Two (2) Highly Accelerated Stress Test (HAST) Chamber

Statement of Work (SOW)

To acquire a Highly Accelerated Stress Test (HAST) Chamber to perform accelerated aging experiments for studying the long-term reliability of materials used in advanced packaging of semiconductor chips, supporting the CHIPS Metrology program.

• Procure a new HAST Chamber system meeting specific technical specifications.

• The system will be used for accelerated aging at variable temperature, humidity, and pressure to study the effects of thermal environments on polymeric components in advanced semiconductor packaging.

• Measured material properties will be provided in an open-source database and used for developing a new reliability model.

• An optional Terminal Bias Panel for in-situ monitoring and low-current bias application is also specified.

• The HAST Chamber must comply with the JESD22A11E standard.

• Specific technical specifications for size, temperature, pressure, and humidity are detailed.

• The optional Terminal Bias Panel must accommodate 300-400 resistance-based wired connections.

• Place of Performance: Onsite at NIST Gaithersburg, Building 226.

• Period of Performance: 8 months from the date of award for instrument delivery, including training.

• All equipment must be new; used, remanufactured, experimental, or prototype items are not acceptable.

• Installation, training, and warranty (minimum 12 months) are required.

• Cybersecurity privacy requirements consistent with federal laws and standards (FISMA, OMB Circular A-130, FIPS Publication 200) must be met.

• Contractor personnel must comply with NIST safety and security regulations, including identification badges and vehicle registration.

• Delivery terms are F.O.B Destination.

• Payment is 100% after installation and acceptance by the COR.

Solicitation / RFP / RFQ

This is a combined synopsis/solicitation for commercial products or services, specifically for a CHIPS R&D HAST Chamber. It serves as the only solicitation, and no separate written solicitation will be issued. The acquisition is being conducted as a 100% small business set-aside.

• CLIN 0001: HAST chamber (IAW Attachment #1)

• CLIN 0002: Terminal Bias panel (IAW Attachment #1)

• CLIN 0003: Other transportation related charges (Not-to-Exceed amount)

• Detailed requirements are specified in the attached Statement of Work (Attachment #1).

• Applicable Provisions and Clauses are provided in Attachment #2.

• Contract type: Firm-fixed-price.

• Period of Performance and delivery/acceptance dates are to be determined in accordance with the Statement of Work.

• FOB point is to be determined in accordance with the Statement of Work.

• Due Date for Quotations: April 10, 2026, by 11:00 am Eastern Time.

• Submission Method: Electronic quotations via email to tracy.retterer@nist.gov and forest.crumpler@nist.gov. Reference the RFQ number in the subject line.

• Quotation Preparation: Must be clearly and concisely written, indexed, and logically assembled. Quotations must be divided into four volumes:

  • Volume I: Technical Quotation (demonstrating capability to meet or exceed minimum requirements with evidence)
  • Volume II: Demonstrated Experience (up to three relevant contracts/projects)
  • Volume III: Price Quotation (firm-fixed-price for each CLIN, including shipping and tariffs)
  • Volume IV: Terms and Conditions

• Evaluation Criteria: Award will be based on best value, considering non-priced factors as significantly more important than price. Evaluation factors include:

  • Technical Capability
  • Experience
  • Price

• Pre-Quote Inquiries: Must be submitted in writing no later than 5 calendar days after the solicitation issuance date.

• Set-Aside: 100% small business set-aside.

• NAICS Code: 334516 with a small business size standard of 1,000 employees.

• SAM.gov Registration: Offerors must have an ACTIVE registration in the System for Award Management (SAM.gov) at the time of quotation submission, award, performance, and final payment.

• This procurement is not under GSA FSS or GWAC.

• Offerors must identify any other or unknown charges applicable to products manufactured outside the U.S.

• Price quotations are valid for 90 days from the due date.

Forms / Attachments / Pricing Sheets

This document, "Attachment 2 - Applicable Clauses.pdf," lists and incorporates by reference numerous Federal Acquisition Regulation (FAR) and agency-specific clauses and provisions. These are critical for understanding the terms and conditions of any resulting contract.

