16 MP EUV Vacuum Flanged Camera
Overview
Buyer
Place of Performance
NAICS
PSC
Set Aside
Original Source
Timeline
Qualification Details
Fit reasons
- NAICS alignment with historical contract wins in similar service areas.
- Scope strongly matches core technical capabilities and delivery model.
Risks
- Past performance thresholds may require one additional teaming partner.
- Potential clarification needed on staffing minimums before bid/no-bid.
Next steps
Validate eligibility requirements, assign capture owner, and schedule partner outreach to confirm teaming strategy before submission planning.
Quick Summary
The National Institute of Standards and Technology (NIST), under the Department of Commerce, has issued a Combined Synopsis/Solicitation for a 16 MP EUV Vacuum Flanged Camera and associated peripherals. This opportunity seeks to procure a specialized camera system to support NIST's research and development in semiconductor manufacturing, specifically for EUV ptychographic reflectometry. Quotations are due by March 5, 2026, at 12:00 PM ET.
Scope of Work
NIST requires one (1) large area 16 MP vacuum flange mounted CCD camera system. The system must be compatible with high-vacuum environments (< 10^-8 Torr) and mount to a DN160 CF vacuum flange. Key technical specifications include a quantum efficiency greater than 60% for 30-90 eV photons, low noise (< 4 electrons rms slow rate), high dynamic range, and specific readout rates. It must support "full-frame" and "kinetics" modes, include LabVIEW-compatible software drivers, and operate with both air and water cooling. The camera system must be new, and the vendor must demonstrate prior delivery of at least three identical cameras to other customers.
Contract Details
- Contract Type: Firm-Fixed-Price Purchase Order, utilizing simplified acquisition procedures.
- NAICS Code: 334516 – Analytical Laboratory Instrument Manufacturing (Size Standard: 1,000 employees).
- Set-Aside: None specified.
- Place of Performance: 325 Broadway, Boulder, CO 80305.
- Period of Performance/Lead Time: Approximately 18 weeks ARO, including factory acceptance testing (12 weeks ARO) and delivery/installation (15 weeks ARO).
- Payment Schedule: 35% upon drawing/configuration approval, 20% upon Factory Acceptance, 15% upon delivery, and 30% upon successful inspection and acceptance.
- Warranty: Minimum 1-year warranty covering parts, labor, and shipping.
Submission & Evaluation
- Submission Deadline: March 5, 2026, 12:00 PM ET.
- Submission Method: Electronic quotations via email to junee.johnson@nist.gov and forest.crumpler@nist.gov, referencing the RFQ number in the subject line.
- Quotation Structure: Must be clearly written, indexed, and divided into three volumes: Technical, Price, and Terms and Conditions.
- Evaluation Criteria: Award will be made to the responsible offeror proposing the Lowest Price Technically Acceptable (LPTA) solution that meets all required technical specifications. The government may award without discussions.
- Inquiries: Written questions were due 2 calendar days after solicitation issuance (February 28, 2026).
- Eligibility: Offerors must have an ACTIVE registration in SAM.gov at the time of submission, award, performance, and final payment.
Attachments
- Attachment #1: Statement of Work (SOW)
- Attachment #2: Applicable Provisions and Clauses (including FAR 52.212-4 and NIST local clauses)