Angled Evaporator System

Amendment / Modification

This addendum (Addendum No. 0001) modifies the Request for Quotation (RFQ) No. 6-B175-Q-00151-00.

• The primary change is to provide updated minimum specification requirements.

• Specifically, the word "Ta" has been removed from the first bullet point of the specifications.

• Minimum specification requirements.

• Bidders should ensure their proposals reflect these updated specifications. The addendum is attached for information and use in preparing proposals.

Solicitation / RFP / RFQ

This document outlines the specifications for an angled evaporator system dedicated to the fabrication of high-performance superconducting qubits and circuits. The system is intended for reproducible Josephson-junction fabrication, ultra-low-loss superconducting thin films, and advanced in-situ processing critical for state-of-the-art quantum devices.

• Support for deposition of Al, Nb, and Ti films.
• Finely adjustable and programmable substrate rotation for angled evaporation.
• High-precision, long-term stable in-situ oxidation capability.
• In-situ ion-milling capability for interface preparation.
• Film deposition rate resolution up to 0.001 nm/s; thickness resolution up to 0.01 nm.
• Dual-chamber architecture (load-lock & main chamber) with specified vacuum levels (<5×10⁻⁸ mbar in chamber, <3×10⁻⁷ mbar in load-lock).
• In-situ static and dynamic oxidation capability over a wide pressure range (5×10⁻³ mbar to 100 mbar), including automated Ozone generation.
• Substrate heating capability up to 750 °C.
• Motorized substrate holder with 330° angular range and angular accuracy/reproducibility better than 0.02°.
• Ultra-sensitive residual gas analyzer (RGA) with detection limit down to 5 × 10⁻¹⁴ Torr.
• O₂-assisted Ar ion-beam processing for surface etching and cleaning, with specified thickness uniformity.

Not specified in this document.

Not specified in this document.

This document is dated 02/06/2026, Revision 1.

Forms / Attachments / Pricing Sheets

This document, "Appendix A - Argonne Terms and Conditions for Commercial Goods and Services," outlines the standard terms and conditions that apply to commercial goods and services procured by Argonne National Laboratory. It serves as a critical attachment to any solicitation or contract, detailing the legal and operational framework for such agreements.

• Definitions: Clarifies terms like "Argonne National Laboratory," "Laboratory," "ANL," and "Government."
• Incorporated Clauses: Lists and references numerous Federal Acquisition Regulations (FAR) and Department of Energy Acquisition Regulations (DEAR) clauses, along with specific Argonne terms and conditions.
• Key Sections Covered: Includes clauses on Assignment, Audits, Changes, Conduct of Employees, Cybersecurity, Disputes, Environmental Protection, Excusable Delays, Inspection, Integration, Site Access, Limitation of Liability, Non-Waiver of Defaults, Order of Precedence, Packaging, Payments, Public Release of Information, State and Local Taxes, Survival, Suspect Counterfeit Parts, and Termination (for Cause and Convenience).
• Thresholds: Defines Micro-Purchase Threshold ($15,000) and Simplified Acquisition Threshold (SAT) ($350,000).
• Suspect/Counterfeit Bolt Headmark List: A specific attachment detailing headmarks to identify suspect or counterfeit bolts, treating any bolt on the list as defective without further testing.

Bidders must carefully review these terms and conditions to understand their contractual obligations, rights, and responsibilities. Key areas of focus include:

• Compliance: Adherence to all referenced FAR/DEAR clauses and Argonne-specific requirements (e.g., cybersecurity, site access, environmental protection).
• Payment Terms: Understanding the payment process, including accepted forms and timing.
• Liability and Termination: Awareness of limitations on liability and conditions for contract termination.
• Product Integrity: Strict adherence to requirements regarding genuine, new, and non-counterfeit parts, particularly highlighted by the "Suspect/Counterfeit Bolt Headmark List."
• Reporting: Understanding requirements for reporting information, including potential fraud, waste, or abuse.

Failure to comply with these terms can impact proposal evaluation, contract award, and performance.

Other / Unclassified

This document, titled "Moderate Risk On-Site Supplemental Conditions," outlines specific requirements and conditions for contractors performing on-site work at Argonne National Laboratory (ANL). It details procedures for approval to proceed, indemnity clauses, insurance requirements, and comprehensive Environment, Safety, and Health (ES&H) protocols.

