Angled Evaporator System
Overview
Buyer
Place of Performance
NAICS
PSC
Set Aside
Original Source
Timeline
Qualification Details
Fit reasons
- NAICS alignment with historical contract wins in similar service areas.
- Scope strongly matches core technical capabilities and delivery model.
Risks
- Past performance thresholds may require one additional teaming partner.
- Potential clarification needed on staffing minimums before bid/no-bid.
Next steps
Validate eligibility requirements, assign capture owner, and schedule partner outreach to confirm teaming strategy before submission planning.
Quick Summary
Argonne National Laboratory (ANL) is seeking to procure an Angled Evaporator System for its Center for Nanoscale Materials (CNM). This system is crucial for advancing quantum information science and microelectronics research, specifically for high-quality deposition of superconducting thin films and fabrication of Josephson junctions. This is a Solicitation (Request for Quotation).
Scope of Work
The contractor will be responsible for the engineering, manufacturing, assembly, delivery, reassembly, testing, and commissioning of the Angled Evaporator Instrument at ANL's CNM. Key requirements include:
- Technical Specifications: High-quality superconducting film deposition (Al, Nb, Ta, Ti), finely adjustable and programmable substrate rotation, high-precision in-situ oxidation, in-situ ion-milling, dual-chamber architecture, automated Ozone generation, substrate heating up to 750°C, motorized substrate holder, ultra-sensitive residual gas analyzer (RGA), and O2-assisted Ar ion-beam processing.
- Performance Standards: Detailed metrics for film deposition rate resolution (up to 0.001 nm/s), thickness resolution (up to 0.01 nm), chamber pressure (<5×10-8 mbar), substrate heating accuracy, and thickness uniformity.
- Deliverables: Factory Acceptance Test (FAT) Report, Site Acceptance Test (SAT) Report, work control documents, training, and comprehensive maintenance/operating manuals with a spare parts list.
- Warranty: One (1)-year warranty on parts and labor from ANL acceptance, with remote diagnosis and troubleshooting available within 48 hours.
Contract & Timeline
- Contract Type: Solicitation (RFQ)
- Set-Aside: None specified
- Proposal Due Date: February 13, 2026, at 5:00 PM CST
- Questions Due Date: February 10, 2026, at 12:00 PM CST
- Published Date: February 5, 2026
Submission Requirements
Proposals must address the following:
- Executed ANL-70 Request for Quotation (signed).
- Proposal quoted in USD, using DAP Incoterms (international) or FOB Destination (domestic), confirming total price.
- HTS code (if drop shipping from outside USA).
- Lead Time, Country of Origin, and Shipping Origin.
- Completed ANL-70B Representations & Certifications (dated 01/13/2025).
- Review and acceptance of ANL-71 COM Terms and Conditions.
- Review and acceptance of ANL-366M Supplemental Onsite Terms (for moderate risk on-site work).
- Review and acceptance of ANL-562IP - Appendix D-8-C (Intellectual Property Provisions).
- Review of the Statement of Work (dated Dec 10, 2025) and Minimum Required Specifications (dated Feb 5, 2026).
Key Terms & Conditions
Bidders must adhere to ANL's standard terms (ANL-71 COM) which incorporate numerous FAR/DEAR clauses covering areas like cybersecurity, ES&H, liability, and suspect/counterfeit parts. The ANL-70B requires extensive representations regarding business status, labor practices, and ethical conduct. For on-site installation and commissioning, ANL-366M mandates strict ES&H protocols, indemnity, and insurance. Appendix D-8-C outlines the government's rights concerning intellectual property and data delivered under the contract.