Combined Synopsis/Solicitation - Glow Discharge Mass Spectrometer (GDMS)

Solicitation / RFP / RFQ

This is a combined synopsis/solicitation for commercial products or services, issued as a Request for Quotation (RFQ) using simplified procedures under FAR 13.5. The National Institute of Standards and Technology (NIST) Inorganic Chemical Metrology Group (ICMG) requires a glow discharge mass spectrometry (GDMS) instrument to develop new Standard Reference Materials (SRMs), Reference Materials (RMs), and Research Grade Test Materials (RGTMs) for the chips manufacturing industry. This instrument will support elemental measurements and method development.

• A GD-MS instrument meeting specifications detailed in Attachment 1 (Statement of Work).

• Includes delivery, installation, training, and warranty.

• Optional: Additional Consumables Kit and extended Service/Maintenance for up to 4 option years.

• Offerors must demonstrate proposed product meets or exceeds SOW requirements with specific citations.

• Secure Software Development Attestation Form (Attachment 2) is required.

• Contract type: Firm-fixed-price.

• Period of Performance: Not explicitly stated, but includes option years for service/maintenance.

• Quotations must be submitted electronically via email to nina.lin@nist.gov and forest.crumpler@nist.gov by the due date specified on SAM.gov.

• Questions must be submitted in writing to the same email addresses no later than five (5) calendar days after solicitation issuance.

• Quotations must be divided into four distinct volumes: Technical, Experience, Price, and Terms and Conditions.

• Evaluation will be based on best value, considering Technical, Experience, and Price. Non-price factors are significantly more important than price.

• Technical evaluation will focus on how well the proposed instrument meets SOW requirements, with preference for specific optional specifications.

• Experience evaluation will assess prior relevant contract performance.

• Price evaluation will include a price realism analysis.

• The Government may award without discussions based on initial quotations.

• Solicited as unrestricted; all interested offerors may submit a quotation.

• NAICS Code: 334516 – Analytical Laboratory Instrument Manufacturing, with a small business size standard of 1,000 employees.

• Awardee must be registered in SAM.gov.

• Small businesses must submit a subcontracting plan if applicable.

• The solicitation number is 1333ND26QNB030XXX.

• Provisions and clauses are current through Federal Acquisition Circular (FAC) 2025-06 dated October 1, 2025.

• Key attachments include: Statement of Work (SOW) and Secure Software Development Attestation Form.

Statement of Work (SOW) / Performance Work Statement (PWS)

To develop new NIST capabilities in glow discharge mass spectrometry (GDMS) for the metrology of purity and contaminants in solid materials, crucial for the semiconductor industry. This involves developing new Standard Reference Materials (SRMs), Reference Materials (RMs), and Research Grade Test Materials (RGTMs) to enable accurate characterization of source materials and process improvements.

• Purchase and installation of a new Glow Discharge Mass Spectrometry (GDMS) instrument.

• Development of measurement methods for elemental analysis of high-purity solid materials.

• Creation of new NIST SRMs, RMs, and RGTMs for the semiconductor industry.

• Provision of high-quality purity assays and elemental contaminant quantitation information on solid materials.

• Transfer of measurement results to industry via new NIST SRMs and RMs.

• The GDMS instrument must meet minimum technical specifications for analyzing various solid materials (conductive, semiconductive, nonconductive) in different forms (bulk, powders).

• Specific requirements include detection limits (on the order of 10 ng/g or better), mass range, resolving power, and ability to analyze specific elements (including C, N, O, and Gallium).

• Optional specifications for lower detection limits, depth profiling, and rapid throughput will be considered.

• Period of Performance: 6 months (4 months for delivery, up to 30 days for installation, and up to 30 days for training).

• Place of Performance: NIST Gaithersburg, MD.

• All equipment must be new, commercially available "off the shelf" products.

• Cybersecurity and privacy requirements consistent with federal laws and NIST standards (e.g., FISMA, SP 800-171) must be met.

• Contractor shall provide installation, onsite training for up to 3 users, and a minimum 12-month warranty.

• Delivery terms are FOB Destination.

• Payment is 100% after acceptance of the fully installed system and successful completion of testing.

Form / Attachment / Pricing Sheet

This document provides instructions and the attestation form for software producers to demonstrate compliance with secure software development practices, as mandated by Executive Order 14028 and related OMB memoranda (M-22-18, M-23-16). It ensures that software used by Federal agencies is developed securely.

• Privacy Act Statement: Outlines the authority, purpose, and disclosure of information collected.
• Purpose of Filling Out Form: Explains the legal and executive order mandates driving the need for this attestation.
• Conditions Requiring Attestation: Details when software requires self-attestation (developed after Sept 14, 2022, major version changes after that date, or continuous delivery models).
• Exclusions: Lists software categories not requiring attestation (e.g., developed by Federal agencies, freely obtained open-source software).
• Attestation Requirements (Section III): Specifies minimum secure software development practices related to secure environments, trusted source code supply chains, component provenance, and vulnerability checking.
• Attestation Options: Producers can self-attest or provide a third-party assessment from a certified organization.
• Submission Instructions: Provides guidance on online submission or PDF naming conventions for local submission.

Software producers seeking to provide software to Federal agencies must complete this form to attest to their secure development practices. Failure to provide the requested information may result in the agency not utilizing the software. This form is crucial for understanding the compliance requirements for software supply chain security.