Ultrapure Water System

Solicitation / RFP / RFQ

This document incorporates by reference numerous Federal Acquisition Regulation (FAR) and Commerce Acquisition Regulation (CAR) provisions and clauses. It also provides the full text for a few specific provisions and clauses, including instructions for offerors regarding the Buy American Act, authorized deviations, inquiries, agency protests, GAO/Court of Federal Claims protests, and place of acceptance. Additionally, it outlines NIST's policy on contract performance during changes in NIST operating status and provides billing instructions, including electronic submission via email and the Invoice Processing Platform (IPP).

• FAR 52.252-1 & 52.252-2: Provisions and clauses are incorporated by reference. Full text is available upon request or electronically via provided links.

• FAR 52.225-2 (Buy American Certificate): Offerors must certify end products as domestic or foreign, identify critical components, and provide country of origin and domestic content percentage where applicable.

• CAR 1352.215-72 (Inquiries): All questions must be submitted in writing to the Contract Specialist (Ranae Armstrong) and Contracting Officer (Don Collie) no later than three calendar days after solicitation issuance. Responses will be provided in an amendment.

• Protest Procedures: Details are provided for agency protests (to NIST/Acquisition Management Division) and GAO/Court of Federal Claims protests, including service requirements.

• CAR 1352.246-70 (Place of Acceptance): Acceptance of supplies and services will occur at the National Institute of Standards and Technology, 100 Bureau Drive, Gaithersburg, MD 20899.

• NIST Local53: Contractors must check NIST campus operating status daily before arriving on site and adhere to all NIST direction and guidance.

• Billing Instructions: Invoices must be submitted electronically to INVOICE@NIST.GOV, including specific contract and invoice details. Payment requests must be submitted via the U.S. Department of the Treasury's Invoice Processing Platform (IPP) upon written notice.

• Inquiries must be submitted in writing within three calendar days of issuance.

• Protest procedures are detailed for agency, GAO, and Court of Federal Claims protests.

• Not explicitly detailed in this document, but FAR 52.204-5 (Women-Owned Business) and FAR 52.219-28 (Post-award Small Business Program Representation) are incorporated by reference.

• Many provisions and clauses are incorporated by reference with "DEVIATION JAN 2026" indicating recent changes.

• Offerors are cautioned that some provisions may require completion and submission with their offer.

Statement of Work (SOW)

To provide an ultrapure water (UPW) system capable of producing Type 1 UPW from domestic tap water, including pretreatment, to support advanced metrology for semiconductor cleaning chemicals. This is crucial for enhancing semiconductor manufacturing yield by enabling the detection, identification, and quantification of critical contaminants.

• Deliverables: One (1) UPW System, one (1) Pretreatment System, and a 12-month warranty.

• UPW System Requirements: Laboratory-scale, capable of producing Type 1 UPW from conditioned tap water with effluent resistance ≥ 18.2 MΩ cm and < 3 ppb TOC. Must sustain a dispense rate of > 1.5 L min-1 at 30-70 psi for up to 8 hours. Includes an ultrafilter (≤ 100 kDa), UV/TOC lamp, TOC monitor, and operates on 120 VAC.

• Pretreatment System Requirements: Conditions tap water for the UPW system to ensure sustained system life. Operates on 120 VAC.

• Service Agreement: Includes semiannual and annual servicing for both pretreatment and UPW systems, involving filter replacements and component servicing.

• UPW effluent must meet ≥ 18.2 MΩ cm resistivity and < 3 ppb TOC.

• Sustained dispense rate of > 1.5 L min-1 at 30-70 psi for up to 8 hours.

• Government reserves the right to perform performance tests to verify system specifications.

• Delivery Lead Time: Sixty (60) days after receipt of order for UPW and Pretreatment Systems.

• Installation: Contractor shall install the system within 30 days after delivery at NIST, Gaithersburg, MD Building 221.

• Warranty: 12-month warranty commencing upon acceptance.

• All offered items must be new; used, remanufactured, experimental, prototype, or custom items are not acceptable.

• "Gray market" components are not authorized.

• All items must be shipped in original manufacturer’s packaging with original documentation.

• Delivery terms are F.O.B Destination (or equivalent DDP).

• Installation includes uncrating, rigging, set-up, hook-up, demonstration, and trash removal.

• Contractor may be present at their own expense during government performance tests.

• Ownership transfers to NIST upon acceptance.

• Inspection and acceptance to be completed within fourteen (14) days of receipt.

Solicitation / RFP / RFQ

This is a combined synopsis/solicitation for commercial products or services, prepared in accordance with FAR Part 12. The government is seeking quotations for an UPW System, a Pretreatment System, and a 1-Year Service Agreement. This procurement is a total small business set-aside.

• UPW System (1 unit)

• Pretreatment System (1 unit)

• 1-Year Service Agreement (1 unit)

• Requirements are detailed in the attached Statement of Work document.

• Date(s) and place(s) of delivery and acceptance, and FOB point are required per the SOW.

• This will result in a firm-fixed-price purchase order (PO).

• Simplified acquisition procedures will be utilized.

• Submission Deadline: Electronic quotations due by 4:00 PM Eastern Time on 04/06/26.

• Submission Method: Email to ranae.armstrong@nist.gov with a copy to Donald.collie@nist.gov. Reference RFQ number in the subject line.

• Inquiries Deadline: Written questions due by 04/02/26 to both email addresses listed above.

• Evaluation Criteria: Award will be made to the responsible quoter whose offer is the lowest priced, technically acceptable quote.

• Technical Capability: Must meet or exceed all specifications in the SOW. No prototypes, used, or refurbished instruments will be considered.

• Price: Proposed prices will be evaluated for reasonableness and compatibility with technical requirements.

• The government may award without discussions based solely on initial quotes.

• Total small business set-aside.

• Quoters must have an ACTIVE registration in SAM.gov at the time of quotation submission, award, performance, and final payment.

• The solicitation number is 1333ND26QNB030142.

• The North American Industry Classification System (NAICS) code is 221310 (Water Supply and Irrigation System) with a small business size standard of $41 million.

• Quotations must be divided into three volumes: Technical, Price, and Terms and Conditions.

• Any objections to terms and conditions must be clearly stated in the quotation.