Fabry Perot Open Resonators (FPOR) and Microwave Components

Statement of Work (SOW) / Performance Work Statement (PWS)

The objective of this requirement is to enable traceable complex permittivity measurements up to 330 GHz and provide known permittivity measurements for on-wafer traceability for S-parameters, Power, and Phase, supporting the NIST CHIPS program.

The contractor shall provide the following new equipment, including a 1-year warranty:

• D-band Waveguide Fabry Perot Resonator (110 GHz - 170 GHz): Includes resonator, tables, clamps, and software.
• G-band Waveguide Fabry Perot Resonator (140 GHz - 220 GHz): Includes resonator, tables, clamps, and software.
• J-band Waveguide Fabry Perot Resonator (220 GHz - 330 GHz): Includes resonator, tables, clamps, and software.
• Coaxial Fabry Perot Resonators (10 GHz - 130 GHz): Includes specifications for coaxial ports, dielectric constant, sample thickness, and diameter, plus software.
• Two Channel Precision SMU: With 10 fA resolution, 210 V, 3A DC, and 10.5A Pulse capabilities.
• Single Channel Precision SMU (2 units): With 1 pA resolution, 21 V, and 1.5 A capabilities.

All items must be new, in original manufacturer's packaging with documentation. Experimental, prototype, custom, or "gray market" items are not acceptable.

Deliverables are subject to acceptance by the NIST Technical Point of Contact (TPOC) and Contracting Officer’s Representative (COR) within 30 days of receipt. NIST may perform performance tests, including measuring fused silica coupons, and reserves the right to require repair or replacement of damaged or non-conforming supplies at no cost to the Government. Ownership transfers upon acceptance.

All deliverables are due 16 weeks after receipt of order (ARO) and are to be delivered to NIST Boulder, Colorado.

• Warranty: Minimum 1-year full warranty after acceptance, including return to manufacturer.
• Delivery Terms: F.O.B Destination to NIST Boulder, Colorado.
• Payment: 100% upon installation, acceptance, and successful completion of testing requirements.
• Cybersecurity: Solution must meet federal requirements (FISMA, OMB Circular A-130, FIPS Publication 200), including specific controls for system security plans, IT management, access controls for sensitive personally identifiable information (SPII), vulnerability scanning, auditing, incident response, and encryption (TLS 1.2+, FIPS 140-2/140-3 validated).

Statement of Work (SOW) / Performance Work Statement (PWS)

To procure specialized microwave components and measurement equipment for the National Institute of Standards and Technology (NIST) Guided Wave Electromagnetics Group. The goal is to enable traceable complex permittivity measurements up to 330 GHz and support the NIST CHIPS program by developing and disseminating best practices for complex permittivity and on-wafer measurements.

The contractor shall provide the following new equipment, including a 1-year warranty:

• D-band Waveguide Fabry Perot Resonator (110 GHz - 170 GHz): Includes resonator, tables, clamps, and software for D, J, and G-bands.
• G-band Waveguide Fabry Perot Resonator (140 GHz - 220 GHz): Includes resonator, tables, clamps, and software.
• J-band Waveguide Fabry Perot Resonator (220 GHz - 330 GHz): Includes resonator, tables, clamps, and software.
• Coaxial Fabry Perot Resonators (10 GHz - 130 GHz): With specified coaxial port, dielectric constant, loss tangent, sample thickness, and sample diameter ranges, plus software.
• Two-Channel Precision SMU: With 10 fA resolution, 210 V, 3A DC, and 10.5A Pulse capabilities.
• Single-Channel Precision SMU (Quantity 2): With 1 pA resolution, 21 V, and 1.5 A capabilities.

All items must be new, in original manufacturer packaging with documentation. Experimental or prototype items are not acceptable.

• Deliverables are due 16 weeks after receipt of order (ARO).

• Acceptance will be based on review by the NIST Technical Point of Contact (TPOC) and Contracting Officer’s Representative (COR) within 30 days of receipt. NIST may perform performance tests (e.g., measuring fused silica coupons) and visual inspections.