• Solicitation Provisions Incorporated by Reference (52.252-1): Notifies offerors that provisions are incorporated by reference and provides links to access their full text. Offerors may need to complete and submit these provisions.
• Clauses Incorporated by Reference (52.252-2): Similar to provisions, this section indicates that contract clauses are incorporated by reference and provides access links.
• Extensive List of Incorporated Clauses/Provisions: Includes numerous FAR clauses covering areas such as:
  • Contractor Whistleblower Rights
  • Prohibition on certain confidentiality agreements
  • System for Award Management (SAM)
  • Reporting requirements
  • Responsibility matters
  • Debarment/Suspension
  • Inverted Domestic Corporations
  • Delinquent Tax Liability
  • Buy American Certificates
  • Place of Manufacture
  • Security Prohibitions and Exclusions
  • Iran Representation and Certifications
  • Agency Protests and GAO/Court of Federal Claims Protests
• Full Text Provisions and Clauses: Provides the full text for FAR 52.212-4 (Terms and Conditions - Commercial Products and Commercial Services), detailing aspects like:
  • Definitions
  • Inspection/Acceptance
  • Assignment of payments
  • Changes
  • Disputes
  • Excusable delays
  • Invoicing
  • Patent indemnity
  • Payment terms (including prompt payment and overpayments)
  • Interest on amounts due
  • Risk of loss
  • Taxes
  • Termination for convenience and cause
  • Title
  • Warranty
  • Limitation of liability
  • Compliance with laws
  • Order of precedence
  • Unauthorized obligations
  • Comptroller General examination of records
• NIST Local Clauses: Includes specific NIST clauses related to:
  • Contract Performance During Changes in NIST Operating Status
  • Electronic Billing Instructions
  • Invoicing Processing Platform (IPP)
  • Place of Acceptance

This document is fundamental for bidders. It outlines the legal and contractual framework that will govern the contract. Bidders must carefully review all incorporated provisions and clauses to understand their rights, responsibilities, and obligations. Key areas to focus on include submission requirements, performance standards, payment terms, termination conditions, and any specific representations and certifications required. The "Buy American" and "Place of Manufacture" provisions are particularly important for determining product eligibility. The "Order of Precedence" clause is crucial for understanding how to resolve any conflicting terms within the contract documents.

Statement of Work (SOW)

To acquire a Highly Accelerated Stress Test (HAST) Chamber to perform accelerated aging experiments for studies on the long-term reliability of materials used in advanced packaging of semiconductor chips, supporting the CHIPS Metrology program.

• Procure a new HAST Chamber system meeting specified technical requirements.

• The chamber must accommodate multiple samples up to 300 mm in diameter, have at least two shelves, and a minimum interior volume of 21 L.

• It must support accelerated stress testing with temperature ranges from 105 °C to 142 °C or higher, pressure from 0.020 MPa to 0.392 MPa or higher, and humidity from 75% RH to 100% RH.

• The system must comply with the JESD22A11E standard.

• An optional Terminal Bias Panel for in-situ monitoring and low-current bias application is available for award.

• The system must meet all technical specifications outlined in the document.

• Compliance with JESD22A11E standard testing is required.

• The system will undergo inspection and acceptance testing by NIST.

• Place of Performance: Onsite at NIST Gaithersburg, Building 226.

• Period of Performance: 8 months from the date of award for instrument delivery and training.

• All equipment must be new; used, remanufactured, or experimental items are not acceptable.

• Contractor shall provide onsite training for up to five users.

• Contractor is responsible for installation, including uncrating, rigging, set-up, hook-up, and demonstration.

• A minimum 12-month warranty is required after acceptance.

• Cybersecurity and privacy requirements must be met, consistent with federal laws and NIST standards.

• Contractor personnel must comply with NIST safety, security, identification badge, and vehicle registration requirements.