Dry Pumps, Kashiyama Model MU100GP, Ebara Model ESR20N, or equivalent

Statement of Work (SOW) / Performance Work Statement (PWS)

To procure two (2) semiconductor-grade dry process pumps for use on flow systems within the National Institute of Standards & Technology (NIST) Material Measurement Laboratory (MML), Chemical Sciences Division (CSD). These pumps are critical for a CHIPS R&D Metrology program focused on developing digital twin technology for semiconductor manufacturing equipment, specifically for thin film growth characterization using organometallic and metal halide precursors and process gases.

• Deliver two (2) pumps, specified as Kashiyama Model MU100GP, Ebara Model ESR20N, or equivalent (Dry Roughing Pump).

• Pumps must be new, not used or remanufactured.

• Must be compatible with organometallic and metal halide precursors and process gases.

• Includes warranty and FOB Destination delivery terms (or equivalent INCOTERM such as DDP).

• Pump Type: Multi-stage roots dry pump.

• Process Type: Medium duty corrosive semiconductor service.

• Ultimate Pressure: 9.75 mTorr or lower (without purge).

• Pumping Speed: Minimum 30 CFM (51 m3/min).

• Cooling: Water cooling required (1-3 gal/min flow rate, 10-25°C supply temp).

• Purging: Inert gas purging capability (0-10 SLM N2) with built-in regulation.

• Connections: Inlet NW40 or NW50, Outlet NW40.

• Electrical: 220 VAC 50-60 Hz, <1.0 kW power consumption at ultimate pressure.

• Chemical Compatibility: Rated for pumping reactive and corrosive vapors including organometallics, metal chlorides, metal oxychlorides, H2O, <3% H2/Ar, HCl, and amines. Corrosion-resistant internal construction (Ni alloys or Ni coatings).

• User Interface: Hand-held or built-in control panel/display with local control and remote analog/digital interface for control, status, and alarms. Compliant with CE/SEMI/NRTL.

• Quantity: Two (2) pumps.

• Lead Time: No later than sixteen (16) weeks after receipt of order (ARO).

• Delivery Terms: FOB Destination (or DDP) to NIST Gaithersburg, MD.

• NIST reserves the right to perform performance tests (pump operation under inert gas, ultimate pressure measurement) and visual inspection.

• NIST will test, inspect, and accept or reject within 15 working days of receipt.

• Government has sole discretion for repair/replacement of damaged/nonconforming supplies.

• Minimum of one year after acceptance of the equipment.

• Payment upon receipt of a proper invoice, in accordance with contract terms.

• Partial shipments/invoices not accepted unless approved prior to award.

• Proposed payment schedules must be submitted with vendor response.

Solicitation / RFP / RFQ

This document incorporates by reference various Federal Acquisition Regulation (FAR) and Commerce Acquisition Regulation (CAR) provisions and clauses. It also provides full text for specific provisions and clauses, including those related to Buy American, authorized deviations, inquiries, agency protests, GAO/Court of Federal Claims protests, place of acceptance, contract performance during NIST operating status changes, and billing instructions.

• FAR 52.252-1 & 52.252-2: Solicitation provisions and clauses are incorporated by reference. Full text is available upon request or electronically via provided links.

• FAR 52.225-2 (Buy American Certificate): Offerors must certify that end products are domestic or list foreign end products, specifying country of origin and domestic content percentage if applicable. Critical components must also be identified.

• CAR 1352.215-72 (Inquiries): All questions must be submitted in writing to the Contract Specialist (Ranae Armstrong) and cc'd to the Contracting Officer (Don Collie) no later than two calendar days after solicitation issuance. Responses will be provided in writing via amendment.

• CAR 1352.233-70 & 1352.233-71 (Protests): Outlines procedures for filing agency protests with the Contracting Officer or Protest Decision Authority, and protests with GAO or the Court of Federal Claims. Service requirements for protest copies are detailed.

• CAR 1352.246-70 (Place of Acceptance): Supplies and services will be accepted by the Contracting Officer or representative at the National Institute of Standards and Technology, 100 Bureau Drive, Gaithersburg, MD 20899.

• NIST LOCAL 53 (Contract Performance During Changes in NIST Operating Status): Contractors must check the NIST website daily for campus operating status and adhere to requirements. Procedures for work stoppage during appropriation lapses and notification methods are provided.

• Billing Instructions: Invoices/Vouchers must be sent electronically to INVOICE@NIST.GOV, including specific contract and invoice details. Payment requests must be submitted through the U.S. Department of the Treasury's Invoice Processing Platform (IPP) upon written notice, with specific attachment requirements.

• Inquiries must be submitted within two calendar days of issuance.

• Protest procedures are detailed for agency, GAO, and Court of Federal Claims protests.

• Billing and payment submission instructions are provided, including the mandatory use of IPP upon notice.

• Provisions like FAR 52.204-5 (Women-Owned Business) and FAR 52.219-28 (Post-award Small Business Program Representation) suggest potential eligibility considerations.

• Numerous provisions and clauses incorporate deviations dated JAN 2026.

• Offerors are cautioned that provisions may require completion and submission with their offer.

Solicitation / RFP / RFQ

This is a combined synopsis/solicitation (RFQ) for commercial products or services, prepared in accordance with FAR Part 12. The government is procuring Dry Roughing Pumps.

• Item: Kashiyama MU100GP, Ebara ESR20N, or equivalent (Dry Roughing Pump)

• Quantity: 2

• Detailed requirements are specified in the attached Statement of Work (SOW).

• Delivery, acceptance, and FOB point details are in the SOW.

• Contract Type: Firm-fixed-price purchase order (PO).

• Competition: Full and open competition.

• Submission Method: Electronic quotations via email to ranae.armstrong@nist.gov with a copy to Donald.collie@nist.gov.

• RFQ Number: 1333ND26QNB030119 (reference in subject line).

• Due Date for Quotations: March 25, 2026, by 4:00 PM Eastern Time.

• Inquiries Deadline: March 23, 2026 (submit in writing to Contract Specialist and Contracting Officer).

• Quotation Structure: Must be divided into three volumes:

  • Volume I: Technical Quotation (including technical description, product literature, manufacturer, country of origin, authorization, delivery, installation, training, and warranty confirmation).
  • Volume II: Price Quotation (including solicitation number, POC info, UEI, firm fixed price per line item, total price including shipping/delivery, and discount terms).
  • Volume III: Terms and Conditions (complete required information as per attachment).

• Evaluation Criteria: Award will be made to the responsible quoter whose quotation is the lowest priced and technically acceptable.

  • Technical Capability: Must meet or exceed all minimum requirements as documented in the quotation. No prototypes, used, or refurbished instruments will be considered.
  • Price: Must be reasonable and compatible with the technical portion.

• Award Basis: Lowest priced, technically acceptable quote.

• NAICS Code: 333242 (Semiconductor Machinery Manufacturing) with a small business size standard of 1,500 employees.

• SAM.gov Registration: Quoters must have an ACTIVE registration in SAM.gov at the time of quotation submission, award, performance, and final payment. Failure to maintain active registration will result in disqualification.

• The solicitation provisions and clauses are those in effect through RFO, supplemented by U.S. Department of Commerce Acquisition Policy.

• The government may award without clarifications based solely on initial quotes.

• If objecting to terms and conditions, state exceptions and rationale in the quotation.