market research and planning purposes only and does not constitute a commitment by NIST to issue a solicitation or award a contract. Responses will not be considered proposals or quotations, and no award will be made as a result of this notice. Respondents will not be reimbursed for any costs incurred.