Process Gas Line Installation to Support Bosch-optimized ICP-DRIE Plasma Etch System
Overview
Buyer
Place of Performance
NAICS
PSC
Set Aside
Original Source
Timeline
Qualification Details
Fit reasons
- NAICS alignment with historical contract wins in similar service areas.
- Scope strongly matches core technical capabilities and delivery model.
Risks
- Past performance thresholds may require one additional teaming partner.
- Potential clarification needed on staffing minimums before bid/no-bid.
Next steps
Validate eligibility requirements, assign capture owner, and schedule partner outreach to confirm teaming strategy before submission planning.
Quick Summary
The Naval Research Laboratory (NRL) in Washington, DC, has issued a Combined Synopsis/Solicitation (RFQ) for the installation of process gas lines to support a Bosch-optimized ICP-DRIE Plasma Etch System. This is a Total Small Business Set-Aside on a Firm Fixed-Price (FFP) basis. Quotations are due by April 13, 2026, 7:00 PM EDT.
Scope of Work
This requirement involves the installation of multiple ultra-high purity (UHP) stainless steel (316L) process gas delivery lines from source bottles to an ICP-DRIE plasma etch system at NRL-DC Building 250. The scope includes:
- Installation of new UHP 316L stainless steel gas lines.
- Removal and disposal of existing process gas line tubing.
- Supply and installation of all mechanical fittings and isolation valves.
- Specific routing for 9 process gases (SF6, C4F8, CF4, CHF3, CH4, H2, N2, O2, Ar), with direct delivery for some and others via a gas mixing pod.
- Installation of a new line from the pod module outlet to the ICP-DRIE inlet.
- Removal of existing HBr and Cl gas lines without interrupting other tools.
- Routing all gas lines within the cleanroom below the raised floor, ensuring minimum 8 feet clearance in the utility spine.
- All lines must be UHP, 316L stainless steel, with fittings prohibited along tubing length except at endpoints.
- Helium leak testing to 1x10-8 atm-cc/sec or less, per SEMI F1-0521 standards, with the vendor providing a qualified test system.
Contract Details
- Opportunity Type: Combined Synopsis/Solicitation (RFQ)
- Set-Aside: Total Small Business
- Contract Type: Firm Fixed-Price (FFP)
- NAICS: 333248 (Small Business Size Standard: SMALL)
- PSC: 3655 (Gas Generating And Dispensing Systems, Fixed Or Mobile)
- Place of Performance: U.S. Naval Research Laboratory, 4555 Overlook Avenue, S.W., Bldg. 250, Washington, DC 20375.
- Delivery: FOB Destination is preferred.
- Equipment: New equipment only; no remanufactured or "gray market" items. Vendor must be an OEM or authorized dealer/distributor/reseller, providing manufacturer authorization documentation.
Evaluation Criteria
Award will be made to the responsible offeror whose quotation is most advantageous to the Government, based on a Lowest Price Technically Acceptable (LPTA) approach. Offers will be ranked by price, and the lowest-priced technically acceptable offer(s) will be considered for award. Technical acceptability requires meeting all minimum requirements/specifications.
Submission Requirements & Deadline
Quoters must submit one copy of their technical and price quote via email, including their DUNS Number and CAGE Code. SAM registration is required. Questions must be submitted via email.
- Response Due: April 13, 2026, 7:00 PM EDT
- Government POC: Carrie Cawley, carrie.a.cawley.civ@us.navy.mil. Reference solicitation number N0017326Q1301342128.