preventative maintenance agreement for Canon 3030ia+ i-line stepper lithography system

Statement of Work (SOW) / Performance Work Statement (PWS)

This Statement of Work outlines the requirements for a preventative maintenance contract for a Canon 5x i-Line Stepper Photolithography system (Stepper) located at the GSFC Detector Development Laboratory (DDL).

• The contract covers maintenance for a Canon 5x i-Line Stepper used for defining submicron scale geometry structures in polymer-based photoresists.

• The system aligns and exposes patterns onto wafers for device fabrication, supporting projects for Cosmic Microwave Background Polarization technology, Microwave Kinetic Inductance Detectors, Far-Infrared Detectors, X-Ray Calorimeters, Large Format Magnetic Calorimeters, and Microfluidic Components, EUV and Far-IR/Sub-mm optical components, superconducting amplifiers, and MicroElectroMechanical (MEMS) devices.

• The agreement includes preventative maintenance and potential repair services.

• Coverage Hours: Monday - Friday, 9 am - 5 pm (excluding Canon Holidays).

• FSE Service Support: Includes (4) Quarterly PM visits per year.

• Call Response: Guaranteed within 4 hours (Target 2 hours).

• On-site Response: Guaranteed within 72 hours (Target 48 hours).

• Additional Labor Hours: Available M-F days, M-F after hours, and Weekends (day shift) when available, subject to additional Purchase Order.

• Application and Software Support: Available within contract term when requested and additional purchase order issued.

• Consumable Parts: Mercury and halogen lamps (specific part numbers listed) are included.

• Repair Parts: Any repair parts needed outside of warranty coverage require an additional purchase order.

• Spare Parts Usage Review: Quarterly.

• Same / Next Day Ship Out: Order must be received by noon for same day ship out.

• Parts Returns: Accepted if not opened by customer, within < 30 days.

• Parts Warranty: Replaced by customer (30 days), Replaced by Canon (90 days).

• Special Warranty Term: Up to 360 days for large units and assemblies.

• Service Update Notices: General and Urgent.

• Period of Performance: September 15, 2026, to September 14, 2027.

• Place of Performance: NASA Goddard Space Flight Center, Greenbelt, MD USA.

• Eligible Equipment: FPA-3030i5a Serial No. 1063105.

• Scheduled PM's: To be mutually scheduled by Canon and NASA project management.

• Travel Expense: No charge for scheduled PM's. For on-call service repairs, travel expense will be billed as incurred.

• Urgent worldwide part expedite fee: Billed as incurred.

• Fee discount for Special Tools Usage: 25% (Customer is responsible for shipping charge).

• Government-Furnished Equipment and Information: None.

Solicitation / RFP / RFQ

NASA/NSSC has a requirement for a preventative maintenance agreement for a Canon 3030ia+ i-line stepper lithography system. NASA/NSSC intends to issue a sole source contract to Canon USA Inc, as it has been determined that Canon USA Inc is the sole provider of this service. The procurement will be conducted under FAR Part 12 for Commercial Items. Performance will be located at NASA/Goddard Space Flight Center (GSFC).

• Preventative maintenance agreement for a Canon 3030ia+ i-line stepper lithography system.

• The contract type is intended to be sole source.

• Interested organizations may submit their capabilities and qualifications in writing.

• Deadline for submission: Not later than 4:00 p.m. Central Standard Time on 5/4/2026.

• Submitted capabilities/qualifications will be evaluated solely to determine if the procurement should be conducted on a competitive basis.

• Oral communications are not acceptable.

• This notice is for a sole source determination. The government reserves the right to determine whether or not to conduct this procurement on a competitive basis.

• The NAICS Code for this procurement is 811210.

• NASA FAR Supplement Clause 1852.215-84, Ombudsman, is applicable. A listing of the Center Ombudsman can be found at the provided URL.