Maskless Optical Writer *No Substitutes*

Statement of Work (SOW) / Performance Work Statement (PWS)

This Statement of Work (SOW) outlines the requirements for the procurement of a tabletop maskless optical writer system for the Center for Functional Nanomaterials (CFN) at Brookhaven National Laboratory (BNL). The system is intended to pattern photoresist thin films down to sub-micrometer resolution using an optical source without a physical photomask.

• The Contractor shall engineer, manufacture, assemble, test, deliver, install, commission, and train personnel on the Equipment.

• The Equipment must be tested at the Contractor's facility (Factory Acceptance Testing) and at BNL (Site Acceptance Testing).

• The Contractor is responsible for providing all necessary tooling, fixtures, and test equipment.

• Installation activities at BNL will be coordinated with BSA, with BSA handling offloading and rigging of heavy equipment.

• Commissioning will involve testing the Equipment on-site at BNL using BSA-supplied samples to demonstrate performance specifications.

• The Equipment must comply with all specification requirements and referenced safety codes.

• Performance specifications will be demonstrated during on-site commissioning.

• A one-year warranty on all parts and labor is required, commencing with BSA's acceptance.

• The SOW does not explicitly state the period of performance, but a schedule with milestones is provided, indicating delivery of the Equipment at the 18th week after award and commissioning at the 20th week.

• Place of performance for installation and commissioning is BNL.

• Safety: Electrical design and installation must follow NFPA 70 and NFPA 70E. A Job Hazard Analysis (JHA) is required. Laser safety (Class 3b/4) requirements must be addressed. Flame-resistant materials and specific cable types are mandated.

• Documentation: The Contractor must provide a detailed program plan, preliminary and final design reports, manufacturing/inspection/test plans, factory acceptance test reports, end-item documentation package (including manuals, test reports, drawings), and commissioning reports.

• Management: A program plan with a milestone schedule and monthly progress teleconferences are required.

• Quality Assurance: The Contractor must maintain an effective QA program compliant with ISO-9001 and BSA Form BNL-QA-101. A Certificate of Conformance is required with each shipment.

• Training: Hands-on training for BNL staff on the safe operation and maintenance of the Equipment is required.

• Packaging: Equipment must be protected against damage during shipping and handling, with specific requirements for vacuum components and labeling.

• Value Engineering: Contractors are encouraged to recommend changes for improvement in performance, reliability, safety, or cost reduction.

Technical Specification

This document outlines the technical specifications for a table-top maskless optical writer to be procured by the Center for Functional Nanomaterials (CFN) at Brookhaven National Laboratory (BNL). The equipment is intended for optical exposure of photoresist thin films using a given pattern design, capable of operating in both raster and vector modes.

• Maskless Photolithography: Enables 2D photolithography without a photomask.

• Writing Modes: Supports fast writing in raster scan mode and low edge roughness patterning in vector scan mode.

• 3D Patterning: Capable of 3D patterning with limited grayscale levels.

• Overlay Exposure: Allows for patterning in alignment with prior patterns.

• Physical Dimensions: Must fit within approximately 60" (W) x 30" (D) space.

• Utilities: Requires compressed dry air and vacuum supply.

• Stage System: Controllable through linear motors.

• Vacuum Chucks: For holding substrate sizes from 5 x 5 mm² to 150 x 150 mm² with thicknesses from 0.1 to 12 mm.

• Anti-vibration Table: For the optical system and controller computer.

• Raster Mode Source: At least one 365 nm UV LED with >= 5W output power.

• Vector Mode Sources: One or more diode lasers (350-410 nm) with >= 70 mW output power.

• Intensity Measurement Unit: For light power verification.

• Cameras: Overview camera (>= 10 x 10 mm² FOV) and alignment camera (accuracy down to 500 nm for 5x5 mm²).

• Exposure Area: Up to 150 x 150 mm².

• Autofocus: Optical autofocus with a dynamic range of 180 µm or better.

• Minimum Feature Size: 600 nm or smaller.

• Raster Mode Resolution: Achievable edge roughness down to 100 nm.

• Vector Mode Resolution: Edge roughness down to 50 nm, linear write speed up to 200 mm/s.

• Grayscale: Capability up to 256 levels.

Includes a state-of-the-art computer with Windows 11, a graphical user interface, and software for equipment control, data conversion, and exposure.

• Installation: Vendor responsible for installation, interconnecting cabling, and piping.
• Power Compatibility: Standard electrical wall socket (110 VAC, 15A).
• Electrical Certification: Compliance with applicable codes and NRTL approval.
• Safety: Equipment must have protective housing for UV/laser radiation, safety interlocks, access controls, and compliant labels/warnings.

