Focused Ion Beam Scanning Electron Microscope (FIB-SEM) Instrument

Solicitation / RFP / RFQ

This is a combined synopsis/solicitation (Request for Quotation - RFQ) for commercial products or services, prepared in accordance with FAR Part 12. The acquisition is unrestricted. The solicitation number is 1333ND26QNB030053.

The government is procuring a FIB/SEM system, including delivery, installation, and training, as detailed in the Statement of Work (SOW). Specific requirements include:

• CLIN 0001: FIB/SEM system (inclusive of delivery, installation, training)
• CLIN 0002: 5-year warranty for the system
• CLIN 0003: Transportation and other related charges (Not to Exceed amount)

Detailed technical requirements and specifications are provided in Attachment #1 (Statement of Work).

• Contract Type: Firm-fixed-price quotation is requested.

• Evaluation: Award will be made on a best-value basis, considering price and other factors, with non-priced factors being significantly more important than price.

• Submission Deadline: Quotations must be received by 4:30 pm ET on February 23, 2026.

• Submission Method: Electronic quotations via email to nina.lin@nist.gov and forest.crumpler@nist.gov. Reference the RFQ number in the subject line.

• Inquiries: Written questions must be submitted via email to the Contract Specialist and Contracting Officer no later than 4 calendar days after the solicitation issuance date.

• Quotation Preparation: Quotations must be clearly written, indexed (or have a Table of Contents), and logically assembled. They must be divided into four volumes:

  • Volume I: Technical Quotation (demonstrating proposed system meets or exceeds SOW requirements with citations)
  • Volume II: Experience Quotation (up to three relevant contracts/projects)
  • Volume III: Price Quotation (firm-fixed-price for each CLIN, including shipping; prices valid for 90 days)
  • Volume IV: Terms and Conditions (including Small Business Subcontracting Plan if applicable)

• Evaluation Factors:

  1. Technical Capability (most important)
  2. Experience
  3. Price

• This acquisition is solicited as unrestricted.

• SAM.gov Registration: Quoters must have an ACTIVE registration in SAM.gov at the time of quotation submission, award, performance, and final payment.

• Provisions and clauses are effective through FAC 2025-06 (October 1, 2025) and supplemented by Commerce Acquisition Policy.

• NAICS Code: 334516 (Analytical Laboratory Instrument Manufacturing) with a size standard of 1,000 employees.

• Attachments include: Statement of Work (FIB/SEM) and Applicable Provisions and Clauses.

Statement of Work (SOW) / Performance Work Statement (PWS)

To procure an advanced Focused Ion Beam (FIB) and Scanning Electron Microscope (SEM) instrument system for the CHIPS Metrology program at NIST. The goal is to develop and advance metrology capabilities for the US semiconductor manufacturing ecosystem, addressing critical metrology gaps.

The vendor must deliver one analytical FIB/SEM instrument system, including installation, training, warranty, and service. The instrument must support traditional workflows (sample preparation for TEM, APT) and extended workflows using non-traditional stages and detectors for advanced semiconductor metrology.

FIB/SEM System:

• Ion Column: Spatial resolution < 5 nm at 30 kV, 500 V - 30 kV accelerating voltage, 1 pA - 60 nA probe current at 30 kV, >1000 hours source lifetime, >6 megapixel images.

• Electron Column: Spatial resolution < 0.6 nm at eucentric distance, < 0.4 nm in STEM, < 1.0 nm in beam deceleration mode (1 kV). Immersion and field-free modes required. 1 pA - 50 nA probe current, 500 V - 30 kV accelerating voltage, >6 megapixel images, >5 MHz beam blanking.

• Detectors: In-chamber electron/ion detectors, multiple in-lens electron detectors, insertable segmented back-scatter and STEM detectors (min. 4 segments), pixelated STEM detector (min. 256x256, event mode), SDD-based EDS (min. 100 mm², spectral resolution ≤ 129 eV at Mn Kα) with scan control and drift correction.

• Stage: Double-tilt STEM holder (compatible with detectors and EBSD/TKD), ±5° tilt, compusentric rotation, motorized axes (75 mm X/Y, 20 mm Z, -10° to 60° tilt).

• Automation: Fully automatic TEM sample preparation (top-down and inverted), unattended operation for ≥16 sites, customizable recipes, automatic FIB/SEM column alignments, manipulator needle conditioning.

• Software: Windows GUI, non-proprietary output formats, scripting control (Python preferred), high-level automation environment, large area mapping (up to 1 gigapixel), serial sectioning for volumetric rendering.

