16 MP EUV Vacuum Flanged Camera

Solicitation / RFP / RFQ

This is a combined synopsis/solicitation for commercial products or services, prepared in accordance with FAR Part 12. The government is seeking quotations for a 16 MP EUV vacuum flanged camera and peripherals. This announcement serves as the sole solicitation; no separate written solicitation will be issued.

• Item: 16 MP EUV camera and peripherals (CLIN 0001).

• Detailed requirements are specified in Attachment #1: Statement of Work.

• Delivery and acceptance dates, and FOB point, are also detailed in the SOW.

• Contract Type: Firm-fixed-price purchase order (PO).

• Acquisition Method: Simplified acquisition procedures.

• Submission Deadline: Electronic quotations must be received by 12:00 pm Eastern Time, March 5, 2026.

• Submission Method: Email to junee.johnson@nist.gov and forest.crumpler@nist.gov. Reference the RFQ number in the subject line.

• Quotation Preparation: Quotations must be clearly written, indexed (or include a Table of Contents), and divided into three distinct volumes:

  • Volume I: Technical Quotation (addressing technical approach, capability, and demonstrating how proposed items meet or exceed SOW requirements with citations).
  • Volume II: Price Quotation (firm-fixed-price for each CLIN, including shipping costs and tariffs; valid for 90 days).
  • Volume III: Terms and Conditions (complete required information as per attachments).

• Evaluation Criteria: Award will be made to the responsible offeror proposing the lowest price that also meets all required technical specifications. This is a lowest-priced, technically acceptable (LPTA) evaluation.

• Discussions: The government may award without discussions based solely on initial quotes.

• Inquiries: Written questions are due no later than 2 calendar days after solicitation issuance, submitted to junee.johnson@nist.gov and forest.crumpler@nist.gov.

• NAICS Code: 334516 – Analytical Laboratory Instrument Manufacturing.

• Size Standard: 1,000 employees.

• Registration: Offerors must have an ACTIVE registration in the System for Award Management (SAM.gov) at the time of quotation submission, award, performance, and final payment.

• Attachments:

  • Attachment #1: STATEMENT OF WORK, 16 MP EUV Vacuum Flanged Camera
  • Attachment #2: Applicable Provisions and Clauses

• Offerors objecting to terms and conditions must state their exceptions and rationale in their quotation.

Statement of Work (SOW) / Performance Work Statement (PWS)

This SOW outlines the requirements for a large area 16 MP vacuum flange mounted CCD camera system. The objective is to support NIST's program to develop new methods for non-destructively measuring and characterizing the structure of complex nanoscopic devices, specifically for EUV ptychographic reflectometry (1.06) to support semiconductor manufacturing R&D.

• Procurement of one (1) 16 MP EUV camera and associated peripherals.

• The camera system must be compatible with high-vacuum environments (< 10^-8 Torr) and mounted to a DN160 CF vacuum flange.

• Key technical specifications include high quantum efficiency (>60% for 30-90 eV photons), low noise, high dynamic range, and specific readout rates and frame speeds.

• The system must support both "full-frame" and "kinetics" modes of operation.

• Software drivers compatible with LabVIEW and a complete software package for camera operation and data acquisition are required.

• The system must be capable of operating with both air and water cooling.

• Spatial resolution of 50 nm sensitivity to detect trace impurities or defects.

• Quantum efficiency > 60% for photon energies between 30 eV and 90 eV.

• Readout noise < 4 electrons rms (slow rate) and < 10 electrons rms (fast rate).

• Dark current < 0.006 electrons/pixel/sec at -55 C, < 1e-4 electrons/pixel/sec at -90C.

• Frame-to-frame background variation < 1% at RT.

• Place of Performance: 325 Broadway, Boulder CO 80305.

• Period of Performance/Lead Time: Approximately 18 weeks ARO, including factory acceptance testing (12 weeks ARO) and delivery/installation (15 weeks ARO).

• All items must be new; experimental, prototype, or custom items are not considered.

• Vendor must demonstrate delivery of at least 3 identical cameras to other customers.

• Contractor shall provide a standard factory acceptance (FAT) report.

• The system includes a minimum 1-year warranty covering parts, labor, and shipping.

• Contractor personnel must comply with NIST security and identification badge requirements.

• Payment schedule includes 35% upon approval of drawing/configuration, 20% upon Factory Acceptance, 15% upon delivery, and 30% upon successful inspection and acceptance.

Form / Attachment / Pricing Sheet

This document, "Attachment 2 Clauses and Provisions," details various clauses and provisions that are incorporated by reference or in full text into the contract. It outlines the legal and regulatory requirements that offerors must adhere to and understand for this solicitation.

• Incorporated by Reference: Lists numerous FAR (Federal Acquisition Regulation) and agency-specific clauses and provisions that are not fully included but are legally binding. Offerors are responsible for understanding these and may need to provide specific information or representations related to them (e.g., System for Award Management registration, small business utilization, trade agreements, child labor, combating trafficking in persons, etc.).
• Incorporated by Full Text: Includes the full text of FAR 52.212-4, "Terms and Conditions—Commercial Products and Commercial Services," which covers critical aspects such as definitions, inspection/acceptance, changes, disputes, payment terms, termination (for convenience and cause), warranty, and compliance with laws.
• Specific Provisions: Details requirements for Trade Agreements (52.225-6), Place of Manufacture (52.225-18), and Security Prohibitions and Exclusions (52.240-90), including representations and certifications related to telecommunications equipment, Sudan, and Iran.
• Agency-Specific Clauses: Includes NIST local clauses related to Contracting Officer's Representative (COR) responsibilities, performance during changes in NIST operating status, and electronic billing/invoicing instructions (IPP).

This document is critical for bidders as it defines many of the contractual obligations, compliance requirements, and terms and conditions that will govern any resulting contract. Bidders must carefully review all listed provisions and clauses, particularly those requiring specific representations, certifications, or actions (e.g., SAM registration, Trade Agreements Certificate, security representations). The full text of FAR 52.212-4 and the NIST local clauses provide essential details on contract performance, payment, and dispute resolution.