This document is crucial for potential bidders as it establishes the operational, safety, and legal framework for any on-site work conducted under a contract with ANL. Key areas of importance for bidders include:

• Approval to Proceed: Work cannot commence without explicit approval, indicating a structured project initiation process.
• Indemnity: Contractors must hold ANL harmless against losses, requiring a thorough understanding of liability.
• Insurance: Specific insurance coverage levels are mandated, impacting bid costs and risk management.
• Environment, Safety, and Health (ES&H): This is a significant section detailing stringent requirements for worker safety, environmental protection, and compliance with various federal regulations (e.g., OSHA, DOE). It includes requirements for Job Safety Analyses (JSAs), incident reporting, personal protective equipment (PPE), electrical safety, and site access protocols.
• Disciplinary Program: Outlines a progressive disciplinary system for safety infractions, emphasizing the importance of compliance and potential consequences for non-compliance.
• FAR/DEAR Clauses: References specific Federal Acquisition Regulation (FAR) and Department of Energy Acquisition Regulation (DEAR) clauses related to personal identity verification, pollution prevention, and record management, which contractors must adhere to.

Understanding and incorporating these supplemental conditions into proposals and execution plans will be essential for any vendor seeking to perform on-site work at Argonne National Laboratory.

Form / Attachment / Pricing Sheet

This document, titled "ANL-70B Reps and Certs Long-13-JAN-2025.PDF," is a "Representation and Certifications (Long Version)" form. It requires potential offerors to provide information and certifications related to various aspects of their business and compliance with federal regulations. This form is applicable to all offers and solicitations.

• General Information: Includes legal name, UEI, Doing Business As, physical address, primary performance location, and primary contact details.
• Business Organization - Entity Type: Requires selection of the entity type and state of incorporation.
• Small Business Program: Requires identification of applicable small business classifications.
• NAICS Code: Requires provision of the North American Industry Classification System (NAICS) Code and Size Standard.
• FAR Clauses: The document includes numerous FAR clauses requiring specific representations and certifications, such as:
  • FAR 52.204-26: Covered Telecommunications Equipment of Service-Representation
  • FAR 52.222-25: Affirmative Action Compliance
  • FAR 52.222-26: Equal Opportunity Compliance
  • FAR 52.225-1: Buy American Act – Supplies
  • FAR 52.204-10: Reporting Executive Compensation and First-Tier Subcontract Awards
  • FAR 52.209-5: Certification Regarding Debarment, Suspension, Proposed Debarment and other Responsibility Matters
  • FAR 52.222-18: Certification Regarding Knowledge of Child Labor for Listed End Products
  • FAR 52.203-11: Certification and Disclosure Regarding Payments to Influence Certain Federal Transactions
  • FAR 52.222-37: Compliance with Veteran's Employment Reporting Requirements
  • FAR 52.203-2: Certificate of Independent Price Determination
  • FAR 52.203-5: Covenant Against Contingent Fees
  • FAR 52.222-50: Combatting Trafficking in Persons – Deviation
  • FAR 52.230-1: Cost Accounting Standards Notices and Certification
• Personal Conflict of Interest Certification: Requires disclosure of any financial interests held by Argonne/University of Chicago employees or their near relatives in the offeror's company.

This document is critical for any vendor intending to submit an offer. Bidders must carefully review each section and provide accurate certifications and information as required by the various FAR clauses. Failure to complete this form accurately and completely may impact the evaluation of the offer or lead to non-responsibility determinations. The document outlines compliance requirements related to business size, labor practices, ethical conduct, and financial reporting, among others.

Statement of Work (SOW)

Procurement of an Angled Evaporator System for the Center for Nanoscale Materials (CNM) at Argonne National Laboratory (ANL) to enable high-quality deposition of superconducting thin films and fabrication of Josephson junctions for quantum information science and microelectronics research.

• The contractor shall engineer, manufacture, and assemble the Angled Evaporator Instrument.

• The Instrument must meet specified technical requirements, demonstrated through Factory Acceptance Tests (FAT) at the contractor's facility and Site Acceptance Tests (SAT) at CNM.

• The contractor is responsible for all materials, tools, jigs, fixtures, and test equipment.

• Delivery, reassembly, testing, and commissioning at CNM are required.

• Compliance with all specification requirements and safety codes/standards is mandatory.

• Pre-Delivery:

  • Conduct FAT, provide FAT report with test data and images for ANL review and approval prior to shipment.
  • Develop work control documents (e.g., Job Safety Analysis) with ANL.
  • Disassemble and ship the Instrument to CNM.

• **Installation (ANL provides facility support):

  • Contractor reassembles the system.
  • Contractor returns the Instrument to operating status.
  • Contractor conducts SAT and provides SAT report.
  • Contractor provides training on operation, maintenance, and troubleshooting.
  • Contractor provides maintenance and operating manuals.

