Process Gas Line Installation to Support Bosch-optimized ICP-DRIE Plasma Etch System
Overview
Buyer
Place of Performance
NAICS
PSC
Set Aside
Original Source
Timeline
Qualification Details
Fit reasons
- NAICS alignment with historical contract wins in similar service areas.
- Scope strongly matches core technical capabilities and delivery model.
Risks
- Past performance thresholds may require one additional teaming partner.
- Potential clarification needed on staffing minimums before bid/no-bid.
Next steps
Validate eligibility requirements, assign capture owner, and schedule partner outreach to confirm teaming strategy before submission planning.
Quick Summary
The Naval Research Laboratory (NRL) in Washington, DC, is seeking quotes for the installation of process gas lines to support a Bosch-optimized ICP-DRIE Plasma Etch System. This is a Total Small Business Set-Aside procurement, structured as a Request for Quotations (RFQ) on a Firm Fixed-Price (FFP) basis. Quotations are due by April 25, 2026.
Scope of Work
The project involves installing ultra-high purity (UHP) 316L stainless steel process gas delivery lines for nine specific gases (SF6, C4F8, CF4, CHF3, CH4, H2, N2, O2, Ar) from source bottles to a gas mixing pod and/or directly to the ICP-DRIE system at NRL Building 250. Key requirements include:
- Installation: Utilizing new or existing UHP 316L stainless steel tubing.
- Welding & Fittings: Tubing pathways will be formed by bending and welding; mechanical fittings are generally restricted to endpoints. The vendor must supply all mechanical fittings and valves.
- Gas Delivery: Specific delivery requirements are detailed for each gas, with SF6, C4F8, and O2 requiring direct delivery to the ICP-DRIE.
- Removal: Removal and disposal of existing process gas lines for a de-commissioned system, and HBr/Cl gas lines without interrupting service to other tools.
- Routing: Gas lines within the cleanroom must be routed below the raised floor, while utility spine lines require a minimum of 8 feet clearance.
- Leak Testing: All new lines must be helium leak tested to a rate of 1x10-8 atm-cc/sec or less, adhering to SEMI F1-0521 standards. The vendor must provide a qualified test system.
Contract & Timeline
- Type: Combined Synopsis/Solicitation (RFQ), Firm Fixed-Price (FFP)
- Set-Aside: Total Small Business
- NAICS Code: 333248 (Small Business Size Standard: SMALL)
- PSC Code: 3655 (Gas Generating And Dispensing Systems, Fixed Or Mobile)
- Response Due: April 25, 2026, 7:00 PM Z
- Published: April 17, 2026
- Place of Performance: U.S. Naval Research Laboratory, 4555 Overlook Avenue, S.W., Washington, DC 20375
Evaluation
Award will be made to the responsible offeror whose offer is most advantageous to the Government, based on a Lowest Price Technically Acceptable (LPTA) approach. Offers will be ranked by price, and the lowest-priced offer(s) will undergo technical evaluation. Technical acceptability requires meeting all minimum requirements/specifications stated in the RFQ. The Government may make an award without discussions or negotiations.
Submission Instructions & Requirements
- Submit one copy of the technical and price quote via email.
- Include company DUNS Number and CAGE Code on the quote.
- Vendor must be an Original Equipment Manufacturer (OEM), an OEM authorized dealer, distributor, or reseller, and provide documentation of authorization.
- Proposals must include tabulated responses ('COMPLY' or 'DO NOT COMPLY') to specific numbered requirements in the Statement of Work.
- Offerors must have an active registration in the System for Award Management (SAM) database (www.sam.gov).
- All questions must be submitted via email to the Government Point of Contact.
Government Point of Contact: Carrie Cawley, carrie.a.cawley.civ@us.navy.mil. Reference solicitation number N0017326Q1301342128A1 in all correspondence.