This document contains high-level procurement requirements and specifications for solicitation and technical evaluation. It does not include detail for 'development' or 'production' and does not constitute export-controlled technology.

Other / Unclassified

This document, "BSA SUPP ON-SITE, Rev. 24.0," outlines supplemental terms and conditions for contractors working onsite at Brookhaven National Laboratory (BNL). It details various articles covering:

• Article 1: Badging of Contractor Employees: Requirements for BNL site access, including training, photo ID badges, proof of citizenship and Social Security number for U.S. citizens, and specific documentation for non-U.S. citizens. It also specifies badge validity, renewal, and return procedures.
• Article 2: Controlled Substances and Alcohol: Prohibits the consumption, unauthorized possession, or illegal use of alcoholic beverages and controlled substances on the BNL site. Random drug and alcohol screening is reserved by BSA.
• Article 3: Controlled Substance Free and Alcohol-Free Workplace: Defines terms related to a drug-free workplace and outlines contractor obligations, including establishing and submitting a drug and alcohol policy, publishing employee notifications, implementing awareness programs, and procedures for substance abuse screening and employee convictions.
• Article 4: Reporting of Accidents/Events: Mandates immediate reporting of all incidents involving illness, injury, property damage, or "off-normal occurrences" to the BSA point of contact. It also details investigation procedures and reporting requirements to BSA's PPM Division.
• Article 5: Inspection of Vehicles and Materials: Requires vehicles to pass through a Vehicle Radiation Monitoring System (VRMS) and outlines procedures for handling detected radioactive materials. BSA reserves the right to inspect and search vehicles.
• Article 6: Insurance: Specifies required insurance policies for contractors, including Worker's Compensation, General Liability, and Automobile Liability, with minimum coverage limits. It also details requirements for submitting insurance certificates.
• Article 7: Independent Contractor; Hold Harmless: Clarifies the contractor's status as an independent contractor and outlines indemnification obligations to the Government and BSA for liabilities arising from the work.
• Article 8: Compliance with 10 CFR 851 and BSA's Worker Safety and Health Program: Mandates compliance with applicable federal, state, and local safety and health regulations, including specific DOE rules and BSA's programs. It details requirements for hazard analysis, safety practices, exposure monitoring, and occupational medicine programs.
• Article 9: Foreign Government Talent Recruitment Program: Requires contractors to disclose any participation by their personnel in Foreign Talent Recruitment Programs prior to gaining access to BNL. It defines terms related to foreign countries of risk and foreign government-sponsored talent recruitment programs.

This document is critical for any bidder planning to perform work onsite at Brookhaven National Laboratory. It establishes the fundamental rules and requirements for contractor personnel regarding site access, safety, security, substance abuse, insurance, and reporting. Understanding and complying with these terms is essential for successful contract performance and avoiding potential penalties or termination. Bidders should pay close attention to the detailed requirements in each article, particularly those related to personnel badging, safety protocols (Article 8), and insurance (Article 6), as these will directly impact their operational planning and costs.

Solicitation / RFP / RFQ

This document is a Request for Quote (RFQ) from Brookhaven Science Associates, LLC (BSA) for a "Maskless Optical Writer No Substitutes". BSA operates Brookhaven National Laboratory for the U.S. Department of Energy (DOE).

• The Offeror shall furnish all labor, services, materials, and equipment as outlined in the attached Draft Purchase Order (Enclosure A).

• Qualifiers for Offerors:

  • Previous experience fabricating and testing Tabletop Maskless Optical Writer systems of comparable complexity (requires references for at least 10 systems).
  • Robust instrument service engineer network in the United States.
  • Robust Quality Assurance program (ISO 9001 certification or similar, or details of Quality System).
  • Demonstrated pattern writing quality with edge roughness smaller than 100 nm.
  • Demonstrated pattern writing alignment to existing structures with alignment accuracy down to 500 nm.

• Failure to comply with these requirements will result in the offer being deemed non-responsive.

• Contract Type: Firm Fixed Price (FFP)

• Payment Terms: NET30

• Brookhaven is a tax-exempt entity.

• Submission Deadline: June 17, 2026, at 5:00 PM EST.

• Questions Due Date: June 12, 2026, at 5:00 PM EST.

• Quotations must be submitted via email to the Buyer listed on page 1, including the signed Quotation Pricing Sheet (Enclosure B).

• Award will be made to the responsive and responsible Offeror submitting the lowest total price that meets all technical requirements.

• Total price will be evaluated to determine the lowest price.

• NAICS Code: 334413

• Size Standard: 1250

• Solicited for full and open competition.

