Hydrofluoric Acid Vapor Etcher
Overview
Buyer
Place of Performance
NAICS
PSC
Set Aside
Original Source
Timeline
Qualification Details
Fit reasons
- NAICS alignment with historical contract wins in similar service areas.
- Scope strongly matches core technical capabilities and delivery model.
Risks
- Past performance thresholds may require one additional teaming partner.
- Potential clarification needed on staffing minimums before bid/no-bid.
Next steps
Validate eligibility requirements, assign capture owner, and schedule partner outreach to confirm teaming strategy before submission planning.
Quick Summary
The National Institute of Standards and Technology (NIST) is conducting market research via a Sources Sought Notice to identify potential sources for a Hydrofluoric Acid (HF) Vapor Etcher for its Boulder Microfabrication Facility (BMF) in Boulder, CO. This equipment is required to process substrates up to 150 mm. Responses are due by April 21, 2026.
Scope of Need
NIST's BMF, an ISO class 5 cleanroom, requires an HF vapor etcher to replace or augment its current 100 mm substrate processing capability. Key requirements include:
- Materials compatible with HF.
- Compliance with industry safety standards for 48% HF.
- Ability to perform HF vapor etch per semiconductor industry standards.
- Must use HF liquid (gas not acceptable).
- Compatible with ISO class 5 cleanroom environment.
- Accommodates samples from chips up to 150 mm SEMI spec wafers.
- Capable of both mechanical clamping and electrostatic chuck/holder.
- Heats samples from ambient to 60°C with temperature control.
- Tabletop unit fitting a standard chemical fume hood.
- No prototypes, one-off systems, demonstration models, used, or refurbished instruments will be considered.
Response Requirements & Timeline
This is a Sources Sought notice for market research purposes only; it is not a solicitation. Interested parties should provide company details, product specifications (manufacturer, model, technical specs), reseller status, performance capabilities, customization limits, manufacturing location, NAICS code information, available services (installation, training, maintenance), standard terms of sale, pricing, existing Federal Supply Schedule contracts, and customer references. Responses should not exceed 2 pages.
- Opportunity Type: Sources Sought
- Set-Aside: None specified
- Response Due: April 21, 2026, 9:00 PM ET
- Questions Due: April 9, 2026, 5:00 PM ET
- Published: April 7, 2026
Additional Notes
This notice does not obligate the Government to award a contract. Information provided will be used for market research to determine potential sources and capabilities.