Plasma Cleaning System

Statement of Work (SOW)

To procure a plasma cleaning system for microelectronics surface preparation.

• The system is intended for the Packaging Assembly and Substrates (PAS) Lab, which fabricates developmental, prototype, and production high voltage devices and enclosures for DoD Customers.

• The system must meet the needs of achieving die bond, wire bond, solder, and lid seal attachments strengths that meet MIL-STD-883.

• The system must address the increasing variety and thermal sensitivity of packaging materials that the current legacy system cannot handle.

• OPENAIR Plasma System: Includes FG5001S Plasma Generator, RD1004 Rotating Jet, PCU-M Plasma Control Unit, HV SS single HV connection set, PC RS Cable set, RCM-PCU Rotation monitoring, PCM-PCU Jet pressure control module, and an 8DAE5 Additional Carbon Fine Filter.

• Cartesian Robot: 3-axis robot with dimensions 510 x 510mm.

• Enclosure: Lab enclosure with safety controls and a 6-inch diameter exhaust port.

• Tool Start up: On-site Plasma System Start-up (one day).

• Equipment Maintenance: One year of maintenance for the OPENAIR Plasma system, including updates, enhancements, and upgrades.

• Technical Support: Access to a technical support center staffed by experienced design engineers, available Monday through Friday, 8:00 AM to 5:00 PM Pacific Standard Time.

Not explicitly stated, but implied to be at the DMEA PAS Lab.

• The contractor shall provide equipment, spare parts, materials, training, software licensing, and remote technical support.
• Technical support staff must have specialized knowledge of additive manufacturing and the OPENAIR Plasma system.
• Support staff must be able to diagnose and resolve problems of all technical complexity levels.

Solicitation / RFP / RFQ

This document is a Combined Synopsis/Solicitation for a Plasma Cleaning System. The proposed contract action is anticipated to be a firm-fixed-price contract. The government is procuring an OPENAIR Plasma System, associated shipping, and annual support.

• OPENAIR Plasma System

• Shipping

• Annual Support

• Contract type: Firm-fixed-price.

• The document references an attached "DMEA Statement of Work (SOW) No. 26-6B1" dated December 16, 2025, which contains detailed requirements.

• Quotes are due by 1400 (2:00 p.m.) Pacific Standard Time (PST) on Thursday, April 9, 2026.

• Quotes should be submitted via email to nicholas.s.roberts8.civ@mail.mil.

• Offers may use contractor-generated quote forms.

• Evaluation factors for award are: Quality of the product and Price.

• The contract will be awarded to the responsible offeror whose offer represents the best value to the Government.

• Notice of Total Small Business Set-Aside (FAR 52.219-6) is included.

• The solicitation is issued in accordance with FAR part 13.

• Offerors are invited to propose alternative CLIN structures.

• The Government may reject any or all quotations and reserves the right to cancel the solicitation.

• No proposal preparation costs or other expenses will be reimbursed.

• Contact the Contracting Officer, Nicholas Roberts, via email for questions.

Solicitation / RFP / RFQ

This document is a Sole Source Justification for a new firm fixed price requirement to procure a Plasma System with Robot and Enclosure. The Defense Microelectronics Activity (DMEA) requires this system for atmospheric pressure plasma treatment to prepare surfaces for bonding or other applications, specifically for microelectronics assembly to ensure MIL-STD-883 compliance for wire and die bond strength.

• An atmospheric pressure plasma treatment system.

• The system shall use air and form gas (hydrogen and nitrogen) to produce oxidized and reduced surfaces.

• The system is intended to support microelectronics assembly processes, including cleaning steps.

• Type of Action: New firm fixed price requirement.

• Estimated Value: Not explicitly stated, but referenced as "Total estimated value of".

• Authority Cited: FAR 13.106-1(b)(1)(i) - Soliciting from a single source.

• Solicitation will be posted on SAM.gov.

• Quotations from all responsible sources will be considered.

• Fair and Reasonable Cost Determination: Based on Independent Government Estimate and market research.

• This is a sole source justification based on patented technology (Plasmatreat USA holds Patent US10555411).

• Market research was conducted in January 2026.

• The specific system required is the Plasmatreat USA, Inc. Openair Plasma system.

• The justification is dated 2/2/26.