• The entire system must be warranted for a minimum of 1 year after acceptance.

• Delivery is required 16 weeks ARO to NIST Boulder, Colorado.

• Warranty period is a minimum of 1 year post-acceptance.

• Cybersecurity: The solution must comply with federal laws and NIST standards (FISMA, OMB A-130, FIPS 200, SP 800-171). This includes a system security plan, secure IT management, restricted access to sensitive personally identifiable information (SPII) with background checks and training, robust access controls (including MFA), continuous vulnerability scanning, auditing, incident response, and encryption of SPII (in transit and at rest) using FIPS 140-2/140-3 validated algorithms.

• Delivery Terms: FOB Destination.

• Payment: 100% upon successful installation, acceptance, and demonstration of performance according to requirements.

Questions & Answers / Clarifications

This document provides answers to vendor questions regarding Solicitation# 1333ND26QNB030032, Amendment #02.

• Simultaneous Use of Resonators: Yes, the D-band, J-band, and G-band resonators will be used simultaneously in an automated setup controlled by a single robotic arm. These should accommodate 35 x 45 mm coupons. The broadband coaxial FPOR will use a different setup and software, accommodating 90 x 90 mm coupons.
• Software Licenses: A single software license is sufficient for the D-band, J-band, and G-band FPORs (CLINs 0001-0003). The coaxial FPOR (CLIN 0004) requires a separate license.
• Line Item 0004 Description: The RFQ description for the coaxial FPOR (Line Item 0004) contains a typo. It should read "10 GHz - 130 GHz" not "D-band (20 GHz - 130 GHz)". The waveguide FPORs provide coverage from 110 GHz to 325 GHz. A revised SOW incorporates this correction and additional specifications (c-g) for Line Item 0004.
• Coaxial Port Size: 1mm (f) ports are expected for the coaxial FPOR. The FPOR should be in an enclosure with coaxial ports mounted on the top and bottom. This detail has been added to the revised SOW.
• Warranty vs. Calibration: NIST requires only a minimum 1-year warranty and does not require a calibration services agreement to be included in the quotation.

This Q&A document clarifies technical specifications and software licensing requirements for CLINs 0001-0004. A revised SOW has been issued to incorporate corrections and additional details for Line Item 0004.

Statement of Work (SOW) / Performance Work Statement (PWS)

The National Institute of Standards and Technology (NIST) requires specialized equipment to enable traceable complex permittivity measurements up to 330 GHz and to provide known permittivity measurements for on-wafer traceability for S-parameters, Power, and Phase. This effort supports the NIST CHIPS program.

The contractor shall provide the following new equipment, including a 1-year warranty:

• Line Item 0001: D-band Waveguide Fabry Perot Resonator (110 GHz - 170 GHz) - Quantity: 1
• Line Item 0002: G-band Waveguide Fabry Perot Resonator (140 GHz - 220 GHz) - Quantity: 1
• Line Item 0003: J-band Waveguide Fabry Perot Resonator (220 GHz - 330 GHz) - Quantity: 1
• Line Item 0004: Coaxial Fabry Perot Resonators (10 GHz - 130 GHz) - Quantity: 1
• Line Item 0005: Two channel precision SMU (10 fA resolution, 210 V, 3A DC, 10.5A Pulse) - Quantity: 2
• Line Item 0006: Single channel precision SMU (1 pA resolution, 21 V, 1.5 A) - Quantity: 3

All equipment must be new, in original manufacturer's packaging, and include all original documentation and software. Experimental, prototype, custom, or "gray market" items are not acceptable.

• Deliverables are due 16 weeks after receipt of order (ARO).

• Acceptance requires review by the NIST Technical Point of Contact (TPOC) and Contracting Officer’s Representative (COR) within 30 days of receipt.

• NIST may perform performance tests, including measuring fused silica coupons for Fabry Perot resonators.

• Visual inspection for damage during transport will be conducted.

• The contractor is responsible for latent defects.

• Full payment (100%) is contingent upon successful installation, acceptance, completion of testing, and demonstration of performance according to requirements.

