Tystar MiniTytan 4600 Furnace Service Contract

Notice of Intent to Sole Source

This document is a notice of intent, not a request for quotation. The National Institute of Standards and Technology (NIST) intends to negotiate a firm-fixed-priced purchase order on a sole source basis with Tystar Corporation for a service contract for the Boulder Micro-Fabrication Facility's (BMF) Tystar MiniTytan 4600 furnace. The service will cover atmospheric and Low-Pressure Chemical Vapor Deposition (LPCVD) tube changes, annual preventative maintenance, and emergency maintenance visits. This is to ensure the continued operation of a critical tool used for depositing high-quality dielectric films.

• The period of performance includes a base period of twelve (12) months, plus four (4) 12-month option periods.

• The acquisition is conducted under FAR Subpart 12.102(b).

• The NAICS code is 333242 – Semiconductor Machinery Manufacturing, with a small business size standard of 1,500 employees.

• The Tystar MiniTytan 4600 furnace is critical for mission-critical operations.

• Furnace schematics, software, hardware, and electronic components are proprietary to Tystar.

• Only Tystar possesses the specialized knowledge, authorized parts, and technical expertise to service the system to OEM specifications.

• Interested parties who believe they can satisfy the requirements should identify their capability in writing.

• Responses must be submitted via email to jennifer.lohmeier@nist.gov no later than April 2, 2026, at 10:00 AM Eastern Time.

• Responses must include: Contractor Name, Address, Point of Contact details, UEI, Business Classification, and a Capability Statement.

• All offerors must have an active registration in SAM.gov.

• This notice is not a solicitation, and questions will not be entertained.

Statement of Work (SOW)

To provide a service contract for the Boulder Micro-Fabrication Facility's (BMF) Tystar MiniTytan 4600 furnace. This includes atmospheric and Low-Pressure Chemical Vapor Deposition (LPCVD) tube changes, annual Preventative Maintenance (PM), and emergency maintenance visits to ensure high tool uptime and support.

The contractor shall provide a service maintenance agreement for one Tystar MiniTytan 4600 furnace, including all planned materials, consumables, travel, labor, equipment, and expenses.

• Preventative Maintenance (Base Period): Perform PM service on the furnace (four tubes and the unit), provide configuration backups, perform service in an ISO class 5 cleanroom, supply all parts and labor, ensure operation to OEM specifications or better, and provide a detailed service report within one week of the visit.

• Optional Tasks (Atmospheric Tube Replacement): Replace process tubes and specified parts (sheathes, thermocouple, gaskets, O-rings) according to OEM guidelines, in an ISO class 5 cleanroom, with all parts and labor included. Report required within one week.

• Optional Tasks (LPCVD Tube Replacement): Similar to atmospheric tube replacement, but for LPCVD tubes.

• Optional Tasks (Emergency Maintenance and Repair): Provide all necessary parts, labor, travel, and resources to maintain or repair the system to meet or exceed OEM specifications.

• Deliverable: A report detailing all services performed, including backup of configuration and recipe files, due within one week of each service visit.

• Period: Base period of twelve (12) months, plus four (4) 12-month option periods. Estimated start date: June 1, 2026.

• Place: NIST 325 Broadway, Boulder, Colorado.

• Experience: Personnel must be factory-trained by the original manufacturer (Tystar) and pass government background checks for site access.

• Safety & Security: Contractor employees must comply with NIST safety regulations and security requirements, including obtaining identification badges and registering vehicles.

• Materials: Contractor supplies all necessary materials.

• Payment: Invoiced in arrears, Net 30-day terms upon acceptance of invoice.