Commercial semi-automatic probe stations

Forms / Attachments / Pricing Sheets

This document contains a compilation of solicitation provisions and contract clauses that are incorporated by reference or provided in full text. It outlines the terms and conditions that will govern any resulting contract.

• Solicitation Provisions Incorporated by Reference (52.252-1): Informs offerors that provisions are incorporated by reference and provides links to access their full text. Offerors may need to complete certain blocks and submit them with their offer.
• Clauses Incorporated by Reference (52.252-2): Similar to provisions, this indicates that contract clauses are incorporated by reference and provides access links.
• List of Incorporated Provisions and Clauses: A comprehensive list of specific FAR clauses and provisions (e.g., 52.203-6, 52.204-7, 52.212-1, 52.219-8, 52.222-35, 52.225-5, 52.232-33) and some NIST local clauses (e.g., 1352.201-72, 1352.233-70, 1352.246-70).
• Full Text Clauses: Includes the full text of FAR 52.212-4 (Terms and Conditions—Commercial Products and Commercial Services) and several other provisions and clauses, detailing terms related to inspection, acceptance, changes, disputes, payment, termination, warranty, and compliance with laws.
• NIST Local Clauses: Specific instructions for NIST, including COR designation, agency protest procedures, GAO/COFC protests, place of acceptance, contract performance during NIST operating status changes, and electronic billing/invoicing instructions (IPP).

Bidders must carefully review all incorporated provisions and clauses, paying close attention to those requiring action or representation in their offer. The full text clauses, particularly FAR 52.212-4 and NIST local clauses, define critical contractual obligations, rights, and procedures, including invoicing and protest handling. Understanding these terms is essential for accurate proposal preparation and contract compliance.

Statement of Work (SOW) / Performance Work Statement (PWS)

NIST intends to procure a 300 mm wafer probing station to facilitate the study of transistor characteristics, leakage currents, and breakdown behavior of silicon carbide (SiC) FET gate dielectrics. This effort aims to deliver verified test methods for wide-bandgap semiconductor power device breakdown and threshold instability.

• Provide a new, semiautomatic wafer probing station capable of probing wafers up to 300 mm in diameter, including both whole wafers and pre-diced dies.

• The station must support four probes for pad sizes as small as 40 µm x 40 µm with a 60 µm pitch, featuring magnetic bases and low-noise, blade-style probe tips.

• Include a heated wafer chuck capable of reaching at least 200 degrees Celsius.

• Equip with a digital microscope capable of imaging 5 µm features.

• Provide user-friendly software for probing and microscope control.

• Include vibration isolation.

• The system must meet all technical specifications outlined in the SOW.

• Acceptance will be based on performance tests (whole-wafer probing, semiautomatic features demonstration) and visual inspection.

• NIST reserves the right to conduct quality assurance testing.

• Period of Performance: Seven months from the date of award.

• Place of Performance: Manufacturing at the contractor's site. Final assembly, setup, training, and support at NIST (Gaithersburg, MD).

• Delivery: To NIST (Gaithersburg, MD) no later than 12 weeks after receipt of order.

• All equipment must be new; used, remanufactured, experimental, prototype, or custom items are not acceptable.

• "Gray market" components are not acceptable.

• Items must be shipped in original manufacturer's packaging with all documentation and software.

• Installation by the Contractor within two weeks of delivery.

• Training for up to 3 users at NIST, covering system functions, maintenance, data administration, and troubleshooting.

• Cybersecurity and privacy requirements consistent with federal laws and NIST standards (e.g., FISMA, OMB Circular A-130, SP 800-171) must be met.

• Contractor personnel must comply with NIST safety and security regulations, including obtaining identification badges and registering vehicles.

• Warranty: Minimum of one year after receipt of equipment.

• Payment Schedule: 50% upon delivery, 50% upon acceptance and completion of training.

Solicitation / RFP / RFQ

This is a combined synopsis/solicitation (RFQ) for commercial products or services, prepared in accordance with FAR Part 12. The government is procuring Commercial Semi-Automatic Probe Stations.

• The primary deliverable is Commercial Semi-Automatic Probe Stations, as detailed in Attachment 1 (Statement of Work).

• Requirements include meeting or exceeding minimum specifications outlined in the SOW.

• Offerors must demonstrate technical capability and provide evidence of manufacturer authorization if applicable.

• This is a Request for Quotation (RFQ).

• The acquisition is a small business set-aside.

• A single firm-fixed-price purchase order (PO) is anticipated.

• Submission Deadline: February 13, 2026, by 5:00 PM Eastern Time.

• Submission Method: Electronic quotations via email to cielo.ibarra@nist.gov and donald.collie@nist.gov. Reference the RFQ number in the subject line.

• Inquiries Deadline: Questions must be submitted in writing by February 7, 2026 (2 days after issuance).

• Quotation Structure: Must be divided into three volumes: Volume I (Technical), Volume II (Price), and Volume III (Terms and Conditions).

• Evaluation Criteria: Award will be made to the lowest priced, technically acceptable offeror. Technical capability will be evaluated based on submitted documentation demonstrating compliance with SOW requirements. Price reasonableness will also be assessed.

• This acquisition is solicited as a small business set-aside.

• NAICS Code: 334516 - Analytical Laboratory Instrument Manufacturing, with a size standard of 1,000 employees.

• The solicitation number is 1333ND26QNB030047.

• Applicable provisions and clauses are those in effect through the RFO.

• Offerors must identify any exceptions to the terms and conditions in their quotation.

• Price quotations must remain valid for 90 days.

• Attachments referenced: Attachment 1 (Statement of Work), Attachment 2 (Applicable Provisions and Clauses).