• Delivery is F.O.B. Destination to NIST Boulder, Colorado 80305.

• The warranty period is a minimum of 1 year after acceptance.

• Cybersecurity: The solution must comply with federal laws and standards (FISMA, OMB Circular A-130, FIPS Publication 200). This includes a system security plan, IT management processes, restricted access to sensitive personally identifiable information (SPII), multifactor authentication, vulnerability scanning, auditing, incident response, and encryption (TLS 1.2+ in transit, FIPS 140-2/140-3 validated at rest).

• Warranty: A minimum of 1-year full warranty, including return to manufacturer, is required after acceptance.

Questions & Answers / Clarifications

This document provides answers to vendor questions regarding Solicitation# 1333ND26QNB030032 for open resonators.

• Simultaneous Use: The open resonators will be used simultaneously in an automated setup.
• Software Licensing: A single software license is sufficient to operate all of the Frequency-Phase Offset Resonators (FPORs).
• Line Item 0004 (D-band): The description for Line Item 0004 has been corrected. It should read "10 GHz to 130 GHz" for the coaxial FPORs, not "D-band (20 GHz - 130 GHz)". The waveguide FPORs provide continuous coverage from 110 GHz to 325 GHz.
• Line Item 0004 (Ports): 1mm (f) coaxial ports are expected and sufficient for Line Item 0004.
• Warranty vs. Calibration: NIST requires only warranty services (minimum 1 year) and not a separate calibration services agreement.

This Q&A document clarifies technical specifications and requirements for the open resonators. A revised SOW incorporating corrections for Line Item 0004 has been issued.

Statement of Work (SOW) / Performance Work Statement (PWS)

To procure specialized microwave components and measurement equipment to enable traceable complex permittivity measurements up to 330 GHz, supporting the NIST CHIPS program's development of best practices and algorithms for on-wafer traceability.

This SOW requires the delivery of new, non-experimental equipment, including:

• D-band Waveguide Fabry Perot Resonator (110 GHz - 170 GHz)

• G-band Waveguide Fabry Perot Resonator (140 GHz - 220 GHz)

• J-band Waveguide Fabry Perot Resonator (220 GHz - 330 GHz)

• Coaxial Fabry Perot Resonator (20 GHz - 130 GHz)

• Two (2) Two-channel precision SMUs (10 fA resolution, 210 V, 3A DC, 10.5A Pulse)

• Three (3) Single-channel precision SMUs (1 pA resolution, 21 V, 1.5 A) All equipment must include a 1-year warranty and be shipped in original manufacturer packaging with all documentation and software.

• All equipment must meet specified technical specifications for each line item.

• Acceptance will be based on review by the NIST Technical Point of Contact (TPOC) and Contracting Officer’s Representative (COR) within 30 days of receipt.

• NIST may perform performance tests, including measuring fused silica coupons for Fabry Perot resonators.

• Visual inspection for damage during transport.

• Equipment must meet manufacturer's and/or Government's performance specifications.

• Deliverables are due 16 weeks after receipt of order (ARO).

• Delivery location: NIST Boulder, Shipping and Receiving, 325 Broadway Boulder, Colorado 80305, ATTN: Nathan Orloff.

• All items must be new; used, remanufactured, experimental, prototype, custom, or "gray market" items are not acceptable.

• Cybersecurity and privacy requirements consistent with federal laws and NIST SP 800-171 must be met, including system security plans, secure configuration management, access controls, vulnerability scanning, auditing, incident response, and encryption (TLS 1.2+, FIPS 140-2/140-3 validated).

• Warranty: Minimum of 1 year after acceptance, including first year full warranty and return to manufacturer.

• Payment: 100% after installation, acceptance, and successful completion of testing requirements.

Form / Attachment / Pricing Sheet

This document lists solicitation provisions and contract clauses that are incorporated by reference or in full text. It outlines the terms and conditions that will govern the contract, including instructions for offerors and clauses related to payment, disputes, and compliance.

