HA-800 Vacuum
Overview
Buyer
Place of Performance
NAICS
PSC
Set Aside
Original Source
Timeline
Qualification Details
Fit reasons
- NAICS alignment with historical contract wins in similar service areas.
- Scope strongly matches core technical capabilities and delivery model.
Risks
- Past performance thresholds may require one additional teaming partner.
- Potential clarification needed on staffing minimums before bid/no-bid.
Next steps
Validate eligibility requirements, assign capture owner, and schedule partner outreach to confirm teaming strategy before submission planning.
Quick Summary
The Argonne National Laboratory (ANL), a Department of Energy (DOE) contractor, has issued a Request for Quotation (RFQ) for an HA-800 Vacuum system and associated components. This solicitation seeks to procure a custom vacuum system, including optical inspection options, mini load port, plumbing package, wafer cassette, and adapter plate, along with non-recurring engineering (NRE) services. Quotations are due by April 17, 2026, at 5:00 PM CT.
Scope of Work
The primary requirement is for an HA-800 Vacuum TM with a custom transfer height of 1575mm. Additional components include:
- HA OPTION, Optical Inspection (Chamber, Viewing Port, Stand Offs for 100mm Wafers)
- MLP-200, Mini Load Port
- HA OPTION, Plmb Package (Independent pumping option for CLP-200 or MLP-200)
- MLP OPTION, 4 Wafer Cassette
- HA OPTION, Adapter Plate
- Non-recurring Engineering (NRE) for Adapter Plate and transfer height change.
Contract Details
- Type: Request for Quotation (RFQ) leading to a Purchase Order.
- Set-Aside: None specified.
- Governing Terms: Argonne Terms and Conditions for Commercial Items (ANL-71COM, dated October 22, 2025).
- Delivery Deadline: Order must deliver no later than September 15, 2026.
- Place of Performance: Lemont, IL, United States.
Submission & Evaluation
Offerors must submit quotations to jmangis@anl.gov by the deadline. Required submission items include:
- Signed Page one of the RFQ (ANL-70).
- Completed Representations and Certifications (ANL-70A, dated January 13, 2025).
- A published price list or redacted invoice to prove price reasonableness.
- Verification of country of origin.
- Confirmation of lead time, ensuring delivery by September 15, 2026.
- Confirmation of acceptance of Pre-Pay and Add Shipping Charges (FOB Destination).
- Any tariff charges must be included in the unit price.
- Indication of available discounts for DOE or GSA contract pricing (if applicable, include contract # and expiration date).
- The resulting Purchase Order will be exempt from Illinois Occupation and Use Taxes and from Manufacturers and Retailers Excise Taxes.
Applicable Documentation
Bidders must review and accept the Argonne Terms and Conditions for Commercial Items (ANL-71COM) and complete the Pre-Award Information, Representations and Certifications (ANL-70A). The ANL-70A document requires detailed company information, NAICS code, and certifications related to various FAR clauses, including those for covered telecommunications equipment, suspect/counterfeit parts, and the Buy American Act.
Contact Information
For inquiries, contact Jazlyn Mangis at (630) 252-6884 or jmangis@anl.gov.