Inductively Coupled Etching System

Statement of Work (SOW)

This Statement of Work (SOW) outlines the requirements for procuring one advanced inductively coupled plasma etching system with atomic layer etching (ALE) capabilities. The system is intended to support research at Argonne National Laboratory in areas such as quantum materials, diamond thin films and devices, compound semiconductors, refractory metals, dielectric materials, and low-dimensional diamond platforms.

The contractor shall provide a complete, integrated inductively coupled plasma etching system, including design, manufacture, delivery, installation, startup, testing, training, and documentation. The system must support both inductively coupled plasma reactive ion etching (ICP-RIE) and ALE process development within a single integrated platform. Key features include:

• Load-lock architecture for sample transfer and process isolation.

• Reaction chamber suitable for high-precision etching of advanced research materials.

• Compatibility with chlorine-based chemistries and other relevant process gases.

• In-situ optical monitoring or equivalent process endpoint capability.

• Reduced deposition buildup and maintained process repeatability.

• Stable and reproducible plasma conditions.

• Substrate temperature control from -20°C to 200°C.

• Electrostatic chuck with helium backside cooling.

• Support for multiple wafer sizes (3-inch, 4-inch, 6-inch) and smaller sample formats.

• ICP plasma source power supply (1 kW) and Bias RF power supply (300 W).

• Controlled air vent for operator protection.

• Chamber wall heating capability (70°C).

• Dedicated dry pumping arrangement and turbomolecular pumping.

• Five days of installation and training services by qualified engineers.

• The system must provide reproducible plasma processing performance over repeated and extended research use.

• Support for demanding etch applications requiring stable low-pressure plasma operation, high process repeatability, and precise substrate thermal control.

• Process monitoring, safety interlocks, and operator protections for hazardous environments.

• Maintainability, serviceability, and sustained research uptime.

• Period of Performance: From contract award through equipment delivery, installation, startup, acceptance testing, training, and warranty commencement.

• Delivery lead time: Nominally within eight months after receipt and acceptance of order.

• Place of Performance: Argonne National Laboratory, Lemont, Illinois, or another designated Argonne location.

• Compliance with applicable codes, standards, and contract documents.

• Provision of utility and facility requirement information prior to shipment.

• Onsite installation, startup, and acceptance testing.

• Onsite training for Argonne personnel covering system operation, maintenance, troubleshooting, and recipe management.

• Comprehensive documentation, including installation, operation, maintenance, and warranty information.

• Quality assurance measures, including factory inspection, testing, and disclosure of nonconformances.

• Compliance with Argonne site access, safety, and work control requirements.

Form / Attachment / Pricing Sheet

This document establishes the quality assurance (QA) requirements for suppliers to Argonne National Laboratory. It details the standards and criteria suppliers must meet when fulfilling purchase orders or contracts that incorporate these requirements by reference.

• Definitions: Clarifies terms such as Purchase Order, Buyer/Laboratory, Supplier, PAAA, Suspect/Counterfeit Item, and Sub-tier Supplier.
• General Requirements: Outlines expectations for the supplier's Quality System, including potential QA program bases (e.g., DOE O 414.1D, ASME NQA-1, ISO 9001:2015, ISO 17025:2017). It also covers general requirements like Argonne audits, conformance to requirements, supplier responsibility, rights of access, protection of material, handling of suspect/counterfeit items, nonconformance reporting, and GIDEP notification.
• Specific Requirements: Details applicable acceptance criteria for various categories including General Items, Manufactured Items, Structural Items, Electrical Items, Calibrations, Material Testing, Hoisting and Rigging Items, Respiratory Equipment, Certified Reference Materials, and Electrical Safety Gloves. These sections specify requirements for part identification, traceability, configuration control, and documentation (e.g., Certificates of Conformance, test reports, calibration certifications).

This document is critical for potential bidders as it defines the mandatory quality assurance standards and procedures they must adhere to if awarded a contract. Bidders must review these requirements to ensure their quality systems and product/service offerings meet Argonne's expectations. Key areas include the specific QA program basis, handling of non-conforming and suspect/counterfeit items, and detailed documentation and traceability requirements for various item categories.

Forms / Attachments / Pricing Sheets

This document, Appendix A, contains the Argonne Terms and Conditions for Commercial Goods and Services. It outlines the standard contractual terms that apply to agreements for commercial goods and services with Argonne National Laboratory. Bidders should review these terms to understand their rights and obligations.

• Definitions: Clarifies terms like "Argonne National Laboratory," "Argonne," "ANL," "Laboratory," and "Government."
• Clause Applicability: Notes that FAR and DEAR citations are based on current versions and may be modified for Argonne's specific needs. Inapplicable clauses are considered null and void.
• Contract Disputes: States that the Contract Disputes Act is inapplicable; disputes will be adjudicated in the State of Illinois, County of DuPage.
• Key Clauses Covered: Includes sections on Assignment, Audits and Rights, Changes, Conduct of Employees, Cybersecurity and IT Acquisitions, Disputes, Environmental Protection, Excusable Delays, Inspection, Acceptance and Title, Integration, Laboratory Site Access, Safety and Health, Limitation of Liability, Non-Waiver of Defaults, Order of Precedence, Packaging, Payments, Public Release of Information, State and Local Taxes, Survival, Suspect Counterfeit Parts, and Termination (for Cause and Convenience).
• Incorporated by Reference: Lists numerous FAR and DEAR clauses that are incorporated by reference, providing specific directive numbers and titles.
• Suspect/Counterfeit Bolt Headmark List: A specific attachment detailing headmarks to identify suspect or counterfeit bolts, which should be treated as defective.

