OXFORD PLASMA PRO 100
Overview
Buyer
Place of Performance
NAICS
PSC
Set Aside
Original Source
Timeline
Qualification Details
Fit reasons
- NAICS alignment with historical contract wins in similar service areas.
- Scope strongly matches core technical capabilities and delivery model.
Risks
- Past performance thresholds may require one additional teaming partner.
- Potential clarification needed on staffing minimums before bid/no-bid.
Next steps
Validate eligibility requirements, assign capture owner, and schedule partner outreach to confirm teaming strategy before submission planning.
Quick Summary
The Department of the Air Force, Air Force Life Cycle Management Center (AFLCMC), is conducting a Sources Sought to identify qualified vendors for the purchase, installation, and training of an Oxford Plasma Pro 100 Reactive Ion Etch (RIE) System. This system, along with required support equipment, will be located in the Engineering Laboratory at the Air Force Institute of Technology (AFIT), Wright-Patterson AFB, OH. This is market research to inform the acquisition strategy. Responses are due by July 2, 2026.
Scope of Work
The requirement includes providing all personnel, equipment, tools, parts, and supervision necessary for the installation, setup, testing, and training for one Oxford Plasma Pro 100 RIE system and its associated support equipment (e.g., chillers, vacuum systems). The Statement of Work (SOW) also outlines ongoing service maintenance and repair in accordance with manufacturer recommendations. Key components include a PlasmaPro 100 ICP Etch system, Cobra300 3kW ICP plasma etch source, cryo-cooled/electrically-heated etch lower electrode kit, complete gas delivery system, and associated vacuum pumps and control hardware. The period of performance is 120 days after contract award. Performance standards include 90% of lab equipment properly working and 95% of service calls satisfactorily completed.
Contract & Timeline
- Opportunity Type: Sources Sought Synopsis (not a solicitation).
- Anticipated Value: Above the Simplified Acquisition Threshold (SAT).
- NAICS Code: 811310 - Commercial and Industrial and Machinery and Equipment.
- Response Due: July 2, 2026, at 3:00 PM EDT.
- Published Date: June 16, 2026.
Set-Aside & Eligibility
No set-aside has been decided. The Air Force is contemplating a small business set-aside if sufficient demonstrated interest and capability are identified. Small business respondents are specifically asked to provide details on how they would comply with RFO clause 52.219-14, Limitations on Subcontracting. If the acquisition is not set aside for small business, it may include a small business utilization requirement, and feedback on potential subcontracting areas is requested.
Submission Requirements
Interested parties must submit a capabilities statement via email to the contracting points of contact. The statement should include:
- Company Information: Name, address, CAGE/DUNS Code.
- Point of Contact: Name, phone, email.
- Ownership: Domestic/foreign status, foreign national employee contemplation.
- Socio-Economic Status: (e.g., Large, Small, 8(a), HUBZone, SDVOSB, WOSB).
- Manufacturer/Distributor Status: Indicate if manufacturer or distributor, and name of manufacturer if distributor.
- Proprietary Data: Statement on government release of proprietary data.
- Past Performance: Experience on similar projects (contract numbers, descriptions, POCs).
- Capabilities: Facility and services/supplies provided.
- System Viability: Identify requirements precluding product/service viability.
- Commerciality: Recent sales history to commercial companies, terms for Gov/commercial.