Process Gas Line Installation to Support Bosch-optimized ICP-DRIE Plasma Etch System
Overview
Buyer
Place of Performance
NAICS
PSC
Set Aside
Original Source
Timeline
Qualification Details
Fit reasons
- NAICS alignment with historical contract wins in similar service areas.
- Scope strongly matches core technical capabilities and delivery model.
Risks
- Past performance thresholds may require one additional teaming partner.
- Potential clarification needed on staffing minimums before bid/no-bid.
Next steps
Validate eligibility requirements, assign capture owner, and schedule partner outreach to confirm teaming strategy before submission planning.
Quick Summary
The Naval Research Laboratory (NRL), part of the Department of the Navy, is seeking quotations for the installation of process gas lines to support a Bosch-optimized ICP-DRIE Plasma Etch System. This opportunity, identified as a Combined Synopsis/Solicitation (RFQ), is a Total Small Business Set-Aside and will result in a Firm-Fixed-Price (FFP) contract. The place of performance is NRL-DC Building 250 in Washington, DC. Quotations are due by April 25, 2026.
Scope of Work
The project involves the installation of new ultra-high purity (UHP) 316L stainless steel process gas delivery lines. This includes the removal and disposal of existing process gas line tubing from a de-commissioned ICP-DRIE system. The scope specifies requirements for nine process gases (SF6, C4F8, CF4, CHF3, CH4, H2, N2, O2, Ar), with some requiring direct delivery and others routed through a gas mixing pod. A new process gas line will be installed from the pod module outlet to the ICP-DRIE inlet. The vendor will also remove existing HBr and Cl gas delivery lines, ensuring no interruption to other tools. All gas lines must be routed within the cleanroom below the raised floor, maintaining a minimum 8-foot clearance in the utility spine. The vendor must supply and install all mechanical fittings and isolation valves.
Performance Standards
All installed gas lines must be rated UHP and constructed from 316L stainless steel. Mechanical fittings such as Swagelock or VCR are strictly prohibited along the tubing length, permitted only at endpoints (tool, gas pod, gas bottles). All lines carrying process gas must undergo helium leak testing to achieve a rate of 1x10-8 atm-cc/sec or less, in accordance with SEMI F1-0521 standards. The selected vendor is required to provide a qualified test system for leak rate verification. The effort must be completed in a continuous time span to minimize disruptions to cleanroom operations.
Contract Details & Submission
This procurement is a Total Small Business Set-Aside under NAICS code 333248 (Small Business Size Standard: SMALL) and PSC 3655 (Gas Generating And Dispensing Systems, Fixed Or Mobile). The contract will be Firm-Fixed-Price (FFP). Offerors must be an Original Equipment Manufacturer (OEM), an authorized dealer, distributor, or reseller, and provide manufacturer documentation. Submissions require one copy of both technical and price quotes, including the company's DUNS Number and CAGE Code. All quotations must be sent via email to Carrie Cawley at carrie.a.cawley.civ@us.navy.mil, referencing solicitation number N0017326Q1301342128. An active registration in SAM.gov is mandatory.
Evaluation Criteria
Award will be made based on the Lowest Price Technically Acceptable (LPTA) methodology. Offers will be ranked by price, and the lowest-priced technically acceptable offer(s) will be considered for award. Technical acceptability means the quote meets all minimum requirements and specifications. The government reserves the right to award without discussions.