Notice of Intent to Sole Source for a High-Speed Ellipsometer
Overview
Buyer
Place of Performance
NAICS
PSC
Set Aside
Original Source
Timeline
Qualification Details
Fit reasons
- NAICS alignment with historical contract wins in similar service areas.
- Scope strongly matches core technical capabilities and delivery model.
Risks
- Past performance thresholds may require one additional teaming partner.
- Potential clarification needed on staffing minimums before bid/no-bid.
Next steps
Validate eligibility requirements, assign capture owner, and schedule partner outreach to confirm teaming strategy before submission planning.
Quick Summary
The National Institute of Standards and Technology (NIST), Material Measurements Lab, Chemical Acquisition Management Division (AMD), intends to procure a high-speed ellipsometer on a sole-source basis from Fim Sense. This Special Notice is a Notice of Intent (NOI) and not a Request for Quote (RFQ). It is for a critical component of the CHIPS R&D Metrology program. Interested parties must submit documentation demonstrating their ability to meet the specified requirements by February 9, 2026, 4:00 PM ET.
Purpose & Background
NIST requires a high-speed ellipsometer to accurately measure the deposition rate of ultrathin films within an Atomic Layer Deposition (ALD) system. This capability is essential for the CHIPS R&D Metrology program, which focuses on developing digital twin technology for semiconductor manufacturing equipment. The high-speed measurement is necessary to synchronize with other process measurements.
Technical Requirements
The required ellipsometer must be a multi-wavelength, high-speed system with the following minimum specifications:
- Time Resolution: Approximately 1 millisecond or faster per wavelength.
- Wavelength Range: 370-950 nm or wider.
- Number of Wavelengths: Minimum of 8.
- Triggering: Hardware triggering and synchronization with external TTL pulse, capable of continuous measurement upon start/stop trigger.
- Compensation: Built-in compensation for vacuum window birefringence and temperature-dependent substrate optical constants.
- Mounting: In-situ mounting with tilt stages compatible with ConFlat flanges, and an ex-situ base for wafer samples.
- Software: Analysis software for time-resolved data, model creation/application, dielectric function libraries, non-ideality modeling, and an API compatible with LabVIEW and Python.
- Auto Alignment Stage: Motorized tilt stage for automatic alignment.
Notice Response Instructions
This is not a solicitation, and no award will be made based on responses to this notice. However, interested firms believing they can meet the minimum requirements and technical specifications should submit documentation including:
- Company name and address.
- Point of Contact (phone and email).
- Teaming partners (if applicable).
- Classification of the supply (COTS, modified COTS, or prototype).
- Any other pertinent information.
Proprietary information should NOT be provided.
Contract & Timeline
- Contract Opportunity Type: Special Notice (Notice of Intent to Sole Source)
- Product Service Code: 6640 (Laboratory Equipment And Supplies)
- Set-Aside: None (Sole Source Intent)
- Response Deadline: February 9, 2026, 4:00 PM ET
- Submission Method: Email to Ranae Armstrong (ranae.armstrong@nist.gov) with a CC to Donald Collie (donald.collie@nist.gov). Telephone and fax responses will not be accepted.
- Place of Performance: Gaithersburg, MD 20899, United States
Contact Information
- Primary: Ranae M. Armstrong (ranae.armstrong@nist.gov)
- Secondary: Donald Collie (donald.collie@nist.gov)