This document is critical for understanding the legal and contractual framework of any potential agreement with Argonne National Laboratory. Bidders must review these terms to ensure they can comply with all requirements, including those related to cybersecurity, employee conduct, dispute resolution, and reporting. The "Suspect/Counterfeit Bolt Headmark List" is particularly relevant if the procurement involves hardware or materials where such issues could arise.

Other / Unclassified

This document, "Moderate Risk On-Site Supplemental Conditions," outlines specific requirements and conditions for contractors performing on-site work at Argonne National Laboratory (ANL) designated as "Moderate Risk." It details procedures for approval to proceed, indemnity clauses, insurance requirements, and comprehensive Environment, Safety, and Health (ES&H) protocols.

This document is critical for any bidder planning to perform on-site work at ANL. It highlights:

• Approval Process: Contractors must receive explicit approval before commencing work.
• Indemnification: Contractors are responsible for holding ANL and the U.S. Government harmless against losses and damages, including liability for property damage and personal injury.
• Insurance: Specific insurance coverage types and limits (General Liability, Automobile Liability, Professional Liability, Worker's Compensation) are mandated, with requirements for additional insured status and waiver of subrogation.
• ES&H Requirements: This is a significant section detailing stringent safety and health protocols, including compliance with various CFR regulations (e.g., 10 CFR 851, 29 CFR 1910/1926, 40 CFR), specific standards (ACGIH, NFPA, ANSI), and the requirement for a DOE-approved Worker Safety and Health Program (WSHP). It mandates Job Safety Analyses (JSAs), Job Safety Orientations, and adherence to site-specific rules.
• Reporting: Procedures for reporting incidents, unauthorized releases, and safety violations are outlined, along with a progressive disciplinary program for non-compliance.
• Electrical Safety: Specific requirements for electrical installations, equipment, and safety measures are detailed.
• FAR/DEAR Clauses: Inclusion of relevant Federal Acquisition Regulation (FAR) and Department of Energy Acquisition Regulation (DEAR) clauses related to personal identity verification, pollution prevention, access to records, and radiation protection.

Bidders must carefully review these conditions to understand the full scope of responsibilities, risks, and compliance obligations associated with performing work at the ANL site.

Form / Attachment / Pricing Sheet

This document, titled "ANL-70B Reps & Certs Long - 20250113 (002) (1).pdf", is a comprehensive set of representations and certifications required for potential offerors responding to solicitations from Argonne National Laboratory. It serves to gather essential business and legal information from vendors.

• General Information: Collects legal name, UEI, Doing Business As, addresses, and contact details.
• Business Organization & Entity Type: Requires selection of the entity type and state of incorporation.
• Small Business Program: Asks for classification under various SBA categories (Small Business, Small-Disadvantaged Business, Woman-Owned Small Business, Veteran-Owned Small Business, Service-Disabled Veteran-Owned Small Business, HubZone).
• NAICS Code: Requires submission of the North American Industry Classification System code and associated size standard.
• FAR Clauses & Certifications: Includes numerous certifications related to:
  • Covered Telecommunications Equipment and Services (FAR 52.204-26)
  • Laboratory Standard Terms and Conditions (FAR 52.204-25)
  • Suspect Counterfeit Parts
  • Personal Conflict of Interest (related to Argonne/UChicago employees)
  • Limited Rights Data and Restricted Computer Software (FAR 52.227-14)
  • Small Business/Non-Profit Status (Public Law 96-517)
  • Patent Waiver Rights
  • Exemption from Service Contract Labor Standards (FAR 52.222-48, FAR 52.222-52)
  • Affirmative Action Compliance (FAR 52.222-25)
  • Equal Opportunity Compliance (FAR 52.222-26)
  • Buy American Act - Supplies (FAR 52.225-1)
  • Executive Compensation and First-Tier Subcontract Awards (FAR 52.204-10)
  • Debarment, Suspension, Proposed Debarment (FAR 52.209-5)
  • Child Labor Certification (FAR 52.222-18)
  • Compliance Regarding Payments to Influence Federal Transactions (FAR 52.203-11)
  • Veteran's Employment Reporting Requirements (FAR 52.222-37)
  • Certificate of Independent Price Determination (FAR 52.203-2)
  • Covenant Against Contingent Fees (FAR 52.203-5)
  • Combatting Trafficking in Persons (FAR 52.222-50)
  • Cost Accounting Standards Notices and Certification (FAR 52.230-1)
• Signature Block: Requires authorized signature, printed name, title, and date.

This document is critical for any vendor intending to bid on opportunities from Argonne National Laboratory. Bidders must carefully review and accurately complete all required sections and certifications. Failure to provide accurate and complete information may impact the evaluation of their offer or lead to non-responsibility determinations. The document outlines various compliance requirements and legal attestations necessary for conducting business with the government and Argonne.