Primary S-Parameter Standards for Plasma Etching Record

Amendment / Modification

This amendment addresses submitted questions regarding the "DIN 7/16 Offset Shorts" requirement.

• Minimum Requirements Section, Line Item 0002: Clarified that "All devices shall have male DIN 7/16 connectors made to the IEEE 287.1-2021 metrology grade pin connector specification." The original wording "be" has been corrected to "have".

• Scope, Item 4: Corrected a typographical error. It should state "A quantity of seven (7) DIN 7/16 Offset Shorts" instead of "DIN 1/16 Offset Shorts".

• Minimum Requirements Section, Line Item 0002

• Scope, Item 4

This amendment clarifies technical specifications and corrects a quantity description. Bidders should ensure their proposals reflect these updated details. The response deadline remains 16 MAR 26.

Statement of Work (SOW) / Performance Work Statement (PWS)

This SOW supports NIST's research project "RF Waveform and Rapid Frequency-Comb Diagnostics for Plasma Etching," focusing on developing high-power waveform metrology critical for the semiconductor industry's supply chain and R&D ecosystem. The goal is to enable accurate measurement of high-power RF waveforms used in semiconductor plasma processing.

The contractor shall deliver the following items, inclusive of FOB Destination and a 1-year warranty:

• Mechanical Drawings: Initial draft, and an intermediate draft if the initial is not approved, and a final draft of the devices.
• Primary S-Parameter Standards: Seven (7) male DIN 7/16 offset shorts, manufactured to IEEE 287.1-2021 metrology grade pin connector specifications. Specific lengths required are 0.631 in, 2.743 in, 4.667 in, 6.021 in, 7.406 in, 13.452 in, and 15.839 in. Devices must be beadless, gold-plated on relevant electrical performance surfaces, and include a removable cap for transit.
• Dimensional Measurements: Twenty-eight (28) dimensional measurements for each device, detailing specific dimensions (inner conductor diameter, outer conductor diameter, outer conductor length, center conductor length) from the reference plane to the short plane. Each measurement must include tolerance or standard uncertainty, with a brief description of the measurement method.

Deliverables will be reviewed by the NIST TPOC or COR within 4 weeks of receipt. Acceptance or requests for revision will be communicated via email. Revised deliverables are due within 8 weeks of notification.

• Initial draft mechanical drawings: No later than 8 weeks after receipt of order.

• DIN 7/16 offset shorts and dimensional measurements: No later than 24 weeks after approval of draft drawings.

• Delivery Point: National Institute of Standards and Technology, 325 Broadway, C/O TBD, Boulder, CO, 80305.

• All items must be new; used or remanufactured equipment will not be considered.

• All items must be shipped in original manufacturer’s packaging with original documentation.

• This requirement is for modified commercial off-the-shelf items only.

• The contractor shall submit a firm fixed-price quotation.

• Delivery terms are F.O.B Destination (or equivalent, e.g., DDP).

• Inspection and acceptance will occur within 4 weeks of receipt. NIST reserves the right to perform performance tests and evaluations.

Solicitation / RFP / RFQ

This is a combined synopsis/solicitation (Request for Quotation - RFQ) for commercial products or services, prepared in accordance with FAR Part 12. The government is procuring mechanical drawings and physical units of DIN 7/16 Offset Shorts. This announcement is the sole solicitation; a written solicitation will not be issued.

• CLIN 0001: Mechanical Drawings of DIN 7/16 Offset Shorts (7 units)

• CLIN 0002: DIN 7/16 Offset Shorts (7 units)

• Detailed requirements are specified in the attached Statement of Work.

• Contract Type: Firm Fixed Price Purchase Order (PO).

• Award will be made to the lowest priced, technically acceptable quote.

• The government reserves the right to make an award without discussions based solely on initial quotes.

• Submission Deadline: Electronic quotations must be received by 4:00 PM Eastern Time on 03/16/26.

• Submission Method: Email to ranae.armstrong@nist.gov with a copy to donald.collie@nist.gov. Reference the RFQ number in the subject line.

• Inquiries Deadline: Written questions must be received by 03/11/26 and submitted to both ranae.armstrong@nist.gov and donald.collie@nist.gov.

• Evaluation Criteria: Award will be based on the lowest priced, technically acceptable quote. Technical capability will be evaluated based on whether proposed equipment meets or exceeds all minimum requirements outlined in the SOW. Proposed prices will be evaluated for reasonableness.

• Quotation Structure:

  • Volume I – Technical Quotation (including technical description, product literature, country of origin, manufacturer authorization, delivery, installation, training, and warranty confirmation).
  • Volume II – Price Quotation (including solicitation number, POC info, UEI, firm fixed price per line item, total price, shipping/delivery costs, and discount terms).
  • Volume III – Terms and Conditions (completion of required information and any exceptions).

• NAICS Code: 334516, Analytical Laboratory Instrument Manufacturing.

• Small Business Size Standard: 1,000 employees.

• Registration: Quoters must have an ACTIVE registration in the System for Award Management (SAM.gov) at the time of quotation submission, award, performance, and final payment.

• Referenced Attachments: Statement of Work, Applicable Provisions and Clauses.

• FAR 52.212-1 and FAR 52.12-2 (Deviations) apply.

• Any objections to terms and conditions must be clearly stated in the quotation.

Solicitation / RFP / RFQ

This document incorporates by reference various Federal Acquisition Regulation (FAR) and Commerce Acquisition Regulation (CAR) provisions and clauses. It also provides the full text for FAR 52.212-4, "Terms and Conditions – Commercial Products and Commercial Services," and specific NIST clauses related to agency protests, GAO/COFC protests, place of acceptance, and contract performance during NIST operating status changes. Bidders must be aware of these incorporated provisions and clauses as they form part of the contract.

• FAR 52.252-1 & 52.252-2: Provisions and clauses are incorporated by reference. Full text is available upon request or via provided links (acquisition.gov and ecfr.gov).

• FAR 52.212-4 (Full Text): Details terms and conditions for commercial items, including definitions, inspection/acceptance, assignment, changes, disputes, excusable delays, invoicing, patent indemnity, payment terms, risk of loss, taxes, termination (convenience and cause), title, warranty, limitation of liability, compliance with laws, order of precedence, unauthorized obligations, and Comptroller General examination of records.

• FAR 52.225-2 (Buy American Certificate): Requires offerors to certify end products as domestic or foreign, and identify those containing critical components.

• CAR 1352.233-70 & 1352.233-71: Outlines procedures for filing agency protests with NIST and protests with GAO/Court of Federal Claims, including service requirements.

• 1352.246-70: Specifies the place of acceptance for supplies and services as the National Institute of Standards and Technology, 100 Bureau Drive, Gaithersburg, MD 20899.

• NIST LOCAL-53: Details contractor responsibilities regarding NIST campus operating status, access, and performance during changes in NIST operational status, including lapses in appropriation.

• Not explicitly stated, but the full text of FAR 52.212-4 suggests this opportunity involves commercial products and services.

• Offerors must complete and submit required provisions, such as the "Buy American Certificate" (FAR 52.225-2).

• Invoices must be submitted electronically via email to INVOICE@NIST.GOV and through the U.S. Department of the Treasury's Invoice Processing Platform System (IPP).

• Various provisions related to small business representations (e.g., 52.204-5, 52.219-28) and prohibitions on contracting with certain entities (e.g., 52.203-18, 52.209-2) are incorporated.

• Bidders are responsible for accessing and understanding all incorporated FAR and CAR provisions and clauses, as well as the full text clauses provided.

• Specific contact information for protest filings and invoice submissions is provided.