HV Vacuum Chamber

Statement of Work (SOW)

The Nanoscale Device Characterization Division (NDCD) requires a custom high-vacuum chamber to house new experimental apparatus for measuring nanoscale patterned features in semiconductor chips using extreme-ultraviolet (EUV) diffractometry and spectroscopic ellipsometry. This capability is intended to support the American semiconductor industry by providing non-destructive measurement of the smallest features in computer chips.

The contractor shall provide a new custom high-vacuum chamber system meeting all technical specifications. Key components include:

• Custom Vacuum Chamber (Line Item 0001): Comprised of a top endpiece (aluminum), chamber body (stainless steel), bottom endpiece (aluminum), and necessary gaskets, blank flanges, and hardware to achieve high vacuum. The chamber must accommodate specific port configurations (Conflat and ISO sizes) and include provisions for mounting turbomolecular pumps. Detailed CAD drawings must be provided and approved by NIST prior to manufacturing.

• Hinged Door (Line Item 0002 - Option): An optional hinged door to replace seven ISO 160 ports on the top flange, providing a larger access opening. The stiffness of the modified top flange must be analyzed to maintain vacuum requirements.

• High Vacuum: The chamber must be leak-tight to 1 x 10-9 Torr∙L/s, with welds tested for virtual leaks. It must reach a pressure < 7.5 x 10-7 Torr in room temperature testing.

• Materials: All components must be new. Specific materials for endpieces (aluminum) and chamber body (stainless steel) are required.

• Cleanliness: Industry-standard practices for maintaining vacuum cleanliness must be followed.

• Design Drawings: Initial design due 10 calendar days ARO; Final design due 7 calendar days after acceptance of initial design.

• Manufacturing & Delivery: Custom Vacuum Chamber and Hinged Door due 90 calendar days after acceptance of final design drawings. Delivery is FOB Destination to NIST Gaithersburg, MD, no later than 120 days ARO.

• All items must be new; used or remanufactured equipment is not acceptable.

• "Gray market" components are not acceptable.

• All items must be shipped in original manufacturer’s packaging with original documentation.

• Contractor must provide detailed 3D CAD drawings for NIST approval before manufacturing.

• The entire system is warranted for a minimum of 1 year after acceptance.

• Payment is 100% after installation, acceptance, and successful completion of all testing requirements.

CAD files for chamber components and a PDF of chamber drawings are provided.

Solicitation / RFP / RFQ

This is a combined synopsis/solicitation for commercial products or services, issued as a Request for Quotation (RFQ) under FAR Part 12. The acquisition is a small business set-aside.

• CLIN 0001: Custom vacuum chamber with door consideration.

• CLIN 0002: Optional offering of a hinged door in place of a top flange, with removal of 7 ISO 160 ports (not a requirement).

• CLIN 0003: Shipping.

• CLIN 0004: Other transportation-related expenses (Not to Exceed).

• Detailed requirements are in the attached Statement of Work (Attachment #1), Vacuum Chamber Drawings (Attachment #2), and STEP files (Attachment #3).

• Contract type: Firm-fixed-price purchase order.

• Delivery and acceptance dates, and FOB point are detailed in the Statement of Work.

• Submission Deadline: April 8, 2026, by 12:00 PM EST.

• Submission Method: Electronic quotations via email to elizabeth.timberlake@nist.gov and tracy.retterer@nist.gov. Reference RFQ number in the subject line.

• Quotation Structure: Must be divided into four distinct volumes:

  • Volume I: Technical Quotation (addressing technical capability and past performance).
  • Volume II: Past Performance (up to 3 examples, max 1 page each).
  • Volume III: Price Quotation (separate from other volumes, including all shipping costs).
  • Volume IV: Terms and Conditions.

• Inquiries Deadline: Questions must be submitted in writing to the Contract Specialist and Contracting Officer no later than 2 calendar days after solicitation issuance.

• Evaluation Criteria: Award will be based on the most advantageous quotation considering Technical Capability, Past Performance, and Price. Technical Capability and Past Performance combined are more important than Price, and Technical Capability is more important than Past Performance. Prototypes, demonstration models, used, or refurbished instruments will not be considered.

• Small Business Set-Aside.

• Offerors must have an ACTIVE registration in System for Award Management (SAM.gov) at the time of quotation submission, award, performance, and final payment.

• Applicable provisions and clauses are included (Attachment #4).

• Offerors must identify any objections to terms and conditions in their quotation.

• This procurement is not under GSA FSS or GWAC.

Form / Attachment / Pricing Sheet

These documents provide detailed engineering drawings for various components, likely related to a vacuum chamber or similar scientific apparatus. They specify dimensions, hole patterns, and hardware requirements for parts labeled 'PART-Asseml-DESC' and 'PART-Asseml-floor'.

• PART-Asseml-DESC (Sheets 1-3 of 3): Details a circular assembly with multiple flange connections (6" CF, 2.75" CF, 10" CF) and various threaded inserts (M10x1.50, 5/8-11) and drilled holes.
• PART-Asseml-floor (Sheets 1-2 of 2): Details a circular component with different hole patterns and threaded inserts (1/4-20, 5/8-11) and a specific flange requirement (ISO-F DN 63).
• General Information: All drawings include proprietary and confidential notices, dimensioning in inches, and standard tolerance specifications.

These drawings are critical for bidders to understand the precise physical specifications, materials, and assembly requirements for components associated with the opportunity. They will inform manufacturing, procurement, and integration efforts.

Forms / Attachments / Pricing Sheets

This document, titled "CSS Provisions and Clauses.docx," contains a compilation of Federal Acquisition Regulation (FAR) and Commerce Acquisition Regulation (CAR) provisions and clauses that are incorporated by reference into solicitations and contracts. It also includes some clauses presented in full text.

• Provisions Incorporated by Reference: Lists specific FAR provisions that offerors must address, such as representations regarding confidentiality agreements, System for Award Management (SAM) registration, and prohibitions on contracting with inverted domestic corporations.
• Clauses Incorporated by Reference: Lists specific FAR clauses that will apply to the contract, covering areas like contractor employee whistleblower rights, prohibition on confidentiality agreements, reporting requirements, protection against subcontracting with debarred entities, small business set-asides, and payment terms.
• Full Text Clauses: Provides the complete text for FAR 52.212-4 (Terms and Conditions—Commercial Products and Commercial Services) and FAR 52.225-18 (Place of Manufacture), and CAR 1352.233-70/71 (Protests), 1352.246-70 (Place of Acceptance), and NIST LOCAL-53 (Contract Performance During Changes in NIST Operating Status).
• Specific Representations/Certifications: Includes detailed requirements for offerors to represent their compliance with prohibitions related to covered telecommunications equipment, FASCSA orders, Sudan, and Iran, including disclosure requirements for non-compliance.
• Billing and Invoicing: Outlines NIST's specific requirements for electronic invoice submissions via email to INVOICE@NIST.GOV and through the Invoice Processing Platform System (IPP), detailing required invoice information.

This document is critical for bidders as it defines many of the mandatory terms, conditions, representations, and certifications that will govern the contract. Bidders must carefully review all incorporated provisions and clauses to understand their obligations, ensure compliance, and accurately complete required representations and certifications within their proposals. The full-text clauses, particularly FAR 52.212-4 and the NIST-specific clauses, detail fundamental aspects of contract performance, payment, and dispute resolution. The detailed instructions on invoicing and payment processing are essential for timely reimbursement.