High-Vacuum Compatible Sample Positioning Stages

Solicitation / RFP / RFQ

This is a combined synopsis/solicitation for commercial products or services, issued as a Request for Quotation (RFQ) under Revolutionary FAR Overhaul (RFO) Part 12. The acquisition is a total small business set-aside.

The solicitation requests quotations for the following line items:

• CLIN 0001: Large aperture high vacuum compatible rotary stage (1 Each)
• CLIN 0002: Motion controller, power supply, and software (1 Unit)
• CLIN 0003: Vacuum Feedthrough (1 Each)
• CLIN 0004: Engineering services prior to manufacturing (1 Service)
• CLIN 0005 (Option): Base vacuum pressure below 10^(-8) Torr (1 Each)
• CLIN 0006 (Option): Base vacuum pressure below 10^(-9) Torr (1 Each)
• CLIN 0007 (Option): Transportation and other related expenses (NTE 1)

Detailed requirements are in the attached Statement of Work (Attachment 1).

This is a firm-fixed-price acquisition. The period of performance and delivery/acceptance dates are detailed in the Statement of Work.

• Submission Deadline: Electronic quotations due by 12:00 PM Eastern Time, June 5, 2026.

• Submission Method: Email to elizabeth.timberlake@nist.gov and Donald.Collie@nist.gov. Reference RFQ number in the subject line.

• Quotation Preparation: Must be clearly written, neat, indexed (or Table of Contents), and logically assembled. Pages must be numbered.

• Quotation Volumes:

  • Volume I: Technical Quotation (addressing technical approach, capability, and adherence to SOW requirements with evidence)
  • Volume II: Past Performance (up to 3 examples within the last 3 years, similar in scope, size, and complexity)
  • Volume III: Price Quotation (firm-fixed-price for each CLIN, including shipping/delivery costs; valid for 90 days)
  • Volume IV: Terms and Conditions (review and accept or state exceptions)

• Evaluation Criteria: Award will be based on best value, considering price and non-price factors. Non-price factors are more important than price. Evaluation factors include:

  • Technical Capability (must meet or exceed all minimum requirements; no prototypes, used, or refurbished instruments)
  • Past Performance (based on contract requirements, quality, timeliness, communication, management, and customer satisfaction)
  • Price (reasonableness and compatibility with technical requirements)

• Inquiries: Submit written questions to elizabeth.timberlake@nist.gov and donald.collie@nist.gov no later than 4 business days after issuance.

• Total small business set-aside.

• Offerors must have an ACTIVE registration in SAM.gov at the time of quotation submission, award, performance, and final payment.

• NAICS Code: 334516 - Analytical Laboratory Instrument Manufacturing (Size Standard: 1,000 employees).

• Incorporated provisions and clauses are in effect through the RFO, supplemented by Department of Commerce Acquisition Policy.

• Special consideration will be given to vendors providing documentation of vacuum procedures, materials, and commercial greases for CLINs 0005 and 0006.

Other / Unclassified

This document, "CSS Provisions and Clauses.docx," outlines various Federal Acquisition Regulation (FAR) and Commerce Acquisition Regulation (CAR) provisions and clauses that are incorporated by reference or in full text into solicitations and contracts. It details standard terms and conditions, representations, and certifications required from offerors and contractors.

This document is crucial for bidders as it defines many of the legal, contractual, and compliance requirements that will govern any resulting contract. Key areas covered include:

• Solicitation Provisions: Such as FAR 52.203-18 (Prohibition on Contracting with Entities that Require Certain Internal Confidentiality Agreements), FAR 52.204-7 (System for Award Management), and FAR 52.212-1 (Instructions to Offerors).
• Contract Clauses: Including FAR 52.203-17 (Contractor Employee Whistleblower Rights), FAR 52.204-10 (Reporting Executive Compensation), FAR 52.219-6 (Notice of Total Small Business Set-Aside), and FAR 52.225-1 (Buy American-Supplies).
• Full Text Clauses: Detailed terms for FAR 52.212-4 (Terms and Conditions—Commercial Products and Commercial Services), covering definitions, inspection, acceptance, changes, disputes, payment, termination, and warranties.
• Specific Representations: Such as FAR 52.225-18 (Place of Manufacture) and FAR 52.240-90 (Security Prohibitions and Exclusions), which require specific certifications regarding manufacturing location, Sudan and Iran business operations, and covered telecommunications equipment.
• Agency-Specific Clauses: Including CAR 1352.233-70 and 1352.233-71 regarding agency and GAO/Court of Federal Claims protests, and 1352.246-70 (Place of Acceptance).
• NIST Local Clauses: NIST LOCAL-53 addresses contract performance during changes in NIST operating status and provides billing instructions, including mandatory electronic submission via the Invoice Processing Platform (IPP).

Bidders must carefully review all incorporated provisions and clauses to understand their obligations, ensure compliance, and accurately prepare their proposals and subsequent contract performance.

Statement of Work (SOW) / Performance Work Statement (PWS)

This Statement of Work (SOW) outlines the requirements for acquiring a large aperture, high-vacuum compatible rotary stage and associated components. The purpose is to expand the National Institute of Standards & Technology (NIST), Nanoscale Device Characterization Division's (NDCD) measurement capabilities using extreme-ultraviolet (EUV) diffractometry and spectroscopic ellipsometry for the non-destructive measurement of nanoscale patterned features in semiconductor industry components.

• Line Item 0001: Large aperture high-vacuum compatible rotary stage: Requires a new stage with specific vacuum compatibility (base pressure below 10^(-6) Torr), vacuum-compatible cabling, an encoder, and cleaning for high-vacuum service. Key specifications include a clear aperture diameter between 135 mm and 200 mm, a total rotation range of -180° to 180°, repeatability of 0.003 deg, accuracy of 0.004 deg, and an axial load capacity of 35 kg.

• Line Item 0002: Motion Controller, Power Supply, and software: A system suitable for software-controlled operation of the rotary stage, operating in atmosphere, including Windows-compatible GUI software and LabView Virtual Instruments (SDK). Communication via USB, GPIB, or serial connection is required. A 120 VAC, 60 Hz power supply and cabling are included.

• Line Item 0003: Vacuum feedthrough: A DN100 CF (6-inch ConFlat) flange with electrical feedthroughs for motion control, power, and encoder feedback, suitable for connecting Line Item 0001 and 0002. Must be cleaned and bagged for high-vacuum service.

• Line Item 0004: Engineering services prior to manufacturing: Vendor must provide NIST with mechanical (CAD) drawings of the stage for approval before manufacturing.

• Repeatability: Minimum 0.003 degrees.

• Accuracy: Minimum 0.004 degrees.

• Vacuum Compatibility: Base pressure below 10^(-6) Torr (with optional stricter requirements for 10^(-8) or 10^(-9) Torr).

• Deliverable Acceptance: NIST TPOC will review deliverables within 2 weeks of receipt. Performance tests include powering up the rotation stage with included hardware and software to confirm operational status.

• Period of Performance: Contractor shall ship all items no later than 18 weeks after acceptance of order.

• Place of Delivery: NIST Gaithersburg.

• All equipment must be new; used, remanufactured, experimental, prototype, or custom items are not acceptable.

• Use of "gray market" components is not acceptable.

• Special consideration will be given to vendors providing documentation on vacuum procedures, materials, and commercial greases.

• Warranty: Minimum of 1 year, commencing upon acceptance.

• Payment Schedule: 100% after installation and acceptance, successful completion of testing, and successful demonstration of performance. Partial shipments/invoices are not accepted.

• Cybersecurity Privacy Requirements: Solution must meet federal laws, regulations, policies, and standards for security and privacy protection, including specific controls for system security plans, access controls, vulnerability scanning, incident response, and encryption.