SUSS ACS200 Control System Upgrade
Overview
Buyer
Place of Performance
NAICS
PSC
Set Aside
Original Source
Timeline
Qualification Details
Fit reasons
- NAICS alignment with historical contract wins in similar service areas.
- Scope strongly matches core technical capabilities and delivery model.
Risks
- Past performance thresholds may require one additional teaming partner.
- Potential clarification needed on staffing minimums before bid/no-bid.
Next steps
Validate eligibility requirements, assign capture owner, and schedule partner outreach to confirm teaming strategy before submission planning.
Quick Summary
The National Institute of Standards and Technology (NIST) has issued a Combined Sources Sought and Notice of Intent to Sole Source for the SUSS ACS200 Control System Upgrade. This effort aims to repair and upgrade a critical micro-lithography cluster system at the CNST NanoFab in Gaithersburg, MD, which is currently non-operational due to an outdated control computer. NIST intends to sole source to Suss Microtec, but is seeking information from other capable sources. Responses are due by May 18, 2026.
Scope of Work
NIST requires the upgrade of an existing SUSS ACS200 Gen3 Microlithography cluster. This includes providing and installing a new Tool Controller Panel and PC with a proper operating system. Key technical specifications include:
- All materials must be new.
- Work performed by OEM trained personnel qualified for SUSS MicroTec ACS200 systems.
- Installation, setup, and acceptance at the NIST CNST NanoFab cleanroom in Gaithersburg, MD.
- New system must perform programmable sequences and recipes compatible with the current SUSS ACS200 GEN3.
- Handle 100mm (0.5-1mm thick) and 150mm (0.5-1.5mm thick) diameter substrates.
- Software must support existing baseline sequences, manual functions, utility monitoring, and interlock functions.
- Vendor to transfer old data files, provide all parts and labor, offer maintenance/operations training, and supply updated manuals/schematics.
Contract & Timeline
- Type: Combined Sources Sought / Notice of Intent to Sole Source
- Set-Aside: None specified
- Product Service Code: 6640 - Laboratory Equipment And Supplies
- Place of Performance: Gaithersburg, MD
- Response Due: May 18, 2026, 4:00 PM ET
- Published: May 4, 2026
- Questions Due: Within 5 days of posting (approx. May 9, 2026)
Market Research & Sole Source Intent
NIST conducted market research and determined that only Suss Microtec (UEI: WEARZ3WMNKL9) can meet all minimum requirements. This notice serves as an opportunity for other interested parties to demonstrate their capability.
Response Requirements
Respondents should provide:
- Company name, address, contact info, and UEI (if SAM registered).
- Details on capabilities meeting or exceeding NIST's requirements.
- Evidence of authorized reseller status.
- Identification of any unduly restrictive requirements and suggestions for small business participation.
- Small business status and alternative NAICS code suggestions.
- Existing Federal Supply Schedule contracts or other relevant contracts.
- Firm's experience providing similar products/services.
- Any other valuable information for market research.
Proprietary information should not be included. This is not a request for quotation or a commitment to award a contract.