Rapid Thermal Annealing System
Overview
Buyer
Place of Performance
NAICS
PSC
Set Aside
Original Source
Timeline
Qualification Details
Fit reasons
- NAICS alignment with historical contract wins in similar service areas.
- Scope strongly matches core technical capabilities and delivery model.
Risks
- Past performance thresholds may require one additional teaming partner.
- Potential clarification needed on staffing minimums before bid/no-bid.
Next steps
Validate eligibility requirements, assign capture owner, and schedule partner outreach to confirm teaming strategy before submission planning.
Quick Summary
The National Institute of Standards and Technology (NIST), through its Boulder Microfabrication Facility (BMF), is conducting market research via a Sources Sought Notice for a Rapid Thermal Annealing (RTA) System. This system is required to process substrates up to 150 mm, an upgrade from the current 76.2 mm capability. Responses are due by April 24, 2026.
Scope of Need
NIST seeks an RTA system capable of performing annealing according to semiconductor industry standards within an ISO class 5 cleanroom. Key specifications include:
- Temperature Range: Room temperature to 1200 °C, with +/- 1 °C stability.
- Ramp Rate: At least 100 °C/s.
- Environment: Vacuum and gas environments (e.g., 5% H2 in Ar, Ar, Pure dry air, N2) with digital mass flow controllers.
- Substrate Processing: From chips up to 150 mm SEMI spec wafers.
- Loading System: Clamshell or tray loading, with a preference for clamshell.
- Footprint: Must fit within 1m x 1m x 2m (W x D x H) floor space.
- Exclusions: Prototypes, one-off systems, demonstration models, used, or refurbished instruments will not be considered.
Response Requirements
Interested vendors should submit responses via email to the Primary Point of Contact. Responses, limited to 2 pages, should include:
- Company information (name, address, contact, UEI).
- Manufacturer, model number, and technical specifications of proposed equipment.
- Performance capabilities and customization limits.
- Manufacturing location and any planned changes.
- NAICS code assessment (small/other business, alternative NAICS suggestions).
- Available services (installation, training, maintenance, facility renovation).
- Standard terms and conditions, pricing, and Federal Supply Schedule contract details.
- Customer references and any other valuable information.
- Do not provide proprietary information.
Key Dates
- Questions Due: April 14, 2026, by 5:00 PM ET.
- Responses Due: April 24, 2026.
- Published: April 10, 2026.
Important Notes
This is a Sources Sought Notice for market research purposes only and does not constitute a solicitation or commitment to award a contract. The Government is not obligated to pay for information provided or acknowledge receipt. Responses to this notice will not be considered an adequate response to any future solicitation.