• Ancillary: Gas injection (W, C, SiO2 required; Pt optional), in-situ lift-out manipulator, automated sample load-lock (<3 min sample exchange), in-situ navigation system, chamber camera, charge neutralizer (optional).

• Period of Performance: 5 years, 11 months.

• Place of Performance: NIST, Gaithersburg, MD facility for installation and training. Manufacturing at contractor's facility.

• FIB/SEM Instrument: 32 weeks after award.

• Installation: Within 12 weeks of delivery.

• Training: Within 52 weeks of acceptance.

• Warranty: 60 months from acceptance.

• Site Survey: Required prior to installation.

• Training: Minimum 3 days onsite, 6 days remote.

• Warranty: Minimum 5 years.

• Delivery Terms: FOB Destination.

• Acceptance: Includes performance tests for resolution, alignments, and automated lamella preparation (9/10 success rate for top-down and inverted).

• Payment: 100% after acceptance, successful testing, and demonstration of performance.

Form / Attachment / Pricing Sheet

This document, "Attachment 2 - Applicable Provisions and Clauses," lists solicitation provisions and contract clauses that are incorporated by reference or in full text. It serves to inform potential bidders of the legal and regulatory requirements that will govern the solicitation and any resulting contract.

• Solicitation Provisions Incorporated by Reference (52.252-1): Details that certain provisions are included by reference and their full text is available upon request or electronically via provided links (acquisition.gov/far-overhaul and ecfr.gov).
• Clauses Incorporated by Reference (52.252-2): Similar to provisions, this section indicates that contract clauses are incorporated by reference, with full text available upon request or electronically.
• List of Incorporated Provisions and Clauses: A comprehensive list of FAR (Federal Acquisition Regulation) and agency-specific clauses and provisions that apply to this solicitation. This includes clauses related to:
  • Gratuities and restrictions on subcontractor sales
  • Whistleblower rights
  • Payments to influence federal transactions
  • System for Award Management (SAM)
  • Reporting executive compensation
  • Representations and certifications
  • Government supply sources
  • Prohibition on contracting with inverted domestic corporations
  • Responsibility matters
  • Small business concerns and subcontracting plans
  • Convict labor, child labor, equal opportunity, and combating trafficking in persons
  • Trade Agreements
  • Drug-Free Workplace
  • Payment by Electronic Funds Transfer
  • Unenforceability of Unauthorized Obligations
  • Protest procedures (after award and agency protests)
  • Protection of Government Buildings
  • Contracting Officer Authority
  • Organizational Conflict of Interest
  • Place of Manufacture
  • Security Prohibitions and Exclusions (related to telecommunications, Sudan, and Iran)
• Clauses Incorporated by Full Text: FAR 52.212-4, "Terms and Conditions—Commercial Products and Commercial Services," is included in full text, detailing definitions, inspection/acceptance, assignment, changes, disputes, excusable delays, invoicing, patent indemnity, payment terms, risk of loss, taxes, termination (convenience and cause), title, warranty, limitation of liability, compliance with unique government contract laws, order of precedence, unauthorized obligations, Comptroller General examination of records, and incorporation by reference of representations and certifications.
• Specific Provisions: Includes "Trade Agreements Certificate" (52.225-6), "Place of Manufacture" (52.225-18), and "Security Prohibitions and Exclusions Representations and Certifications" (52.240-90), requiring specific bidder input or certifications.
• Agency-Specific Clauses: Includes NIST LOCAL clauses related to COR designation, contract performance during changes in NIST operating status, and electronic billing/invoicing instructions.

Bidders must carefully review all listed provisions and clauses to understand their obligations and requirements. Key areas to note include:

• Representations and Certifications: Many clauses require specific representations and certifications, some of which may need to be completed in SAM or submitted with the offer (e.g., 52.209-11, 52.225-6, 52.225-18, 52.240-90).
• Compliance: Bidders must ensure their proposed products and services comply with all applicable laws, regulations, and prohibitions, particularly those related to trade agreements, security, and ethical business practices.
• Contract Administration: Understanding clauses related to payment, disputes, termination, and the role of the Contracting Officer's Representative (COR) is crucial for contract performance.
• Submission Requirements: Specific instructions for invoicing and payment processing (NIST LOCAL-53, NIST LOCAL-54, NIST LOCAL-56) must be followed.
• Protest Procedures: Information on how to file agency protests (1352.233-70) and GAO/Court of Federal Claims protests (1352.233-71) is provided.