Vacuum Pumps

Solicitation / RFP / RFQ

This document incorporates by reference various Federal Acquisition Regulation (FAR) and Commerce Acquisition Regulation (CAR) provisions and clauses. It outlines standard terms and conditions for commercial products and services, including definitions, inspection/acceptance, disputes, payment terms, and termination clauses. It also includes specific representations and certifications required from offerors.

• FAR 52.252-1 & 52.252-2: Solicitation provisions and clauses are incorporated by reference. Offerors must review and complete required blocks or identify them upon request. Full text is available at specified URLs.
• FAR 52.12-4 (Terms and Conditions—Commercial Products and Commercial Services): This clause is provided in full text and details contract administration, including definitions, inspection, acceptance, changes, disputes, excusable delays, invoicing, patent indemnity, payment, risk of loss, taxes, termination for convenience/cause, title, warranty, limitation of liability, compliance with laws, order of precedence, unauthorized obligations, and Comptroller General examination of records.
• FAR 52.225-18 (Place of Manufacture): Offerors must indicate whether the place of manufacture for end products is predominantly in the United States or outside the United States for statistical purposes.
• FAR 52.240-90 (Security Prohibitions and Exclusions Representations and Certifications): Requires offerors to represent compliance regarding covered telecommunications equipment/services, FASCSA orders, Sudan-related business operations, and Iran sanctions. Specific representations and certifications are required, with disclosure procedures for non-compliance.
• CAR 1352.233-70 & 1352.233-71: Agency-specific procedures for filing protests with the Contracting Officer, Protest Decision Authority, GAO, or the Court of Federal Claims, including service requirements.
• CAR 1352.246-70 (Place of Acceptance): Specifies that acceptance of supplies and services will occur at the National Institute of Standards and Technology, 325 Broadway, Boulder, CO 80305.
• NIST LOCAL-53 (Contract Performance During Changes in NIST Operating Status): Provides guidance on contractor operations during NIST facility closures or changes in operating status, including checking campus status and procedures during appropriation lapses.
• Billing Instructions: Requires electronic invoice submission via email to INVOICE@NIST.GOV, detailing required information. Payment requests must be submitted through the Invoice Processing Platform (IPP) at https://www.ipp.gov, with provisions for waiver requests.

Offerors must review and comply with all incorporated provisions and clauses, complete required representations and certifications, and adhere to invoicing and payment procedures. Specific submission requirements for proposals or quotes are not detailed in this document but would be found in the main solicitation.

• FAR 52.219-6 (Notice of Total Small Business Set-Aside): Indicates a potential small business set-aside.
• FAR 52.219-28 (Post-award Small Business Program Representation): Requires post-award representation.

This document primarily consists of incorporated provisions and clauses. Bidders must consult the full solicitation for specific requirements, scope of work, and submission deadlines.

Solicitation / RFP / RFQ

This is a combined synopsis/solicitation for commercial products or services, issued as a Request for Quotation (RFQ) under solicitation number 1333ND26QNB030118. The acquisition is a small business set-aside, brand name only. The government is procuring specific semiconductor manufacturing machinery.

The following items are required:

• CLIN 0001: Edwards nEXT 240D Turbo Pump (QTY 2)
• CLIN 0002: Edwards nEXT 85D Turbo Pump (QTY 1)
• CLIN 0003: nXDS 10i Scroll Pump (QTY 1)
• CLIN 0004: Ebara EV-A06 Dry Roots Pump (QTY 1)
• Transportation and related costs (Not to Exceed)

Detailed requirements are in the attached Statement of Work document.

This is a firm-fixed-price acquisition. The solicitation is supplemented by Federal Acquisition Circular (FAC) 2025-06 and the Revolutionary FAR Overhaul (RFO), along with Department of Commerce Acquisition Policy.

• Due Date for Quotations: March 20, 2026, by 12:00 PM Eastern Time.

• Submission Method: Electronic quotations via email to elizabeth.timberlake@nist.gov with a copy to forest.crumpler@nist.gov. Reference the RFQ number in the subject line.

• Inquiries: Submit questions in writing to the same email addresses no later than 2 business days after posting. Responses will be provided in an amendment.

• Quotation Structure: Must be divided into three volumes: Volume I – Technical Quotation, Volume II – Price Quotation, and Volume III – Terms and Conditions.

• Evaluation Criteria: Award will be made to the responsible Offeror whose quote is the lowest priced and technically acceptable. Technical capability and price are the evaluation factors.

• This acquisition is a small business set-aside.

• The associated NAICS code is 333242 (Semiconductor Machinery Manufacturing) with a size standard of 1,500 employees.

• Quoters must have an ACTIVE registration in the System for Award Management (SAM.gov) at the time of quotation submission, award, performance, and final payment.

• Attachments include the Statement of Work and Applicable Provisions and Clauses.

• The provision at FAR 52.212-1 (DEVIATION Jan 2026) applies.

• The government may award without discussions based on initial quotes.

Statement of Work (SOW)

This contract aims to procure a suite of vacuum pumps, specifically turbopumps, a scroll pump, and a roots pump, to support NIST's program for developing non-destructive measurement and characterization methods for complex nanoscopic devices in chip manufacturing. The pumps are critical for achieving the high vacuum environment required for EUV high-harmonic generation (HHG) light source applications.

The contractor shall provide new equipment meeting all specified technical requirements. Experimental, prototype, custom, or "gray market" components are not acceptable. All items must be shipped in original manufacturer's packaging with all documentation and software.

• Turbopumps: 2 Edwards nEXT 240D (ISO-100 inlet, KF(NW) exhaust, single phase 100-120V 60Hz, water-cooling kit, controller, power supply, extension cable).

• Turbopumps: 1 Edwards nEXT 85D (ISO-63 inlet, KF(NW) exhaust, single phase 100-120V 60Hz, water-cooling kit, controller, power supply, extension cable).

• Scroll Pump: 1 Edwards nXDS10i Oil-Free Dry Scroll Vacuum Pump (KF(NW) inlet/exhaust, single phase 100-120V 60Hz).

• Roots Pump: 1 Ebara EV-A06-1 Air Cooled Dry Vacuum Pump (KF(NW) inlet/exhaust, single phase 100-120V 60Hz).

• All pumps must have a minimum 1-year warranty.

• Deliverables include the specified pumps, with delivery expected 4 months ARO (After Receipt of Order).

• System Delivery: 4 months ARO.

• Installation/Facilitation: 2 weeks post delivery (performed by NIST).

• Place of Performance: 325 Broadway, Building 81, Boulder, CO 80305.

• New Equipment: Only new equipment will be considered.

• Compatibility: Pumps must maintain compatibility and interchangeability with existing vacuum pumps.

• Delivery Terms: FOB Destination.

• Inspection & Acceptance: NIST reserves the right to perform tests and evaluations. Visual inspection for damage will occur. NIST will test, inspect, and accept or reject within 2 weeks of receipt.

• Payment Schedule: 100% after installation and acceptance, and successful completion of testing and demonstration.

• Cybersecurity: Requirements include FISMA, OMB Circular A-130, FIPS Publication 200, and SP 800-171 compliance, with specific controls for system security plans, IT management, access controls, encryption (TLS 1.2+, FIPS 140-2/140-3 validated), auditing, and incident response.