Amendment to Solicitation for Ultra-High Vacuum Sample Backout Chamber

Solicitation / RFP / RFQ

This is a combined synopsis/solicitation for commercial products or services, issued as a Request for Quotation (RFQ) under simplified acquisition procedures. The acquisition is a small business set-aside. The government is procuring a UHV Bakeout system and related services.

• CLIN 0001: Draft plan of the system contractor is building.

• CLIN 0002: UHV Bakeout system.

• CLIN 0003: Shipping.

• CLIN 0004: Other related transportation expenses (Not-to-Exceed amount).

• Detailed requirements are specified in the attached Statement of Work (Attachment #1).

• Contract type: Firm-fixed-price purchase order.

• Delivery and acceptance dates are in the attached Statement of Work.

• FOB point is Destination.

• Submission Deadline: March 2, 2026, 12:00 PM Eastern Time.

• Submission Method: Electronic quotations via email to elizabeth.timberlake@nist.gov and Tracy.Retterer@nist.gov. Reference RFQ number in the subject line.

• Quotation Preparation: Must be indexed (or have a Table of Contents), with all pages numbered. Quotations must be divided into three volumes:

  • Volume I – Technical Quotation (demonstrate technical capability and meet SOW requirements with citations; include manufacturer authorization if applicable).
  • Volume II – Price Quotation (firm-fixed-price for each CLIN, including all shipping costs; identify foreign product tariffs separately).
  • Volume III – Terms and Conditions (complete required information and state any objections).

• Evaluation Criteria: Award will be made to the responsible offeror who meets all required technical specifications and proposes the lowest price (lowest priced, technically acceptable offeror).

• Inquiries: Submit written questions to elizabeth.timberlake@nist.gov and tracy.retterer@nist.gov no later than 2 calendar days after solicitation issuance.

• Small business set-aside.

• Offerors must possess an ACTIVE registration in the System for Award Management (SAM.gov) at the time of quotation submission, award, performance, and final payment.

• Solicitation number: 1333ND26QNB030068.

• NAICS Code: 334516 (Analytical Laboratory Instrument Manufacturing) with a size standard of 1,000 employees.

• Attachments referenced: Statement of Work/Requirements Document and Drawings (Attachment #1), Applicable Provisions and Clauses (Attachment #2).

• Price quotations must remain valid for 90 days.

• Offerors objecting to terms and conditions must state exceptions and rationale in their quotation.

Solicitation / RFP / RFQ

This document incorporates by reference various Federal Acquisition Regulation (FAR) provisions and clauses that are essential for understanding the terms and conditions of this solicitation. It also provides the full text for some key clauses.

• FAR 52.212-4 Terms and Conditions—Commercial Products and Commercial Services: This clause details definitions, inspection/acceptance, assignment, changes, disputes, excusable delays, invoicing, patent indemnity, payment terms, risk of loss, taxes, termination (for convenience and cause), title, warranty, limitation of liability, compliance with unique government contract laws, order of precedence, unauthorized obligations, and Comptroller General examination of records.

• FAR 52.225-2 Buy American Certificate: Requires offerors to certify the origin of end products and their components.

• FAR 52.225-18 Place of Manufacture: Requires offerors to indicate the predominant place of manufacture for end products.

• FAR 52.240-90 Security Prohibitions and Exclusions Representations and Certifications: Addresses prohibitions related to covered telecommunications equipment/services, FASCSA orders, Sudan, and Iran.

• Agency-Specific Clauses (NIST): Includes provisions for agency protests (1352.233-70), GAO and Court of Federal Claims protests (1352.233-71), place of acceptance (1352.246-70), performance during NIST operating status changes, electronic billing instructions (NIST LOCAL-54), and invoicing processing via IPP (NIST LOCAL-56).

• The document references FAR 52.212-1 Instructions to Offerors--Commercial Products and Commercial Services, indicating this solicitation likely pertains to commercial items.

• Offerors must review and comply with all incorporated provisions and clauses.

• Specific instructions for the Buy American Certificate (52.225-2) and Place of Manufacture (52.225-18) are provided.

• Representations and certifications regarding security prohibitions (52.240-90) must be made.

• Invoicing and payment procedures are detailed, including electronic submission requirements.

• Several provisions related to small business concerns are incorporated by reference (e.g., 52.219-6, 52.219-8, 52.219-28), suggesting potential set-aside opportunities or requirements.

• Many provisions and clauses are incorporated by reference with a "DEVIATION JAN 2026," indicating recent updates or deviations from standard FAR text.

• Full text for FAR 52.212-4 is provided.

• Links to acquisition.gov and ecfr.gov are provided for accessing full text of provisions and clauses.

Statement of Work (SOW) / Performance Work Statement (PWS)

To procure an ultrahigh vacuum (UHV) sample bakeout chamber system for testing materials for UHV compatibility, critical for the development of radiometers operating under extreme ultraviolet lithography conditions.

• Provide a stand-alone UHV sample bakeout chamber system capable of reaching UHV conditions (1e-8 Torr) and heating samples to at least 300°C.

• The system must be new and include all necessary pumping, pressure monitoring, and temperature control equipment.

• It should be capable of assessing material outgassing during heating and include features for future additions.

• Achieve a base pressure of 1e-8 Torr within 24 hours.

• Achieve partial pressures for masses >44 AMU below 5e-11 Torr.

• Achieve sample heating temperatures of at least 300 degrees Celsius.

• Delivery to NIST Boulder, CO.

• The UHV bakeout system is required in fiscal year 2025.

• The system must be new; experimental, prototype, or custom items will not be considered.

• "Gray market" components are not acceptable.

• All items must be shipped in original manufacturer's packaging with all documentation and software.

• The contractor must provide a draft plan within 2 weeks of award for review, followed by a revised deliverable addressing comments.

• The contractor must supply CAD drawings, user manuals, and a system operating manual.

• Cybersecurity requirements related to FISMA, OMB Circular A-130, and FIPS Publication 200 must be met.