• Technical Specifications:

  • Electrical: Conformance to U.S. standards (NFPA70), ANL EAHJ approval, qualified personnel, NRTL labeling preferred, ANL electrical safety inspection required for non-listed equipment. Compliance with OSHA 1910.147 and ANL LMS standards for hazardous energy control. Lockout/tagout hardware compatibility.
  • Process Piping: Adherence to ASME B31.3 for nitrogen, helium, and cooling water lines. 100% proof testing at 150% (hydrostatic) or 110% (pneumatic) of maximum working pressure.
  • Hoisting and Rigging: Provision of lifting eyes, compliance with ANL requirements, and ASME B30.26/BTH-1 standards for lifting fixtures.

• One (1)-year warranty on parts and labor from ANL acceptance.

• Recommended spare parts list required.

• Remote diagnosis and troubleshooting available within 48 hours during regular workdays upon request.

• Factory Acceptance Test (FAT) Report

• Site Acceptance Test (SAT) Report

• Work Control Documents for installation

• Training on tool operation

• Maintenance and Operating Manuals with spare parts list

Forms / Attachments / Pricing Sheets

This document, "Appendix D-8-C: Intellectual Property Provisions - Commercial Supplies and Services Requiring Delivery of Data," outlines the intellectual property rights related to data delivered under a contract. It details the government's rights concerning technical data and computer software provided by the contractor.

• Article 1: Rights in Data – General (FAR 52.227-14): Defines terms such as "data," "computer software," "limited rights data," and "restricted computer software." It specifies the "allocation of rights," detailing when the government has unlimited rights and when the contractor retains certain rights. It also covers copyright provisions and the contractor's rights regarding data use, release, and publication.
• Article 2: Additional Data Requirements (FAR 52.227-16): Allows the Laboratory or DOE to order additional data produced or used during contract performance, within three years after acceptance of deliverables. The "Rights in Data – General" clause applies to this ordered data.
• Article 3: Rights to Proposal Data (Technical) (FAR 52.227-23): States that the government will have unlimited rights to the technical data contained in the proposal upon which the contract is based, except as otherwise provided.

This appendix is crucial for bidders to understand the government's rights regarding any data, technical information, or computer software they will be required to deliver as part of a contract. It clarifies ownership, usage, and disclosure limitations, which can impact intellectual property strategy and proposal development.

Statement of Work (SOW) / Performance Work Statement (PWS)

This document outlines the technical specifications for an angled evaporator system. The system is intended for research in quantum information science and microelectronics, focusing on the fabrication of high-performance superconducting qubits and circuits. It aims to enable reproducible Josephson-junction fabrication, ultra-low-loss superconducting thin films, and advanced in-situ processing for quantum devices.

• High-quality superconducting film deposition (Al, Nb, Ta, Ti).

• Finely adjustable and programmable substrate rotation for angled evaporation.

• High-precision, long-term stable in-situ oxidation for Josephson-junction fabrication.

• In-situ ion-milling for interface preparation.

• Dual-chamber architecture (load-lock & main chamber) for rapid sample exchange and maintaining low outgassing and high-vacuum conditions.

• In-situ static and dynamic oxidation capabilities over a wide pressure range.

• Automated Ozone generation for Josephson-junction oxidation.

• Substrate heating up to 750 °C for ultra-low-defect superconducting thin-film growth.

• Motorized substrate holder with continuous tilting capability (330° angular range).

• Ultra-sensitive residual gas analyzer (RGA) for real-time monitoring.

• O2-assisted Ar ion-beam processing for surface etching and cleaning.

• Film deposition rate resolution: up to 0.001 nm/s.

• Thickness resolution: up to 0.01 nm.

• Chamber pressure: <5×10-8 mbar (deposition), <5×10-7 mbar (after pumping).

• Load-lock pressure: <3×10-7 mbar (deposition), <1×10-6 mbar (after pumping).

• Substrate heating: up to 750 °C.

• Substrate holder angular accuracy and reproducibility: better than 0.02°.

• RGA detection limit: down to 5 × 10-14 Torr.

• Thickness uniformity: ±3% over Ø 3" substrates, ±6% over Ø 4" substrates.

Not specified in this document.

• System must support in-situ static and dynamic oxidation from 5×10-3 mbar to 100 mbar.
• System must support automated Ozone generation.
• System must have a motorized substrate holder with programmable control.
• System must include an ultra-sensitive RGA.
• System must have O2-assisted Ar ion-beam processing capability.