Combined Synopsis/Solicitation for In-Vacuum Extreme-Ultraviolet (EUV) Camera

Statement of Work (SOW) / Performance Work Statement (PWS)

The National Institute of Standards and Technology (NIST) Sensor Science Division (SSD) requires a novel, in-vacuum camera for Extreme Ultraviolet (EUV) Scatterometry. This camera is a critical component for a new experimental apparatus at the Synchrotron Ultraviolet Research facility (SURF III) to support the CHIPS mission by developing metrology techniques for advanced semiconductor manufacturing. The goal is to enable non-destructive measurement of nanoscale patterned features, specifically transistors, using EUV wavelengths.

This SOW details the requirements for procuring a complete system, including:

• Line Item 0001: In-vacuum EUV Camera: A four-megapixel CCD camera, sensitive to VUV and EUV light (10 nm to 150 nm wavelength range), capable of in-vacuum operation. It must be positioned within the vacuum chamber (not flange-mounted) and meet specific quantum efficiency (QE) and noise reduction requirements.
• Line Item 0002: Chiller: A system to provide liquid cooling (no greater than -55°C) to maintain camera performance.
• Line Item 0003: Feedthrough: A 6” Conflat flange with UHV compatible feedthroughs for electrical connections (data/power) and liquid cooling.
• Line Item 0004: Software: LabView VI’s SDK and a generic GUI for Windows, allowing image capture and camera control.
• Option Line Item 0005: Python SDK: An optional Python SDK for similar functionality.

The system must be new, free of "gray market" components, and shipped in original manufacturer packaging with all documentation.

• Vacuum Compatibility: Components exposed to vacuum must be compatible with < 10^(-9) Torr base pressure; no greases allowed.

• Camera Specifications: Minimum 2048x2048 pixels, < 1000 pixels deviating > 6 standard deviations from mean, dark current < 0.015 electrons/pixel/sec. Specific QE minimums are provided for wavelengths from 8.3 nm to 150 nm.

• Cooling: Chiller must provide liquid cooling at or below -55°C.

• Software: Must enable image capture and control of camera settings.

• Delivery: No later than 20 weeks after receipt of order.

• Place of Delivery: NIST Gaithersburg, 100 Bureau Drive, Building 301, Gaithersburg, MD 20899.

• Condition: All items must be new, not experimental or remanufactured. Camera and accessories must be cleaned and bagged for UHV service.

• Cabling: Vacuum-compatible cabling (min. 60 cm) and atmospheric cabling required.

• Power: Power supply must accept 120 VAC, 60 Hz.

• Cybersecurity: Solution must meet NIST cybersecurity requirements, including system security plans, patching, access controls, vulnerability scanning, auditing, and encryption (TLS 1.2+, FIPS 140-2/140-3 validated algorithms).

• Warranty: Minimum 1 year after acceptance.

• Payment: 100% after installation, acceptance, and successful completion of testing and demonstration.

Solicitation / RFP / RFQ

This is a combined synopsis/solicitation (RFQ) for commercial products or services, prepared in accordance with FAR Part 12. The government is procuring an In-vacuum EUV Camera, Chiller, Feedthrough, Software, and an optional Python SDK, along with associated shipping and handling. The acquisition is unrestricted and full and open.

• CLIN 0001: In-vacuum EUV Camera (inclusive of a 1-year warranty)
• CLIN 0002: Chiller
• CLIN 0003: Feedthrough
• CLIN 0004: Software
• CLIN 0005 (Optional): Python SDK (exercisable at award)
• CLIN 0006: Shipping and Handling
• CLIN 0007: Other transportation related charges for US delivery (Not-to-Exceed amount)

Detailed requirements are specified in the attached Statement of Work (SOW).

• Contract Type: Firm-fixed-price purchase order (PO) anticipated.

• Acquisition Procedures: Simplified acquisition procedures per RFO Part 12.

• Submission Deadline: Not later than 3:00 pm Eastern Time (ET) on June 18, 2026.

• Submission Method: Electronic quotations via email to nina.lin@nist.gov and tracy.retterer@nist.gov. Reference RFQ number in the subject line.

• Quotation Validity: 90 days from the due date.

• Evaluation: Best value award. Technical Capability (Factor 1) is more important than Price (Factor 2). Awards may be made without discussions.

• Quotation Preparation: Must be clearly written, indexed (or have a Table of Contents), and logically assembled. Quotations must be divided into three distinct volumes: Technical Capability, Price Quotation, and Terms and Conditions.

• Pre-Quote Inquiries: Submit questions in writing via email no later than 3 calendar days after solicitation issuance.

• NAICS Code: 334516 (Analytical Laboratory Instrument Manufacturing)

• Size Standard: 1,000 employees

• Registration: Active registration in SAM.gov is required at the time of quotation submission, award, performance, and final payment. Failure to maintain active registration will result in quotation rejection.

• Attachments referenced: Statement of Work, Applicable Provisions and Clauses, NIST Requirements document.

• Quoters must demonstrate technical capability with evidence, not just statements of compliance.

• For products manufactured outside the US, clearly identify any other or unknown charges (CLIN 0007) and applicable tariffs.

Forms / Attachments / Pricing Sheets

This document, "Attachment 2 Applicable Provisions and Clauses," lists and incorporates by reference numerous Federal Acquisition Regulation (FAR) and Commerce Acquisition Manual (CAM) provisions and clauses into the solicitation or resulting contract. It also includes some clauses in full text. Bidders must review these provisions and clauses to understand their obligations and requirements.

• Provisions Incorporated by Reference: These are standard clauses that apply to the solicitation. Bidders may need to complete specific blocks within these provisions and submit them with their offer. Full text is available upon request or electronically via provided links.
• Clauses Incorporated by Reference: Similar to provisions, these clauses apply to the contract. Full text is available upon request or electronically.
• Clauses/Provisions Incorporated by Full Text: Includes FAR 52.212-4, "Terms and Conditions—Commercial Products and Commercial Services," which details definitions, inspection/acceptance, changes, disputes, payment terms, termination conditions, and other contractual obligations.
• Specific Provisions/Clauses: Includes clauses related to options (52.217-7), Buy American/Free Trade Agreements (52.225-4), Place of Manufacture (52.225-18), Security Prohibitions (52.240-90), Authorized Deviations (52.252-5, 52.252-6), Agency Protests (1352.233-70), GAO/COFC Protests (1352.233-71), Place of Acceptance (1352.246-70), and NIST-specific instructions for contract performance during changes in operating status (NIST LOCAL-53) and electronic billing (NIST LOCAL-54, NIST LOCAL-56).

This document is critical for bidders as it defines the legal and contractual framework of the opportunity. It outlines mandatory requirements, representations, certifications, and terms and conditions that will govern the contract. Bidders must ensure their offers comply with all incorporated provisions and clauses, paying close attention to those requiring specific action or submission with the proposal, such as representations and certifications. Understanding these clauses is essential for accurate proposal preparation and successful contract performance.