• Solicitation Provisions Incorporated by Reference (52.212-1): Directs offerors to specific provisions that must be reviewed and potentially completed. Full text is available upon request or electronically.
• Clauses Incorporated by Reference (52.252-2): Lists numerous FAR and CAR clauses that are part of the contract. Full text is available upon request or electronically.
• Clauses/Provisions Incorporated by Full Text: Includes FAR 52.212-4 (Terms and Conditions—Commercial Products and Commercial Services) in its entirety, detailing definitions, inspection, acceptance, changes, disputes, payment, termination, and other contractual terms.
• Specific Provisions: Includes FAR 52.225-2 (Buy American Certificate), FAR 52.225-18 (Place of Manufacture), and FAR 52.240-90 (Security Prohibitions and Exclusions Representations and Certifications), requiring specific representations and certifications from offerors.
• Local Clauses: Includes NIST-specific clauses regarding COR designation, agency protests, GAO/COFC protests, place of acceptance, performance during NIST operating status changes, and electronic billing instructions.

Bidders must carefully review all listed provisions and clauses, especially those incorporated by reference and in full text. This document dictates the legal and contractual framework of the potential award. Key areas for bidder attention include submission requirements, compliance obligations (e.g., Buy American, security prohibitions), dispute resolution, payment terms, and termination conditions. Offerors must ensure their proposals address all applicable requirements and that they can comply with the stated terms and conditions. The inclusion of deviations (indicated by "DEVIATION") signifies that standard FAR text may have been modified.

Solicitation / RFP / RFQ

This is a combined synopsis/solicitation for commercial products or services, issued as a Request for Quotation (RFQ) under the Revolutionary FAR Overhaul (RFO) Part 12. The acquisition is a 100% small business set-aside, with an approved SBA waiver for the Nonmanufacturer Rule (NMR).

The government is procuring the following items, as detailed in the Statement of Work (SOW):

• D-band Waveguide Fabry Perot Resonator (1 Each)

• G-band Waveguide Fabry Perot Resonator (1 Each)

• J-band Waveguide Fabry Perot Resonator (1 Each)

• Coaxial Fabry Perot Resonators (1 Each)

• Two channel precision SMU (2 Each)

• Single channel precision SMU (3 Each)

• Transportation and related expenses for shipment to the USA (1 Each)

• Contract Type: Firm-fixed-price purchase order (PO).

• Acquisition Procedures: Simplified acquisition procedures under RFO Part 12.

• Submission Deadline: March 25, 2026, by 10:00 am Eastern Time (ET).

• Submission Method: Electronic quotations via email to nina.lin@nist.gov and donald.collie@nist.gov. Reference the RFQ number in the subject line.

• Quotation Validity: 90 days from the due date.

• Inquiries: Submit questions in writing via email no later than 2 calendar days after solicitation issuance.

• Quotation Preparation: Must be clearly written, indexed (or have a Table of Contents), and logically assembled. Quotations must be divided into three distinct volumes:

  • Volume I – Technical Quotation (demonstrate proposed items meet or exceed SOW requirements with citations; include manufacturer authorization if applicable).
  • Volume II – Price Quotation (firm-fixed-price for each CLIN, including shipping and tariffs).
  • Volume III – Terms and Conditions (complete required information from Attachment 2).

• Evaluation Criteria: Award will be made to the responsible quoter who meets all technical specifications and proposes the lowest price (lowest priced, technically acceptable).

• Award: The government may award without discussions based solely on initial quotes and reserves the right not to award a PO.

• Set-Aside: 100% Small Business Set-Aside.

• Registration: ACTIVE registration in the System for Award Management (SAM.gov) is required at the time of quotation submission, through award, performance, and final payment. Failure to maintain active registration will result in quotation rejection.

• NAICS Code: 334413, Semiconductor and Related Device Manufacturing, with a size standard of 1,250 employees.

• Attachments: Statement of Work (FPOR), Applicable Provisions and Clauses.

• FAR Provisions: FAR 52.212-1 (DEVIATION Jan 2026) applies, with addenda provided in the solicitation.