CHIPS High-Throughput High-Resolution X-ray Laminography/Tomography System for Advanced Packaged Semiconductor Devices and Substrates

Solicitation / RFP / RFQ

This is a combined synopsis/solicitation (RFQ) for commercial products or services, prepared in accordance with FAR Part 12. The government is procuring an X-ray Laminography/Tomography System, including shipping, installation, training, and related transportation expenses. Service contracts for Years 2 through 5 are also included as options.

• CLIN 0001: X-ray Laminography/Tomography System (IAW Attachment 1)

• CLIN 0002: Shipping, Installation, and Training

• CLIN 0003: Other transportation related expenses (Not-to-Exceed)

• Options for Service Contracts (Years 2-5)

• Detailed requirements are specified in Attachment 1 (Statement of Work).

• The system should ideally operate in both XCL and XCT modes, with higher confidence given for systems with higher spatial resolution and faster scan speeds in XCT mode.

• This is a Request for Quotation (RFQ).

• The acquisition is being solicited as full and open competition.

• The solicitation includes provisions and clauses in effect through Revolutionary FAR Overhaul (RFO).

• The North American Industrial Classification System (NAICS) code is 334413 - Semiconductor and Related Device Manufacturing, with a small business size standard of 1,250 employees.

• Submission Deadline: February 26, 2025, 11:00 AM Eastern Time.

• Submission Method: Electronic quotations via email to tracy.retterer@nist.gov and Donald.collie@nist.gov. Reference RFQ number in the subject line.

• Inquiries Deadline: Questions must be submitted in writing to the Contract Specialist and Contracting Officer no later than 5 calendar days after solicitation issuance.

• Quotation Preparation: Must be clearly written, indexed, and logically assembled into four distinct volumes:

  • Volume I: Technical Quotation (addressing SOW requirements with citations and evidence)
  • Volume II: Demonstrated Experience (past 5 years, prime or subcontractor)
  • Volume III: Price Quotation (firm-fixed-price per CLIN, valid for 90 days)
  • Volume IV: Terms and Conditions and Small Business Subcontracting Plan

• Evaluation Criteria: Best value award, considering price and non-price factors. Non-price factors (Technical Capability and Prior Demonstrated Experience) are more important than price. The government may award without discussions based on initial quotes.

  • Factor 1: Technical Capability
  • Factor 2: Prior Demonstrated Experience
  • Factor 3: Price (evaluated for consistency, marketplace, and reasonableness for quotes with high confidence in non-price factors).

• Offerors must have an ACTIVE registration in SAM.gov at the time of quotation submission, award, performance, and final payment.

• Small businesses must submit a subcontracting plan if not certified as a small business.

• Attachments referenced: Attachment 1 (Statement of Work), Attachment 2 (Applicable Provisions and Clauses).

• Offerors objecting to terms and conditions must state exceptions in their quotation.

Statement of Work (SOW) / Performance Work Statement (PWS)

The National Institute of Standards and Technology (NIST) requires a high-throughput, high-resolution, non-destructive three-dimensional (3D) X-ray imaging system to support research in semiconductor manufacturing metrology. This system will aid in addressing critical metrology gaps for future microelectronics manufacturing, component integration in advanced packaging, and standardization of new materials and processes.

The contractor shall deliver one analytical instrument system meeting specified requirements, including installation, training, warranty, and service. The system must be capable of resolving 1 µm Metal/Non-metal line and space patterns at a scan speed of at least 0.5 mm³/min. It must operate in X-ray Computed Laminography (XCL) mode, with X-ray Computed Tomography (XCT) mode being a value-add. Key components include an X-ray source with a suitable spot size, an X-ray detector with at least 13 megapixels, and automated sample handling for samples up to 100 mm × 100 mm × 20 mm (with manual loading acceptable for 300 mm diameter samples). The system must also feature robust instrument control capabilities, including recipe saving, tiling, custom stage motion control, and remote access via Windows Remote Desktop. Two reconstruction computers with specified software for data processing, reconstruction (including various algorithms), and analysis (including deep learning segmentation and 3D visualization) are required, also accessible via remote desktop.

• Spatial Resolution: Minimum 1 µm Metal/Non-metal line and space pattern resolution.

• Scan Speed: Minimum 0.5 mm³/min.

• XCL Mode: Required.

• XCT Mode: Desired, with higher resolution and faster speeds preferred.

• Detector: Minimum 13 megapixels.

• Sample Handling: Automatic loading for smaller samples; manual for 300 mm wafers.

• Reconstruction: Capable of generating 3D stitched volumes from at least 7 fields of view, visualizing volumes up to 1TB.

• Delivery: 32 weeks after award.

• Installation & Training: Within 2 weeks of delivery.

• Place of Performance: Installation and training at NIST, Gaithersburg, MD. Other work at contractor's facility.

• Warranty: 1 year minimum, with optional service contracts for Years 2-5.

• Deliverables: Instrument system, installation, training, Year 1 warranty service.

• Optional Deliverables: Service contracts for Years 2-5.

• Facility Requirements: Footprint not exceeding 1.5 m × 2.5 m; specific electrical and potential high-pressure air needs. Safety shielding and interlocks are mandatory.

• Training: For up to 4 NIST staff covering essential functions and maintenance.

• Acceptance: Performance tests for resolution, speed, sample handling, and 300 mm wafer stitching may be conducted by NIST.

• Payment Schedule: 40% after acceptance of installation guidelines, 35% upon delivery, 25% upon government acceptance.

• Security: Contractor personnel require NIST identification badges and vehicle registration for campus access.

Form / Attachment / Pricing Sheet

This document lists the solicitation provisions and contract clauses that are incorporated by reference into the solicitation or resulting contract. It also provides the full text for several key provisions and clauses, including FAR 52.212-4 (Terms and Conditions—Commercial Products and Commercial Services), FAR 52.217-9 (Option to Extend the Term of the Contract), FAR 52.225-6 (Trade Agreements Certificate), FAR 52.225-18 (Place of Manufacture), FAR 52.240-90 (Security Prohibitions and Exclusions Representations and Certifications), and several NIST local clauses.

• Incorporated Provisions and Clauses: A comprehensive list of FAR and DFARS provisions and clauses that apply to this solicitation, many of which are incorporated by reference.
• Full Text Clauses: Detailed terms and conditions for key clauses such as FAR 52.212-4, covering definitions, inspection, acceptance, changes, disputes, payment, termination, and warranty.
• Representations and Certifications: Specific requirements for offerors to represent and certify compliance with various regulations, including trade agreements, place of manufacture, security prohibitions (telecommunications, Sudan, Iran), and agency-specific requirements.
• NIST Local Clauses: Specific instructions related to Contracting Officer's Representative (COR) designation, agency protests, GAO/Court of Federal Claims protests, place of acceptance, contract performance during NIST operating status changes, and electronic billing/invoicing procedures.

This document is critical for bidders as it outlines the legal and contractual framework governing the solicitation and any resulting contract. Bidders must carefully review all incorporated provisions and clauses, paying close attention to those requiring specific representations, certifications, or actions. Understanding these requirements is essential for preparing a compliant offer and for fulfilling contractual obligations. Key areas of focus include compliance with trade agreements, manufacturing location, security prohibitions, and adherence to NIST's specific administrative and operational procedures for invoicing and performance.