• Offerors must be registered in the System for Award Management (SAM).

• Requirement is subject to FAR Part 25, Buy American Act.

• Enclosures include: A. Draft Purchase Order, B. AMS Form 043 Quotation Pricing Sheet.

• Anticipated Delivery Date: December 30, 2026.

• Anticipated Freight Terms: FOB Destination, Freight Prepaid.

Form / Attachment / Pricing Sheet

This document is a "DRAFT" Purchase Order (PO) from Brookhaven National Laboratory (BNL) to "ANY VENDOR". It outlines the terms and conditions for the procurement of goods or services.

• PO Number: BNL-0000477809
• Date: 06/02/2026
• Payment Terms: Net 30
• Freight Terms: FOB Destination, Frt Prepaid
• Ship Via: UPS-GROUND
• Contractual Representative: AARON S HAGLER
• Bill To: Brookhaven National Lab, Fiscal Division Building 400-D, Upton, NY 11973-5000
• Ship To: Brookhaven National Lab, Bldg 98 Rochester St, Upton, NY 11973
• Line Item: "Tabletop Maskless Optical Writer" (Quantity: 1)
• General Terms and Conditions: Incorporated by reference, including BSA's General Terms and Conditions for Commercial Items and Services, and Supplemental Terms and Conditions for Work by Contractors on Site.
• Quality Assurance: Reference to BNL-QA-101 for Supplier Quality Assurance Requirements.

This document serves as a draft purchase order, indicating a potential procurement. Bidders should review the listed item, delivery instructions, and incorporated terms and conditions to understand the requirements and obligations if they are the intended vendor. It highlights specific quality assurance requirements and delivery procedures.

Form / Attachment / Pricing Sheet

This document is a "Quotation Pricing Sheet" (Form No. AMS-Form-043, Revision No. 0.1) used to submit pricing information in response to a solicitation. It is an enclosure (Enclosure B) to a solicitation dated 6/02/2026.

• Reference: BSA Request for Quotation No. AH477809 for "Maskless Optical Writer No Substitutes".
• Item Description: Maskless Optical Writer.
• Quantity (QTY): 1
• Unit of Measure (UOM): EA (Each)
• Unit Price: To be filled in by the bidder.
• Merchandise Amount: To be filled in by the bidder.
• Total Firm Fixed Price: To be filled in by the bidder.
• Lead Time: To be filled in by the bidder.
• Country of Origin: To be filled in by the bidder.
• Price Firmness: Price shall remain firm for [60] days.
• Delivery and Payment Terms: FOB Destination, Freight Prepaid, Net 30 Days.
• Concurrence: Requires bidder signature, typed name, title, and date to acknowledge agreement with BSA's requirements, terms, conditions, and delivery schedule.

Bidders must complete and submit this form with their quotation. It requires specific pricing details for the "Maskless Optical Writer" and confirmation of agreement to the solicitation's terms. The form also specifies that the price must remain firm for 60 days and outlines the delivery and payment terms.

Form / Attachment / Pricing Sheet

This document, "BSA Comm, Rev. 24.0 (DATE April 27, 2026)", outlines the General Terms and Conditions for Commercial Products and Services at Brookhaven National Laboratory. It serves as a foundational agreement that bidders must adhere to if awarded a contract.

The document is a comprehensive list of articles covering various aspects of an agreement, including:

• Definitions of key terms (Agreement, BSA, Contractor, Government, etc.)
• Order of Precedence for contract documents
• Acceptance, Survivability, and Complete Agreement clauses
• Policies on Unauthorized Obligation, Respectful Workplace, and Reporting Concerns
• Clauses related to Assignment, Disputes, Excusable Delays, and Termination (for Convenience and Default)
• Payment terms, Changes, Inspection, Taxes, Title and Risk of Loss, Warranty, and Limitation of Liability
• Compliance with Laws, including specific clauses for Information Technology (IPv6) and Patent Indemnity
• Reporting requirements for Royalties, Executive Compensation, and Suspect/Counterfeit Items
• Applicable Law (Federal common law of government contracts)
• Clauses incorporated by reference, including numerous FAR and DEAR clauses covering a wide range of topics such as gratuities, contingent fees, business ethics, whistleblower rights, personal identity verification, safeguarding information systems, contracting prohibitions, small business utilization, labor standards, and more.

This document is critical for potential bidders as it details the contractual framework and legal obligations that will govern any awarded contract. Bidders must review these terms and conditions to understand their rights and responsibilities, including requirements for compliance, reporting, payment, termination, and dispute resolution. Familiarity with these terms is essential for preparing a compliant proposal and for successful contract performance.